Saenger; Ingo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Saenger; Ingo.The latest application filed is for "illumination system of a microlithographic projection exposure apparatus with a birefringent element".

Company Profile

0.30.31

Saenger; Ingo - Heidenheim DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination system of a microlithographic projection exposure apparatus with a birefringent element Grant 10,151,982 - Fiolka , et al. Dec	2018-12-11
Polarization measuring device, lithography apparatus, measuring arrangement, and method for polarization measurement Grant 10,041,836 - Saenger August 7, 2	2018-08-07
EUV light source for generating a usable output beam for a projection exposure apparatus Grant 9,955,563 - Saenger , et al. April 24, 2	2018-04-24
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,946,161 - Saenger , et al. April 17, 2	2018-04-17
Optical system of a microlithographic projection exposure apparatus Grant 9,817,317 - Saenger , et al. November 14, 2	2017-11-14
Method and apparatus for compensating at least one defect of an optical system Grant 9,798,249 - Dmitriev , et al. October 24, 2	2017-10-24
Optical assembly for increasing the etendue Grant 9,678,432 - Saenger , et al. June 13, 2	2017-06-13
Mirror Grant 9,678,439 - Saenger , et al. June 13, 2	2017-06-13
Mirror system comprising at least one mirror for use for guiding illumination and imaging light in EUV projection lithography Grant 9,665,008 - Saenger , et al. May 30, 2	2017-05-30
Collector Grant 9,645,503 - Saenger , et al. May 9, 2	2017-05-09
Apparatus and method for compensating a defect of a channel of a microlithographic projection exposure system Grant 9,632,413 - Saenger , et al. April 25, 2	2017-04-25
Optical system, in particular of a microlithographic projection exposure apparatus Grant 9,588,433 - Saenger March 7, 2	2017-03-07
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus Grant 9,581,910 - Schlesener , et al. February 28, 2	2017-02-28
Illumination system for an EUV lithography device and facet mirror therefor Grant 9,551,941 - Ruoff , et al. January 24, 2	2017-01-24
Illumination optical unit for projection lithography Grant 9,507,269 - Hennerkes , et al. November 29, 2	2016-11-29
Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure Grant 9,500,956 - Saenger , et al. November 22, 2	2016-11-22
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,488,918 - Saenger , et al. November 8, 2	2016-11-08
EUV light source for generating a used output beam for a projection exposure apparatus Grant 9,477,025 - Saenger October 25, 2	2016-10-25
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,442,385 - Saenger , et al. September 13, 2	2016-09-13
Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus Grant 9,411,245 - Saenger , et al. August 9, 2	2016-08-09
Optical system of a microlithographic projection exposure apparatus Grant 9,405,202 - Saenger , et al. August 2, 2	2016-08-02
Illumination System Of A Microlithographic Projection Exposure Apparatus With A Birefringent Element App 20160195815 - Fiolka; Damian ; et al.	2016-07-07
Optical system of a microlithographic projection exposure apparatus Grant 9,323,156 - Saenger , et al. April 26, 2	2016-04-26
Illumination system of a microlithographic projection exposure apparatus with a birefringent element Grant 9,316,920 - Fiolka , et al. April 19, 2	2016-04-19
Illumination System For An Euv Lithography Device And Facet Mirror Therefor App 20160004164 - Ruoff; Johannes ; et al.	2016-01-07
Optical Assembly For Increasing The Etendue App 20150355552 - Saenger; Ingo ; et al.	2015-12-10
Illumination optical unit for a projection exposure apparatus Grant 9,195,057 - Saenger November 24, 2	2015-11-24
Euv Light Source For Generating A Used Output Beam For A Projection Exposure Apparatus App 20150323874 - Saenger; Ingo	2015-11-12
Polarization Measuring Device, Lithography Apparatus, Measuring Arrangement, And Method For Polarization Measurement App 20150323387 - SAENGER; Ingo	2015-11-12
Optical system of a microlithographic projection exposure apparatus Grant 9,182,677 - Schlesener , et al. November 10, 2	2015-11-10
Method Of Lithographically Transferring A Pattern On A Light Sensitive Surface And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150301455 - Schlesener; Frank ; et al.	2015-10-22
Optical System Of A Microlithographic Projection Exposure Apparatus App 20150277235 - Saenger; Ingo ; et al.	2015-10-01
Euv Light Source For Generating A Usable Output Beam For A Projection Exposure Apparatus App 20150173163 - Saenger; Ingo ; et al.	2015-06-18
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20150160566 - Saenger; Ingo ; et al.	2015-06-11
Mirror App 20150160561 - Saenger; Ingo ; et al.	2015-06-11
Optical System Of A Microlithographic Projection Exposure Apparatus App 20150085272 - Saenger; Ingo ; et al.	2015-03-26
Optical System, In Particular Of A Microlithographic Projection Exposure Apparatus App 20150062551 - Saenger; Ingo	2015-03-05
Optical System Of A Microlithographic Projection Exposure Apparatus App 20150029480 - Schlesener; Frank ; et al.	2015-01-29
Apparatus And Method For Compensating A Defect Of A Channel Of A Microlithographic Projection Exposure System App 20150017589 - Saenger; Ingo ; et al.	2015-01-15
Optical system for a microlithographic projection exposure apparatus Grant 8,922,753 - Kraehmer , et al. December 30, 2	2014-12-30
Optical system of a microlithographic projection exposure apparatus Grant 8,917,433 - Saenger December 23, 2	2014-12-23
Illumination Optical Unit For A Projection Exposure Apparatus App 20140362360 - Saenger; Ingo	2014-12-11
Method For Adjusting An Optical System Of A Microlithographic Projection Exposure Apparatus App 20140362362 - Saenger; Ingo ; et al.	2014-12-11
Method And Apparatus For Compensating At Least One Defect Of An Optical System App 20140347646 - Dmitriev; Vladimir ; et al.	2014-11-27
Optical system, in particular of a microlithographic projection exposure apparatus Grant 8,891,060 - Saenger November 18, 2	2014-11-18
Polarization-influencing Optical Arrangement, In Particular In A Microlithographic Projection Exposure Apparatus App 20140313498 - Saenger; Ingo ; et al.	2014-10-23
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20140285788 - Saenger; Ingo ; et al.	2014-09-25
Optical System For A Microlithographic Projection Exposure Apparatus App 20140268085 - Kraehmer; Daniel ; et al.	2014-09-18
Mirror System Comprising At Least One Mirror For Use For Guiding Illumination And Imaging Light In Euv Projection Lithography App 20140226142 - Saenger; Ingo ; et al.	2014-08-14
Collector App 20140192339 - Saenger; Ingo ; et al.	2014-07-10
Optical System Of A Microlithographic Projection Exposure Apparatus App 20140168739 - Saenger; Ingo	2014-06-19
Optical System Of A Microlithographic Projection Exposure Apparatus, And Microlithographic Exposure App 20140132942 - Saenger; Ingo ; et al.	2014-05-15
Illumination Optical Unit For Projection Lithography App 20140111785 - Hennerkes; Christoph ; et al.	2014-04-24
Optical system, in particular of a microlithographic projection exposure apparatus App 20130271741 - Saenger; Ingo	2013-10-17
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20130077077 - Saenger; Ingo ; et al.	2013-03-28
Optical System Of A Microlithographic Projection Exposure Apparatus App 20130050673 - Saenger; Ingo ; et al.	2013-02-28
Optical system, in particular of a microlithographic projection exposure apparatus Grant 8,098,366 - Saenger , et al. January 17, 2	2012-01-17
Polarization-influencing Optical Arrangement And An Optical System Of A Microlithographic Projection Exposure Apparatus App 20110194093 - Saenger; Ingo	2011-08-11
Optical System, In Particular Of A Microlithographic Projection Exposure Apparatus App 20110149261 - Saenger; Ingo ; et al.	2011-06-23
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100165318 - Fiolka; Damian ; et al.	2010-07-01

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