| Patent | Date |
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Frequency tracking for subsurface atomic force microscopy
Grant 11,402,405 - Van Neer , et al. August 2, 2 | 2022-08-02 |
Heterodyne Scanning Probe Microscopy Method And Scanning Probe Microscopy System
App 20220229088 - RAJADURAI; Sri Ram Shankar ; et al. | 2022-07-21 |
Subsurface atomic force microscopy with guided ultrasound waves
Grant 11,327,092 - Piras , et al. May 10, 2 | 2022-05-10 |
Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample
Grant 11,320,454 - Sadeghian Marnani , et al. May 3, 2 | 2022-05-03 |
Method, atomic force microscopy system and computer program product
Grant 11,289,367 - Navarro Paredes , et al. March 29, 2 | 2022-03-29 |
Method of and atomic force microscopy system for performing subsurface imaging
Grant 11,268,935 - Piras , et al. March 8, 2 | 2022-03-08 |
Scanning Probe Microscope, Scan Head And Method
App 20220057430 - HERFST; Roelof Willem ; et al. | 2022-02-24 |
Lithographic Patterning Method
App 20220026816 - MAAS; Diederik Jan ; et al. | 2022-01-27 |
Atomic Force Microscopy Cantilever, System And Method
App 20220026464 - Van Es; Maarten Hubertus ; et al. | 2022-01-27 |
Distance sensor, alignment system and method
Grant 11,221,214 - Sadeghian Marnani January 11, 2 | 2022-01-11 |
Frequency Tracking For Subsurface Atomic Force Microscopy
App 20210389345 - VAN NEER; Paul Louis Maria Joseph ; et al. | 2021-12-16 |
Method For Measuring Damage Of A Substrate Caused By An Electron Beam
App 20210333226 - Sadeghian Marnani; Hamed | 2021-10-28 |
Method of performing atomic force microscopy with an ultrasound transducer
Grant 11,067,597 - Van Riel , et al. July 20, 2 | 2021-07-20 |
Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system
Grant 11,035,878 - Fillinger , et al. June 15, 2 | 2021-06-15 |
Method of and system for detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip
Grant 11,029,329 - Sadeghian Marnani June 8, 2 | 2021-06-08 |
Subsurface Atomic Force Microscopy With Guided Ultrasound Waves
App 20210109128 - Piras; Daniele ; et al. | 2021-04-15 |
Atomic force microscopy device, method and lithographic system
Grant 10,976,345 - Mohtashami , et al. April 13, 2 | 2021-04-13 |
Method of and system for performing detection on or characterization of a sample
Grant 10,948,458 - Sadeghian Marnani , et al. March 16, 2 | 2021-03-16 |
Heterodyne atomic force microscopy device, method and lithographic system
Grant 10,942,200 - Mohtashami , et al. March 9, 2 | 2021-03-09 |
Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device
Grant 10,935,568 - van Es , et al. March 2, 2 | 2021-03-02 |
Device and method for measuring and/or modifying surface features on a surface of a sample
Grant 10,908,179 - Sadeghian Marnani February 2, 2 | 2021-02-02 |
Method And System For At Least Subsurface Characterization Of A Sample
App 20210003608 - SADEGHIAN MARNANI; Hamed ; et al. | 2021-01-07 |
Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device
Grant 10,859,925 - Navarro Paredes , et al. December 8, 2 | 2020-12-08 |
Thermal nanolithography method and system
Grant 10,852,641 - Sadeghian Marnani December 1, 2 | 2020-12-01 |
Method Of Performing Atomic Force Microscopy
App 20200348334 - VAN RIEL; Martinus Cornelius Johannes Maria ; et al. | 2020-11-05 |
Atomic Force Microscopy System, Method For Mapping One Or More Subsurface Structures Located In A Semiconductor Device Or For Monitoring Lithographic Parameters In A Semiconductor Device And Use Of Such An Atomic Force Microscopy System
App 20200309816 - FILLINGER; Laurent ; et al. | 2020-10-01 |
Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor element
Grant 10,775,405 - Sadeghian Marnani , et al. Sept | 2020-09-15 |
Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product
Grant 10,746,702 - Sadeghian Marnani , et al. A | 2020-08-18 |
Atomic Force Microscopy Cantilever, System And Method
App 20200249255 - Kind Code | 2020-08-06 |
Method, Atomic Force Microscopy System And Computer Program Product
App 20200227311 - Navarro Paredes; Violeta ; et al. | 2020-07-16 |
Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby
Grant 10,712,674 - Kuiper , et al. | 2020-07-14 |
Method of performing surface measurements on a surface of a sample, and scanning probe microscopy system therefore
Grant 10,697,998 - Sadeghian Marnani , et al. | 2020-06-30 |
Alignment system and method
Grant 10,663,874 - Sadeghian Marnani | 2020-05-26 |
Method Of And System For Performing Subsurface Imaging Using Vibration Sensing
App 20200124571 - Piras; Daniele ; et al. | 2020-04-23 |
Heterodyne Atomic Force Microscopy Device, Method And Lithographic System
App 20200124635 - Mohtashami; Abbas ; et al. | 2020-04-23 |
Scanning Probe Microscopy System For And Method Of Mapping Nanostructures On The Surface Of A Sample
App 20200116754 - Sadeghian Marnani; Hamed ; et al. | 2020-04-16 |
Method Of Positioning A Carrier On A Flat Surface, And Assembly Of A Carrier And A Positioning Member
App 20200081034 - Sadeghian Marnani; Hamed ; et al. | 2020-03-12 |
Determining interaction forces in a dynamic mode AFM during imaging
Grant 10,578,643 - Sadeghian Marnani , et al. | 2020-03-03 |
Method Of And Atomic Force Microscopy System For Performing Subsurface Imaging
App 20200057028 - Piras; Daniele ; et al. | 2020-02-20 |
Method Of And System For Performing Detection On Or Characterization Of A Sample
App 20190383774 - Sadeghian Marnani; Hamed ; et al. | 2019-12-19 |
Method Of And System For Determining An Overlay Or Alignment Error Between A First And A Second Device Layer Of A Multilayer Sem
App 20190378769 - Navarro Paredes; Violeta ; et al. | 2019-12-12 |
Method Of And System For Detecting Structures On Or Below The Surface Of A Sample Using A Probe Including A Cantilever And A Pro
App 20190369140 - Sadeghian Marnani; Hamed | 2019-12-05 |
Atomic Force Microscopy Device, Method And Lithographic System
App 20190369139 - Mohtashami; Abbas ; et al. | 2019-12-05 |
Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member
Grant 10,495,667 - Sadeghian Marnani , et al. De | 2019-12-03 |
Thermal Nanolithography Method And System
App 20190361356 - Sadeghian Marnani; Hamed | 2019-11-28 |
Positioning arm for and method of placing a scan head on a support surface
Grant 10,488,433 - Sadeghian Marnani , et al. Nov | 2019-11-26 |
Method Of Modifying A Surface Of A Sample, And A Scanning Probe Microscopy System
App 20190353681 - Sadeghian Marnani; Hamed ; et al. | 2019-11-21 |
Scanning Probe Microscopy System, And Method For Mounting And Demounting A Probe Therein
App 20190317127 - SADEGHIAN MARNANI; Hamed ; et al. | 2019-10-17 |
Method Of Determining An Overlay Error, Method For Manufacturing A Multilayer Semiconductor Device, Atomic Force Microscopy Devi
App 20190310284 - van Es; Maarten Hubertus ; et al. | 2019-10-10 |
Alignment System And Method
App 20190250524 - Sadeghian Marnani; Hamed | 2019-08-15 |
Method Of And System For Performing Defect Detection On Or Characterization Of A Layer Of A Semiconductor Element Or Semi-manufa
App 20190227097 - Sadeghian Marnani; Hamed ; et al. | 2019-07-25 |
Heterodyne Scanning Probe Microscopy Method And System
App 20190204276 - Sadeghian Marnani; Hamed ; et al. | 2019-07-04 |
Thermal probe for a near-field thermal microscope and method for generating a thermal map
Grant 10,338,098 - Sadeghian Marnani , et al. | 2019-07-02 |
Distance Sensor, Alignment System And Method
App 20190178641 - Sadeghian Marnani; Hamed | 2019-06-13 |
Method Of Tuning Parameter Settings For Performing Acoustic Scanning Probe Microscopy For Subsurface Imaging, Scanning Probe Mic
App 20190154636 - Sadeghian Marnani; Hamed ; et al. | 2019-05-23 |
Determining Interaction Forces In A Dynamic Mode Afm During Imaging
App 20190025340 - Sadeghian Marnani; Hamed ; et al. | 2019-01-24 |
Method Of Determining An Overlay Error, Manufacturing Method And System For Manufacturing Of A Multilayer Semiconductor Device, And Semiconductor Device Manufactured Thereby
App 20180329312 - Kuiper; Stefan ; et al. | 2018-11-15 |
Method Of Performing Surface Measurements On A Surface Of A Sample, And Scanning Probe Microscopy System Therefore
App 20180306837 - Sadeghian Marnani; Hamed ; et al. | 2018-10-25 |
System and method of performing scanning probe microscopy on a substrate surface
Grant 10,067,158 - Sadeghian Marnani , et al. September 4, 2 | 2018-09-04 |
Device And Method For Measuring And/or Modifying Surface Features On A Surface Of A Sample
App 20180238931 - SADEGHIAN MARNANI; Hamed | 2018-08-23 |
Positioning Arm For And Method Of Placing A Scan Head On A Support Surface
App 20180203036 - Sadeghian Marnani; Hamed ; et al. | 2018-07-19 |
Thermal Probe For A Near-field Thermal Microscope And Method For Generating A Thermal Map
App 20180203040 - Sadeghian Marnani; Hamed ; et al. | 2018-07-19 |
Scanning probe microscope with a reduced Q-factor
Grant 9,897,626 - Tabak , et al. February 20, 2 | 2018-02-20 |
Scanning Probe Microscope With A Reduced Q-factor
App 20170307655 - TABAK; Femke Chantal ; et al. | 2017-10-26 |
Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore
Grant 9,766,266 - Sadeghian Marnani , et al. September 19, 2 | 2017-09-19 |
Method Of Positioning A Carrier On A Flat Surface, And Assembly Of A Carrier And A Positioning Member
App 20170146564 - Sadeghian Marnani; Hamed ; et al. | 2017-05-25 |
System And Method Of Performing Scanning Probe Microscopy On A Substrate Surface
App 20170131323 - Sadeghian Marnani; Hamed ; et al. | 2017-05-11 |
Method Of Advancing A Probe Tip Of A Scanning Microscopy Device Towards A Sample Surface, And Device Therefore
App 20170052209 - Sadeghian Marnani; Hamed ; et al. | 2017-02-23 |
High throughput microscopy device
Grant 9,476,908 - Van Den Braber , et al. October 25, 2 | 2016-10-25 |
Calibration of a mechanical property of SPM cantilevers
Grant 9,329,202 - Sadeghian Marnani May 3, 2 | 2016-05-03 |
High throughput scanning probe microscopy device
Grant 9,274,138 - Sadeghian Marnani , et al. March 1, 2 | 2016-03-01 |
High Throughput Microscopy Device
App 20150323561 - VAN DEN BRABER; Rens ; et al. | 2015-11-12 |
Calibration Of A Mechanical Property Of Spm Cantilevers
App 20150293145 - Sadeghian Marnani; Hamed | 2015-10-15 |
High Throughput Scanning Probe Microscopy Device
App 20150185248 - Sadeghian Marnani; Hamed ; et al. | 2015-07-02 |
Probe Calibration
App 20150013038 - Sadeghian Marnani; Hamed | 2015-01-08 |
Probe calibration
Grant 8,914,910 - Sadeghian Marnani December 16, 2 | 2014-12-16 |
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