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Patent applications and USPTO patent grants for Sabri; Mohamed.The latest application filed is for "mechanical suppression of parasitic plasma in substrate processing chamber".
Patent | Date |
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Antenna Grant D923,612 - Stevenson , et al. June 29, 2 | 2021-06-29 |
Hybrid ceramic showerhead Grant 10,400,333 - Sabri , et al. Sep | 2019-09-03 |
Mechanical Suppression Of Parasitic Plasma In Substrate Processing Chamber App 20190172684 - KEIL; Douglas ;   et al. | 2019-06-06 |
Antenna Grant D843,356 - Stevenson , et al. | 2019-03-19 |
Mechanical suppression of parasitic plasma in substrate processing chamber Grant 10,224,182 - Keil , et al. | 2019-03-05 |
Ammonia radical generator Grant 10,173,193 - Sabri , et al. J | 2019-01-08 |
Systems and methods for vapor delivery in a substrate processing system Grant 9,970,108 - Qian , et al. May 15, 2 | 2018-05-15 |
Multi-station sequential curing of dielectric films Grant 9,873,946 - Haverkamp , et al. January 23, 2 | 2018-01-23 |
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Grant 9,852,901 - Varadarajan , et al. December 26, 2 | 2017-12-26 |
Method for supplying vaporized precursor Grant 9,637,821 - Slevin , et al. May 2, 2 | 2017-05-02 |
Ammonia Radical Generator App 20170050165 - Sabri; Mohamed ;   et al. | 2017-02-23 |
Systems And Methods For Reducing Backside Deposition And Mitigating Thickness Changes At Substrate Edges App 20160372318 - VARADARAJAN; Sesha ;   et al. | 2016-12-22 |
Hybrid Ceramic Showerhead App 20160348244 - Sabri; Mohamed ;   et al. | 2016-12-01 |
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges Grant 9,460,915 - Varadarajan , et al. October 4, 2 | 2016-10-04 |
Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor Grant 9,449,795 - Sabri , et al. September 20, 2 | 2016-09-20 |
Hybrid ceramic showerhead Grant 9,441,296 - Sabri , et al. September 13, 2 | 2016-09-13 |
Systems And Methods For Reducing Backside Deposition And Mitigatingthickness Changes At Substrate Edges App 20160079057 - Varadarajan; Sesha ;   et al. | 2016-03-17 |
Methods And Apparatuses For Stable Deposition Rate Control In Low Temperature Ald Systems By Showerhead Active Heating And/or Pedestal Cooling App 20160056032 - Baldasseroni; Chloe ;   et al. | 2016-02-25 |
Systems And Methods For Vapor Delivery App 20160032453 - Qian; Jun ;   et al. | 2016-02-04 |
Hardware For The Separation And Degassing Of Dissolved Gases In Semiconductor Precursor Chemicals App 20150380278 - Landis; Heather ;   et al. | 2015-12-31 |
Multi-station Sequential Curing Of Dielectric Films App 20150114292 - Haverkamp; Jason Dirk ;   et al. | 2015-04-30 |
Multi-station sequential curing of dielectric films Grant 8,980,769 - Haverkamp , et al. March 17, 2 | 2015-03-17 |
Ceramic Showerhead With Embedded Rf Electrode For Capacitively Coupled Plasma Reactor App 20140238608 - Sabri; Mohamed ;   et al. | 2014-08-28 |
Method For Supplying Vaporized Precursor App 20140096834 - Slevin; Damien ;   et al. | 2014-04-10 |
Multi-station Sequential Curing Of Dielectric Films App 20140080324 - Shrinivasan; Krishnan ;   et al. | 2014-03-20 |
Precursor vapor generation and delivery system with filters and filter monitoring system Grant 8,628,618 - Slevin , et al. January 14, 2 | 2014-01-14 |
Multi-station sequential curing of dielectric films Grant 8,629,068 - Shrinivasan , et al. January 14, 2 | 2014-01-14 |
Multi-station sequential curing of dielectric films Grant 8,454,750 - Shrinivasan , et al. June 4, 2 | 2013-06-04 |
Mechanical Suppression Of Parasitic Plasma In Substrate Processing Chamber App 20130092086 - Keil; Douglas ;   et al. | 2013-04-18 |
Hybrid Ceramic Showerhead App 20120222815 - Sabri; Mohamed ;   et al. | 2012-09-06 |
Variable-Density Plasma Processing of Semiconductor Substrates App 20120164834 - Jennings; Kevin ;   et al. | 2012-06-28 |
Self-starting Electromotor App 20110285254 - Bales; John E. ;   et al. | 2011-11-24 |
Precursor Vapor Generation And Delivery System With Filters And Filter Monitoring System App 20110111136 - Slevin; Damien ;   et al. | 2011-05-12 |
Axial flux permanent magnet machines Grant 7,863,784 - Ritz, Jr. , et al. January 4, 2 | 2011-01-04 |
Brushless Electromechanical Machine App 20090309463 - Ritz, JR.; Edward Failing ;   et al. | 2009-12-17 |
Brushless electro-mechanical device Grant 6,930,433 - Bales , et al. August 16, 2 | 2005-08-16 |
Brushless electro-mechanical device App 20040207286 - Bales, John E. ;   et al. | 2004-10-21 |
Contact device for making connection to an electronic circuit device Grant 6,091,256 - Long , et al. July 18, 2 | 2000-07-18 |
Vital signs monitoring unit Grant D427,315 - Saltzstein , et al. June 27, 2 | 2000-06-27 |
Method and device for making connection Grant 6,046,599 - Long , et al. April 4, 2 | 2000-04-04 |
Vital signs monitor Grant D414,870 - Saltzstein , et al. October 5, 1 | 1999-10-05 |
Medical patient vital signs-monitoring apparatus Grant 5,931,791 - Saltzstein , et al. August 3, 1 | 1999-08-03 |
Contact device for making connection to an electronic circuit device Grant 5,621,333 - Long , et al. April 15, 1 | 1997-04-15 |
Cardiac monitor Grant D377,983 - Sabri , et al. February 11, 1 | 1997-02-11 |
External lead adaptor for wrist-worn cardiac monitor Grant D372,785 - Sabri , et al. August 13, 1 | 1996-08-13 |
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