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Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates Grant 8,969,217 - Fucsko , et al. March 3, 2 | 2015-03-03 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media Grant 8,603,319 - Lee , et al. December 10, 2 | 2013-12-10 |
Methods Of Treating Semiconductor Substrates, Methods Of Forming Openings During Semiconductor Fabrication, And Methods Of Removing Particles From Over Semiconductor Substrates App 20130302995 - Fucsko; Janos ;   et al. | 2013-11-14 |
Methods of treating semiconductor substrates, methods of forming openings during semiconductor fabrication, and methods of removing particles from over semiconductor substrates Grant 8,492,288 - Fucsko , et al. July 23, 2 | 2013-07-23 |
Methods And Systems For Removing Materials From Microfeature Workpieces With Organic And/or Non-aqueous Electrolytic Media App 20130102154 - Lee; Whonchee ;   et al. | 2013-04-25 |
Methods and tools for controlling the removal of material from microfeature workpieces Grant 7,988,529 - Chandrasekaran , et al. August 2, 2 | 2011-08-02 |
Methods of Treating Semiconductor Substrates, Methods Of Forming Openings During Semiconductor Fabrication, And Methods Of Removing Particles From Over Semiconductor Substrates App 20090305511 - Fucsko; Janos ;   et al. | 2009-12-10 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 7,625,495 - Hofmann , et al. December 1, 2 | 2009-12-01 |
Methods And Systems For Removing Materials From Microfeature Workpieces With Organic And/or Non-aqueous Electrolytic Media App 20090255806 - Lee; Whonchee ;   et al. | 2009-10-15 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media Grant 7,566,391 - Lee , et al. July 28, 2 | 2009-07-28 |
Methods And Tools For Controlling The Removal Of Material From Microfeature Workpieces App 20090181601 - Chandrasekaran; Nagasubramaniyan ;   et al. | 2009-07-16 |
Methods and tools for controlling the removal of material from microfeature workpieces Grant 7,527,545 - Chandrasekaran , et al. May 5, 2 | 2009-05-05 |
Methods and tools for controlling the removal of material from microfeature workpieces App 20080051007 - Chandrasekaran; Nagasubramaniyan ;   et al. | 2008-02-28 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 7,261,832 - Hofmann , et al. August 28, 2 | 2007-08-28 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 7,138,072 - Sabde , et al. November 21, 2 | 2006-11-21 |
Methods for planarization of group VIII metal-containing surfaces using a fixed abrasive article Grant 7,121,926 - Sabde October 17, 2 | 2006-10-17 |
Methods for planarization of Group VIII metal-containing surfaces using a fixed abrasive article App 20060194518 - Sabde; Gundu M. | 2006-08-31 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 7,083,700 - Sabde , et al. August 1, 2 | 2006-08-01 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20060121632 - Hofmann; Jim ;   et al. | 2006-06-08 |
Methods and systems for removing materials from microfeature workpieces with organic and/or non-aqueous electrolytic media App 20060042956 - Lee; Whonchee ;   et al. | 2006-03-02 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 6,903,018 - Sabde , et al. June 7, 2 | 2005-06-07 |
Method and apparatuses for planarizing microelectronic substrate assemblies Grant 6,881,127 - Sabde , et al. April 19, 2 | 2005-04-19 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,858,538 - Hofmann , et al. February 22, 2 | 2005-02-22 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,720,266 - Hofmann , et al. April 13, 2 | 2004-04-13 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,699,791 - Hofmann , et al. March 2, 2 | 2004-03-02 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,682,628 - Hoffmann , et al. January 27, 2 | 2004-01-27 |
Methods for planarization of group VIII metal-containing surfaces using a fixed abrasive article App 20030119426 - Sabde, Gundu M. | 2003-06-26 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20030060047 - Hofmann, Jim ;   et al. | 2003-03-27 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20030060046 - Hofmann, Jim ;   et al. | 2003-03-27 |
Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives App 20030060139 - Sabde, Gundu M. ;   et al. | 2003-03-27 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20030057185 - Hofmann, Jim ;   et al. | 2003-03-27 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,492,273 - Hofmann , et al. December 10, 2 | 2002-12-10 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20020177390 - Sabde, Gundu M. ;   et al. | 2002-11-28 |
Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,472,325 - Hofmann , et al. October 29, 2 | 2002-10-29 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,468,912 - Hofmann , et al. October 22, 2 | 2002-10-22 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,464,824 - Hofmann , et al. October 15, 2 | 2002-10-15 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20020124957 - Hofmann, James J. ;   et al. | 2002-09-12 |
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids App 20020098696 - Sabde, Gundu M. ;   et al. | 2002-07-25 |
Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives App 20020072311 - Sabde, Gundu M. ;   et al. | 2002-06-13 |
Planarizing solutions, planarizing machines, and methods for mechanical and/or chemical-mechanical planarization of microelectronic substrate assemblies Grant 6,376,381 - Sabde April 23, 2 | 2002-04-23 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20010055936 - Sabde, Gundu M. ;   et al. | 2001-12-27 |
Methods and apparatuses for planarizing microelectronic substrate assemblies App 20010051496 - Sabde, Gundu M. ;   et al. | 2001-12-13 |
Method and apparatuses for planarizing microelectronic substrate assemblies App 20010041508 - Sabde, Gundu M. ;   et al. | 2001-11-15 |
Methods and apparatuses for planarizing microelectronic substrate assemblies Grant 6,306,012 - Sabde October 23, 2 | 2001-10-23 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20010024882 - Hofmann, Jim ;   et al. | 2001-09-27 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20010024880 - Hofmann, Jim ;   et al. | 2001-09-27 |
Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives App 20010024928 - Sabde, Gundu M. ;   et al. | 2001-09-27 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies App 20010024881 - Hofmann, Jim ;   et al. | 2001-09-27 |