Patent | Date |
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Lower dose rate ion implantation using a wider ion beam Grant 9,748,072 - Wan , et al. August 29, 2 | 2017-08-29 |
Ion implantation system and process Grant 9,697,988 - Wan , et al. July 4, 2 | 2017-07-04 |
Ion Implantation System And Process App 20170110287 - WAN; Zhimin ;   et al. | 2017-04-20 |
Method for ion implantation Grant 9,431,247 - Wan , et al. August 30, 2 | 2016-08-30 |
Method For Ion Implantation App 20160133469 - WAN; Zhimin ;   et al. | 2016-05-12 |
Electrode Assembly Having Pierce Electrodes For Controlling Space Charge Effects App 20160111245 - SAADATMAND; Kourosh ;   et al. | 2016-04-21 |
Single bend energy filter for controlling deflection of charged particle beam Grant 9,281,162 - White , et al. March 8, 2 | 2016-03-08 |
Medium current ribbon beam for ion implantation Grant 9,269,528 - Kaim , et al. February 23, 2 | 2016-02-23 |
Single Bend Energy Filter For Controlling Deflection Of Charged Particle Beam App 20150380206 - WHITE; Nicholas R. ;   et al. | 2015-12-31 |
Lower Dose Rate Ion Implantation Using A Wider Ion Beam App 20150371857 - WAN; Zhimin ;   et al. | 2015-12-24 |
Medium Current Ribbon Beam For Ion Implantation App 20150102233 - KAIM; Robert ;   et al. | 2015-04-16 |
Microchannel Plate Devices With Tunable Resistive Films App 20120273689 - Sullivan; Neal T. ;   et al. | 2012-11-01 |
Microchannel plate devices with tunable resistive films Grant 8,237,129 - Sullivan , et al. August 7, 2 | 2012-08-07 |
Techniques for plasma injection Grant 7,723,707 - Benveniste , et al. May 25, 2 | 2010-05-25 |
Microchannel Plate Devices With Tunable Resistive Films App 20100044577 - Sullivan; Neal T. ;   et al. | 2010-02-25 |
Techniques For Plasma Injection App 20090026390 - Benveniste; Victor M. ;   et al. | 2009-01-29 |
Architecture for ribbon ion beam ion implanter system Grant 7,394,079 - Saadatmand , et al. July 1, 2 | 2008-07-01 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights Grant 7,267,520 - Kellerman , et al. September 11, 2 | 2007-09-11 |
Methods of implanting ions and ion sources used for same App 20070178678 - Hatem; Christopher ;   et al. | 2007-08-02 |
Architecture For Ribbon Ion Beam Ion Implanter System App 20070176122 - Saadatmand; Kourosh ;   et al. | 2007-08-02 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights App 20050254932 - Kellerman, Peter L. ;   et al. | 2005-11-17 |
Integrated resonator and amplifier system Grant 6,653,803 - DiVergilio , et al. November 25, 2 | 2003-11-25 |
Method and apparatus for improved ion acceleration in an ion implantation system Grant 6,653,643 - Saadatmand , et al. November 25, 2 | 2003-11-25 |
Slit double gap buncher and method for improved ion bunching in an ion implantation system Grant 6,635,890 - Saadatmand , et al. October 21, 2 | 2003-10-21 |
Mechanism for prevention of neutron radiation in ion implanter beamline Grant 6,608,315 - Saadatmand , et al. August 19, 2 | 2003-08-19 |
Method and apparatus for improved ion bunching in an ion implantation system Grant 6,583,429 - Saadatmand , et al. June 24, 2 | 2003-06-24 |
Method and apparatus for improved ion bunching in an ion implantation system App 20030038253 - Saadatmand, Kourosh ;   et al. | 2003-02-27 |
Slit double gap buncher and method for improved ion bunching in an ion implantation system App 20030038254 - Saadatmand, Kourosh ;   et al. | 2003-02-27 |
Method and apparatus for improved ion acceleration in an ion implantation system App 20020084427 - Saadatmand, Kourosh ;   et al. | 2002-07-04 |
Glass-like insulator for electrically isolating electrodes from ion implanter housing Grant 6,291,828 - Saadatmand , et al. September 18, 2 | 2001-09-18 |
Compact helical resonator coil for ion implanter linear accelerator Grant 6,208,095 - DiVergilio , et al. March 27, 2 | 2001-03-27 |
Time of flight energy measurement apparatus for an ion beam implanter Grant 6,137,112 - McIntyre , et al. October 24, 2 | 2000-10-24 |