| Patent | Date |
|---|
Lithographic Patterning Device Multichannel Position And Level Gauge
App 20220299893 - VLADIMIRSKY; Yuli ; et al. | 2022-09-22 |
High numerical aperture objective lens system
Grant 9,671,337 - Ryzhikov June 6, 2 | 2017-06-06 |
High Numerical Aperture Objective Lens System
App 20160356710 - RYZHIKOV; Lev | 2016-12-08 |
High numerical aperture objective lens system
Grant 9,513,559 - Ryzhikov December 6, 2 | 2016-12-06 |
Optical system, inspection system and manufacturing method
Grant 9,411,244 - Ryzhikov , et al. August 9, 2 | 2016-08-09 |
High Numerical Aperture Objective Lens System
App 20160091797 - RYZHIKOV; Lev | 2016-03-31 |
Inspection apparatus, lithographic apparatus, and device manufacturing method
Grant 9,285,687 - Smirnov , et al. March 15, 2 | 2016-03-15 |
Compact Self-Contained Holographic and Interferometric Apparatus
App 20150085291 - Vladimirsky; Yuli ; et al. | 2015-03-26 |
Optical System, Inspection System And Manufacturing Method
App 20140098356 - RYZHIKOV; Lev ; et al. | 2014-04-10 |
Optical system, inspection system and manufacturing method
Grant 8,692,977 - Ryzhikov , et al. April 8, 2 | 2014-04-08 |
Thin film continuous spatially modulated grey attenuators and filters
Grant 8,558,988 - Vladimirsky , et al. October 15, 2 | 2013-10-15 |
Inspection Apparatus, Lithographic Apparatus, and Device Manufacturing Method
App 20130083306 - Smirnov; Stanislav Y. ; et al. | 2013-04-04 |
Illumination system coherence remover with two sets of stepped mirrors
Grant 8,164,740 - Visser , et al. April 24, 2 | 2012-04-24 |
Illumination system coherence remover with a series of partially reflective surfaces
Grant 8,159,651 - Visser , et al. April 17, 2 | 2012-04-17 |
Surface Inspection System with Advanced Illumination
App 20120086800 - VLADIMIRSKY; Yuli ; et al. | 2012-04-12 |
Inspection Apparatus Employing Wide Angle Objective Lens With Optical Window
App 20110317136 - Ryzhikov; Lev ; et al. | 2011-12-29 |
Optical System, Inspection System And Manufacturing Method
App 20110279805 - Ryzhikov; Lev ; et al. | 2011-11-17 |
Illumination system with low telecentricity error and dynamic telecentricity correction
Grant 8,013,979 - Ryzhikov , et al. September 6, 2 | 2011-09-06 |
Lithographic apparatus and device manufacturing method
Grant 7,859,647 - Bleeker , et al. December 28, 2 | 2010-12-28 |
Optical system for transforming numerical aperture
Grant 7,859,756 - Ryzhikov , et al. December 28, 2 | 2010-12-28 |
Inspection Apparatus, Lithographic Apparatus and Method for Sphero-Chromatic Aberration Correction
App 20100079748 - RYZHIKOV; Lev | 2010-04-01 |
Optical integrators for lithography systems and methods
Grant 7,630,136 - Ryzhikov , et al. December 8, 2 | 2009-12-08 |
Optical System for Transforming Numerical Aperture
App 20090251786 - RYZHIKOV; Lev ; et al. | 2009-10-08 |
Illumination System
App 20090168072 - VISSER; Huibert ; et al. | 2009-07-02 |
Thin Film Continuous Spatially Modulated Grey Attenuators and Filters
App 20090122289 - VLADIMIRSKY; Yuli ; et al. | 2009-05-14 |
Optical system for transforming numerical aperture
Grant 7,532,403 - Ryzhikov , et al. May 12, 2 | 2009-05-12 |
Illumination System
App 20090091734 - VISSER; Huibert ; et al. | 2009-04-09 |
Illumination System with Low Telecentricity Error and Dynamic Telecentricity Correction
App 20090046373 - Ryzhikov; Lev ; et al. | 2009-02-19 |
System and Method to Align and Measure Alignment Patterns on Multiple Layers
App 20080198363 - Raval; Pankaj ; et al. | 2008-08-21 |
Lithographic Apparatus and Device Manufacturing Method
App 20080137053 - BLEEKER; Arno Jan ; et al. | 2008-06-12 |
System and method using visible and infrared light to align and measure alignment patterns on multiple layers
Grant 7,365,848 - Raval , et al. April 29, 2 | 2008-04-29 |
Optical integrators for lithography systems and methods
App 20080019008 - Ryzhikov; Lev ; et al. | 2008-01-24 |
Relay lens used in an illumination system of a lithography system
Grant 7,289,277 - Ryzhikov , et al. October 30, 2 | 2007-10-30 |
Illumination system
App 20070247606 - Visser; Huibert ; et al. | 2007-10-25 |
Optical system for transforming numerical aperture
App 20070183054 - Ryzhikov; Lev ; et al. | 2007-08-09 |
System and Method for Reducing Disturbances Caused by Movement in an Immersion Lithography System
App 20070165200 - Ryzhikov; Lev ; et al. | 2007-07-19 |
System and Method for Reducing Disturbances Caused by Movement in an Immersion Lithography System
App 20070165201 - Ryzhikov; Lev ; et al. | 2007-07-19 |
System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions
Grant 7,242,456 - Ryzhikov , et al. July 10, 2 | 2007-07-10 |
Advanced Illumination System for Use in Microlithography
App 20070146674 - Oskotsky; Mark ; et al. | 2007-06-28 |
Illumination system
App 20070127005 - Visser; Huibert ; et al. | 2007-06-07 |
Lithographic apparatus having double telecentric illumination
Grant 7,227,613 - Ryzhikov , et al. June 5, 2 | 2007-06-05 |
Advanced illumination system for use in microlithography
Grant 7,187,430 - Oskotsky , et al. March 6, 2 | 2007-03-06 |
Lithographic apparatus and device manufacturing method
App 20060138349 - Bleeker; Arno Jan ; et al. | 2006-06-29 |
Imaging apparatus
Grant 7,023,525 - Bleeker , et al. April 4, 2 | 2006-04-04 |
System and method for reducing disturbances caused by movement in an immersion lithography system
App 20060044533 - Ryzhikov; Lev ; et al. | 2006-03-02 |
System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions
App 20050264782 - Ryzhikov, Lev ; et al. | 2005-12-01 |
Advanced illumination system for use in microlithography
App 20040263821 - Oskotsky, Mark ; et al. | 2004-12-30 |
Imaging apparatus
App 20040239909 - Bleeker, Arno Jan ; et al. | 2004-12-02 |
Advanced illumination system for use in microlithography
Grant 6,813,003 - Oskotsky , et al. November 2, 2 | 2004-11-02 |
Imaging apparatus
Grant 6,778,257 - Bleeker , et al. August 17, 2 | 2004-08-17 |
Advanced illumination system for use in microlithography
Grant 6,775,069 - Oskotsky , et al. August 10, 2 | 2004-08-10 |
Relay lens used in an illumination system of a lithography system
App 20040008408 - Ryzhikov, Lev ; et al. | 2004-01-15 |
Advanced illumination system for use in microlithography
App 20030227609 - Oskotsky, Mark ; et al. | 2003-12-11 |
Advanced illumination system for use in microlithography
App 20030076679 - Oskotsky, Mark ; et al. | 2003-04-24 |
Imaging apparatus
App 20030030781 - Bleeker, Arno Jan ; et al. | 2003-02-13 |
Zoom illumination system for use in photolithography
Grant 6,307,682 - Hoffman , et al. October 23, 2 | 2001-10-23 |
Microscope objective with ball lens and protection plate
Grant 5,898,524 - Ryzhikov April 27, 1 | 1999-04-27 |
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