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Patent applications and USPTO patent grants for Ryuk; Heung-jo.The latest application filed is for "semiconductor wafer bearing alignment mark for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignement mark, and method of determining the aligned state of a wafer from the alignemnt mark".
Patent | Date |
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Semiconductor wafer bearing alignment mark for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignment mark, and method of determining the aligned state of a wafer from the alignment mark Grant 7,038,777 - Kim , et al. May 2, 2 | 2006-05-02 |
Semiconductor wafer bearing alignment mark for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignement mark, and method of determining the aligned state of a wafer from the alignemnt mark App 20030053060 - Kim, Young-Chang ;   et al. | 2003-03-20 |
Apertures and illuminating apparatus including aperture openings dimensioned to compensate for directional critical dimension differences App 20010003480 - Ryuk, Heung-jo ;   et al. | 2001-06-14 |
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