| Patent | Date |
|---|
Method of inspecting surface and method of manufacturing semiconductor device
Grant 11,043,433 - Ryu , et al. June 22, 2 | 2021-06-22 |
Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same
Grant 11,004,712 - Ryu , et al. May 11, 2 | 2021-05-11 |
Multilayer Structure Inspection Apparatus And Method, And Semiconductor Device Fabricating Method Using The Inspection Method
App 20210026152 - Ryu; Sung-yoon ; et al. | 2021-01-28 |
Mass flow controller, apparatus for manufacturing semiconductor device, and method for maintenance thereof
Grant 10,845,232 - Lee , et al. November 24, 2 | 2020-11-24 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20200203232 - RYU; Sung-yoon ; et al. | 2020-06-25 |
Thickness Prediction Network Learning Method, Semiconductor Device Manufacturing Method, And Semiconductor Material Deposition E
App 20200193290 - CHO; Su-il ; et al. | 2020-06-18 |
Measuring Apparatus And Substrate Analysis Method Using The Same
App 20200182783 - JUN; Sunhong ; et al. | 2020-06-11 |
Method Of Inspecting Semiconductor Wafer, Inspection System For Performing The Same, And Method Of Fabricating Semiconductor Dev
App 20200176292 - RYU; Sung Yoon ; et al. | 2020-06-04 |
Defect inspection method and defect inspection apparatus
Grant 10,593,032 - Ryu , et al. | 2020-03-17 |
Scanning probe inspector
Grant 10,585,115 - Oh , et al. | 2020-03-10 |
Method for measuring semiconductor device
Grant 10,551,326 - Kang , et al. Fe | 2020-02-04 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20190214316 - RYU; Sung-yoon ; et al. | 2019-07-11 |
Mass Flow Controller, Apparatus For Manufacturing Semiconductor Device, And Method For Maintenance Thereof
App 20190170563 - Lee; Sangkil ; et al. | 2019-06-06 |
Scanning Probe Inspector
App 20190170788 - Oh; Duck Mahn ; et al. | 2019-06-06 |
Methods Of Manufacturing Vertical Semiconductor Devices
App 20190137776 - Ryu; Sung-yoon ; et al. | 2019-05-09 |
Monitoring Apparatus And Semiconductor Manufacturing Apparatus Including The Same
App 20190139796 - LEE; Sang-kil ; et al. | 2019-05-09 |
Methods Of Inspecting Defect And Methods Of Fabricating A Semiconductor Device Using The Same
App 20190130552 - Sohn; Young-hoon ; et al. | 2019-05-02 |
Method of inspecting semiconductor wafer, an inspection system for performing the same, and a method of fabricating semiconductor device using the same
Grant 10,269,111 - Song , et al. | 2019-04-23 |
Semiconductor Chip Inspection Device
App 20190114755 - LEE; Seong Sil ; et al. | 2019-04-18 |
Method of inspecting surface and method of manufacturing semiconductor device
Grant 10,249,544 - Ryu , et al. | 2019-04-02 |
Apparatus and method for measuring thickness
Grant 10,088,297 - Ryu , et al. October 2, 2 | 2018-10-02 |
Method For Measuring Semiconductor Device
App 20180202942 - KANG; Hyo Hyeong ; et al. | 2018-07-19 |
Surface inspecting method
Grant 10,001,444 - Ko , et al. June 19, 2 | 2018-06-19 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20180061718 - RYU; Sung-yoon ; et al. | 2018-03-01 |
Method Of Inspecting Semiconductor Wafer, An Inspection System For Performing The Same, And A Method Of Fabricating Semiconductor Device Using The Same
App 20180053292 - Song; Joonseo ; et al. | 2018-02-22 |
Defect Inspection Method And Defect Inspection Apparatus
App 20180053295 - Ryu; Sung-Yoon ; et al. | 2018-02-22 |
Apparatus And Method For Measuring Thickness
App 20170363418 - RYU; Sung Yoon ; et al. | 2017-12-21 |
Broadband light source and optical inspector having the same
Grant 9,831,626 - Ryu , et al. November 28, 2 | 2017-11-28 |
Spectral ellipsometry measurement and data analysis device and related systems and methods
Grant 9,733,178 - Ryu , et al. August 15, 2 | 2017-08-15 |
Methods Of Inspecting Substrates And Semiconductor Fabrication Methods Incorporating The Same
App 20170200658 - Yang; Yusin ; et al. | 2017-07-13 |
Method of manufacturing a semiconductor device using semiconductor measurement system
Grant 9,583,402 - Ryu , et al. February 28, 2 | 2017-02-28 |
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film
Grant 9,417,055 - Ryu , et al. August 16, 2 | 2016-08-16 |
Surface Inspecting Method
App 20160153915 - Ko; Kang-woong ; et al. | 2016-06-02 |
Broadband Light Source And Optical Inspector Having The Same
App 20160097513 - RYU; Sung-Yoon ; et al. | 2016-04-07 |
Apparatus For Measuring Thickness Of Thin Film, System Including The Apparatus, And Method For Measuring Thickness Of Thin Film
App 20160061583 - RYU; Sung-Yoon ; et al. | 2016-03-03 |
Spectral Ellipsometry Measurement and Data Analysis Device and Related Systems and Methods
App 20160025618 - Ryu; Sung-Yoon ; et al. | 2016-01-28 |
Method Of Manufacturing A Semiconductor Device Using Semiconductor Measurement System
App 20160027707 - RYU; Sung Yoon ; et al. | 2016-01-28 |
Device which produces various types of pulses by controlling the distance between the saturable absorber connectors
Grant 8,817,364 - Kim , et al. August 26, 2 | 2014-08-26 |
Single walled carbon nanotube saturable absorber production via multi-vacuum filtration method
Grant 8,709,184 - Kim , et al. April 29, 2 | 2014-04-29 |
Apparatus And Method For Stabilizing Pulse Of Fiber-type Femtosecond Laser
App 20130287051 - KIM; Soo Hyun ; et al. | 2013-10-31 |
Produces Various Types Of Pulses By Controlling The Distance Between The Saturable Absorber Connectors
App 20130182726 - KIM; Soo Hyun ; et al. | 2013-07-18 |
Single-walled Carbon Nanotube Saturable Absorber Production Via Multi-vacuum Filtration Method
App 20130180650 - KIM; Soo Hyun ; et al. | 2013-07-18 |
Microorganism Detection Apparatus
App 20120161033 - KWON; Joonhyung ; et al. | 2012-06-28 |
Microparticle Detection Apparatus
App 20120162644 - KWON; Joonhyung ; et al. | 2012-06-28 |
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