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name:-0.0032219886779785
name:-0.0037651062011719
name:-0.00038909912109375
Ruhm; Matthias Patent Filings

Ruhm; Matthias

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ruhm; Matthias.The latest application filed is for "method for in-die overlay control using feol dummy fill layer".

Company Profile
0.5.4
  • Ruhm; Matthias - Dresden DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Method for in-die overlay control using FEOL dummy fill layer
Grant 10,115,621 - Moll , et al. October 30, 2
2018-10-30
Method For In-die Overlay Control Using Feol Dummy Fill Layer
App 20170330782 - MOLL; Peter ;   et al.
2017-11-16
Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods
Grant 9,091,943 - Hotzel , et al. July 28, 2
2015-07-28
Asymmetric Reticle Heating Of Multilayer Reticles Eliminated By Dummy Exposures And Related Methods
App 20140185030 - HOTZEL; Arthur ;   et al.
2014-07-03
Member with a cleaning surface and a method of removing contamination
Grant 8,648,997 - Van Der Heijden , et al. February 11, 2
2014-02-11
Member With A Cleaning Surface And A Method Of Removing Contamination
App 20100141910 - VAN DER HEIJDEN; Marcus Theodoor Wilhelmus ;   et al.
2010-06-10

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