Patent | Date |
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Fluid sensor, method for providing same, and method for determining a constituent of a fluid Grant 11,105,760 - Koenig , et al. August 31, 2 | 2021-08-31 |
Method Of Manufacturing A Template Wafer App 20210013090 - Lehnert; Wolfgang ;   et al. | 2021-01-14 |
Wafer composite and method for producing a semiconductor component Grant 10,784,145 - Berger , et al. Sept | 2020-09-22 |
Temperature sensor Grant 10,670,474 - Kegler , et al. | 2020-06-02 |
Silicon carbide semiconductor device and a method for forming a silicon carbide semiconductor device Grant 10,672,875 - Rupp , et al. | 2020-06-02 |
Wafer composite and method for producing semiconductor components Grant 10,651,072 - Berger , et al. | 2020-05-12 |
Method of manufacturing semiconductor devices by bonding a semiconductor disk on a base substrate, composite wafer and semiconductor device Grant 10,431,504 - Lehnert , et al. O | 2019-10-01 |
Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor Grant 10,421,665 - Ruhl , et al. Sept | 2019-09-24 |
Semiconductor device including a heat sink structure Grant 10,403,556 - Laven , et al. Sep | 2019-09-03 |
Semiconductor devices and methods for forming semiconductor devices Grant 10,396,170 - Schulze , et al. A | 2019-08-27 |
Wafer Composite and Method for Producing a Semiconductor Component App 20190244853 - Berger; Rudolf ;   et al. | 2019-08-08 |
Wafer Composite and Method for Producing Semiconductor Components App 20190244850 - Berger; Rudolf ;   et al. | 2019-08-08 |
Layer structure and method of manufacturing a layer structure Grant 10,370,240 - Koenig , et al. | 2019-08-06 |
Method of manufacturing a semiconductor device having graphene material Grant 10,347,723 - Ruhl , et al. July 9, 2 | 2019-07-09 |
Silicon Carbide Semiconductor Device and a Method for Forming a Silicon Carbide Semiconductor Device App 20190123148 - Rupp; Roland ;   et al. | 2019-04-25 |
Photo-acoustic gas sensor module having light emitter and detector units Grant 10,241,088 - Theuss , et al. | 2019-03-26 |
Method of Manufacturing a Semiconductor Device Having Graphene Material App 20190081143 - Ruhl; Guenther ;   et al. | 2019-03-14 |
Process For The Formation Of A Graphene Membrane Component, Graphene Membrane Component, Microphone And Hall-effect Sensor App 20190077671 - Ruhl; Guenther ;   et al. | 2019-03-14 |
Sensor arrangement for particle analysis and a method for particle analysis Grant 10,209,212 - Ruhl , et al. Feb | 2019-02-19 |
Semiconductor device and a method for forming a semiconductor Grant 10,164,019 - Rupp , et al. Dec | 2018-12-25 |
Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor Grant 10,150,674 - Ruhl , et al. Dec | 2018-12-11 |
Semiconductor device having a graphene layer, and method of manufacturing thereof Grant 10,134,848 - Ruhl , et al. November 20, 2 | 2018-11-20 |
Sensor arrangement, battery cell and energy system Grant 10,107,867 - Elian , et al. October 23, 2 | 2018-10-23 |
Fluid Sensor, Method For Providing Same, And Method For Determining A Constituent Of A Fluid App 20180292340 - Koenig; Matthias ;   et al. | 2018-10-11 |
Semiconductor Device and Method of Manufacturing the Same App 20180240887 - Koenig; Matthias ;   et al. | 2018-08-23 |
Process For The Formation Of A Graphene Membrane Component, Graphene Membrane Component, Microphone And Hall-effect Sensor App 20180201511 - Ruhl; Guenther ;   et al. | 2018-07-19 |
Graphene gas sensor for measuring the concentration of carbon dioxide in gas environments Grant 10,024,831 - Ruhl , et al. July 17, 2 | 2018-07-17 |
Semiconductor Devices And Methods For Forming Semiconductor Devices App 20180175153 - SCHULZE; Hans-Joachim ;   et al. | 2018-06-21 |
Method for processing a carrier and method for transferring a graphene layer Grant 9,987,830 - Koenig , et al. June 5, 2 | 2018-06-05 |
Semiconductor device including a phase change material Grant 9,972,613 - Schulze , et al. May 15, 2 | 2018-05-15 |
Semiconductor package, smart card and method for producing a semiconductor package Grant 9,935,042 - Spoettl , et al. April 3, 2 | 2018-04-03 |
Method for processing a carrier and an electronic component Grant 9,934,966 - Ruhl , et al. April 3, 2 | 2018-04-03 |
Method Of Manufacturing A Template Wafer App 20180047619 - Lehnert; Wolfgang ;   et al. | 2018-02-15 |
Layer Structure And Method Of Manufacturing A Layer Structure App 20180016132 - Koenig; Matthias ;   et al. | 2018-01-18 |
Gas Sensor, Humidity Sensor, And Method For Forming A Sensor Layer App 20170356869 - Koenig; Matthias ;   et al. | 2017-12-14 |
Semiconductor Package, Smart Card And Method For Producing A Semiconductor Package App 20170345740 - Spoettl; Thomas ;   et al. | 2017-11-30 |
Power semiconductor device including a cooling material Grant 9,793,255 - Mahler , et al. October 17, 2 | 2017-10-17 |
Method Of Forming A Graphene Structure App 20170288145 - Schulze; Hans-Joachim ;   et al. | 2017-10-05 |
Semiconductor Device Having a Graphene Layer, and Method of Manufacturing Thereof App 20170278930 - Ruhl; Guenther ;   et al. | 2017-09-28 |
Apparatus for determining a state of a rechargeable battery or of a battery, a rechargeable battery or a battery, and a method for determining a state of a rechargeable battery or of a battery Grant 9,748,611 - Elian , et al. August 29, 2 | 2017-08-29 |
Sensor Arrangement For Particle Analysis And A Method For Particle Analysis App 20170234822 - RUHL; Guenther ;   et al. | 2017-08-17 |
Method of forming a graphene structure Grant 9,716,227 - Schulze , et al. July 25, 2 | 2017-07-25 |
Hall effect sensor with graphene detection layer Grant 9,714,988 - Eckinger , et al. July 25, 2 | 2017-07-25 |
Semiconductor Device Including a Heat Sink Structure App 20170186663 - Laven; Johannes Georg ;   et al. | 2017-06-29 |
Method for processing a carrier Grant 9,627,196 - Ruhl , et al. April 18, 2 | 2017-04-18 |
Temperature Sensor App 20170082502 - Kegler; Christian ;   et al. | 2017-03-23 |
Two-dimensional material containing electronic components Grant 9,590,044 - Ruhl , et al. March 7, 2 | 2017-03-07 |
Method For Processing A Carrier And Method For Transferring A Graphene Layer App 20170050422 - Koenig; Matthias ;   et al. | 2017-02-23 |
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core Grant 9,576,844 - Berger , et al. February 21, 2 | 2017-02-21 |
Fluid sensor chip and method for manufacturing the same Grant 9,568,447 - Ruhl , et al. February 14, 2 | 2017-02-14 |
Semiconductor Device and a Method for Forming a Semiconductor Device App 20170018614 - Rupp; Roland ;   et al. | 2017-01-19 |
Method for making a sensor device using a graphene layer Grant 9,536,953 - Elian , et al. January 3, 2 | 2017-01-03 |
MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer Grant 9,516,428 - Dehe , et al. December 6, 2 | 2016-12-06 |
Temperature sensor Grant 9,515,243 - Kegler , et al. December 6, 2 | 2016-12-06 |
Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units App 20160313288 - Theuss; Horst ;   et al. | 2016-10-27 |
Method For Processing A Carrier And An Electronic Component App 20160307753 - RUHL; Guenther ;   et al. | 2016-10-20 |
Electronic device Grant 9,461,120 - Koenig , et al. October 4, 2 | 2016-10-04 |
Method for processing a carrier and an electronic component Grant 9,449,873 - Ruhl , et al. September 20, 2 | 2016-09-20 |
Method of Manufacturing Semiconductor Devices by Bonding a Semiconductor Disk on a Base Substrate, Composite Wafer and Semiconductor Device App 20160260699 - Lehnert; Wolfgang ;   et al. | 2016-09-08 |
Electronic Device App 20160254355 - Koenig; Matthias ;   et al. | 2016-09-01 |
Fluid Sensor Chip And Method For Manufacturing The Same App 20160238549 - Ruhl; Guenther ;   et al. | 2016-08-18 |
Method Of Forming A Graphene Structure App 20160190446 - Schulze; Hans-Joachim ;   et al. | 2016-06-30 |
Temperature Sensor App 20160181496 - Kegler; Christian ;   et al. | 2016-06-23 |
Fluid sensor chip and method for manufacturing the same Grant 9,347,911 - Ruhl , et al. May 24, 2 | 2016-05-24 |
Electrical contact for graphene part Grant 9,337,275 - Ruhl , et al. May 10, 2 | 2016-05-10 |
Method For Processing A Carrier App 20160104640 - Ruhl; Guenther ;   et al. | 2016-04-14 |
Method for Manufacturing a Composite Wafer having a Graphite Core, and Composite Wafer having a Graphite Core App 20160086844 - Berger; Rudolf ;   et al. | 2016-03-24 |
Method for manufacturing a composite wafer having a graphite core Grant 9,252,045 - Berger , et al. February 2, 2 | 2016-02-02 |
Graphene Gas Sensor For Measuring The Concentration Of Carbon Dioxide In Gas Environments App 20150377824 - Ruhl; Guenther ;   et al. | 2015-12-31 |
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core Grant 9,224,633 - Berger , et al. December 29, 2 | 2015-12-29 |
Compound structure and method for forming a compound structure Grant 9,219,049 - Berger , et al. December 22, 2 | 2015-12-22 |
Sensor module and battery elements Grant 9,209,497 - Elian , et al. December 8, 2 | 2015-12-08 |
Semiconductor Device Including a Phase Change Material App 20150318272 - Schulze; Hans-Joachim ;   et al. | 2015-11-05 |
Method for Making a Sensor Device Using a Graphene Layer App 20150287788 - Elian; Klaus ;   et al. | 2015-10-08 |
Composite Wafer Having a Graphite Core App 20150279941 - Berger; Rudolf ;   et al. | 2015-10-01 |
Sensor package and method of manufacturing thereof Grant 9,121,885 - Elian , et al. September 1, 2 | 2015-09-01 |
Semiconductor device including a phase change material Grant 9,117,748 - Schulze , et al. August 25, 2 | 2015-08-25 |
Sensor Arrangement, Battery Cell And Energy System App 20150226810 - Elian; Klaus ;   et al. | 2015-08-13 |
Electrical Contact for Graphene Part App 20150214303 - Ruhl; Guenther ;   et al. | 2015-07-30 |
Fluid Sensor Chip And Method For Manufacturing The Same App 20150185180 - Ruhl; Guenther ;   et al. | 2015-07-02 |
Method for making a sensor device using a graphene layer Grant 9,070,615 - Elian , et al. June 30, 2 | 2015-06-30 |
Compound Structure and Method for Forming a Compound Structure App 20150171045 - Berger; Rudolf ;   et al. | 2015-06-18 |
Power Semiconductor Device Including A Cooling Material App 20150123142 - Mahler; Joachim ;   et al. | 2015-05-07 |
Hall effect sensor with graphene detection layer App 20150102807 - Eckinger; Markus ;   et al. | 2015-04-16 |
Mems App 20150090043 - Ruhl; Guenther ;   et al. | 2015-04-02 |
Apparatus For Determining A State Of A Rechargeable Battery Or Of A Battery, A Rechargeable Battery Or A Battery, And A Method For Determining A State Of A Rechargeable Battery Or Of A Battery App 20150004451 - Elian; Klaus ;   et al. | 2015-01-01 |
Method For Processing A Carrier And An Electronic Component App 20140374906 - Ruhl; Guenther ;   et al. | 2014-12-25 |
Method For Manufacturing A Composite Wafer Having A Graphite Core, And Composite Wafer Having A Graphite Core App 20140335676 - Berger; Rudolf ;   et al. | 2014-11-13 |
Two-dimensional Material Containing Electronic Components App 20140306184 - Ruhl; Guenther ;   et al. | 2014-10-16 |
Method for Making a Sensor Device Using a Graphene Layer App 20140264255 - Elian; Klaus ;   et al. | 2014-09-18 |
MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer App 20140270271 - Dehe; Alfons ;   et al. | 2014-09-18 |
Sensor And Sensing Method App 20140260545 - Ruhl; Guenther ;   et al. | 2014-09-18 |
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core Grant 8,822,306 - Berger , et al. September 2, 2 | 2014-09-02 |
Semiconductor Device Including a Phase Change Material App 20140209852 - Schulze; Hans-Joachim ;   et al. | 2014-07-31 |
Method for making a sensor device using a graphene layer Grant 8,759,153 - Elian , et al. June 24, 2 | 2014-06-24 |
Sensor Module and Battery Elements App 20140170446 - Elian; Klaus ;   et al. | 2014-06-19 |
Vehicle lighting arrangement Grant 8,736,172 - Hammer , et al. May 27, 2 | 2014-05-27 |
Method for Manufacturing a Composite Wafer Having a Graphite Core, and Composite Wafer Having a Graphite Core App 20140070232 - Berger; Rudolf ;   et al. | 2014-03-13 |
Method of processing a contact pad, method of manufacturing a contact pad, and integrated circuit element Grant 8,669,666 - Hammer , et al. March 11, 2 | 2014-03-11 |
Method for manufacturing a composite wafer having a graphite core, and composite wafer having a graphite core Grant 8,404,562 - Berger , et al. March 26, 2 | 2013-03-26 |
Sensor Device and Method App 20130056703 - Elian; Klaus ;   et al. | 2013-03-07 |
System for separation of an electrically conductive connection Grant 8,384,132 - Ruhl , et al. February 26, 2 | 2013-02-26 |
Method for processing a semiconductor wafer or die, and particle deposition device Grant 8,338,317 - Engelhardt , et al. December 25, 2 | 2012-12-25 |
Method For Processing A Semiconductor Wafer Or Die, And Particle Deposition Device App 20120256323 - Engelhardt; Manfred ;   et al. | 2012-10-11 |
Vehicle Lighting Arrangement App 20120256542 - HAMMER; Markus ;   et al. | 2012-10-11 |
Method for Manufacturing a Composite Wafer Having a Graphite Core, and Composite Wafer Having a Graphite Core App 20120080690 - Berger; Rudolf ;   et al. | 2012-04-05 |
Method for Manufacturing a Composite Wafer Having a Graphite Core, and Composite Wafer Having a Graphite Core App 20120083098 - Berger; Rudolf ;   et al. | 2012-04-05 |
Sensor Package and Method of Manufacturing Thereof App 20120038352 - Elian; Klaus ;   et al. | 2012-02-16 |
Capacitor and Method for Making Same App 20110073990 - BERGER; Rudolf ;   et al. | 2011-03-31 |
Method of Processing a Contact Pad, Method of Manufacturing a Contact Pad, and Integrated Circuit Element App 20110031625 - Hammer; Markus ;   et al. | 2011-02-10 |
Method of processing a contact pad, method of manufacturing a contact pad, and integrated circuit element Grant 7,829,450 - Hammer , et al. November 9, 2 | 2010-11-09 |
Method of Processing a Contact Pad, Method of Manufacturing a Contact Pad, and Integrated Circuit Element App 20090115074 - Hammer; Markus ;   et al. | 2009-05-07 |
Process for the locally restricted etching of a chromium layer App 20050103747 - Ruhl, Guenther | 2005-05-19 |
Compensation frame for receiving a substrate App 20050016468 - Ruhl, Guenther ;   et al. | 2005-01-27 |
Etch process for photolithographic reticle manufacturing with improved etch bias App 20030003374 - Buie, Melisa ;   et al. | 2003-01-02 |
Method and device for analyzing structures of a photomask App 20020001764 - Ruhl, Guenther ;   et al. | 2002-01-03 |