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Temperature Controlled/Electrically Biased Wafer Surround
App 20220246397 - Anglin; Kevin R. ; et al. | 2022-08-04 |
Techniques And Apparatus For Elongation Patterning Using Angled Ion Beams
App 20210375626 - Anglin; Kevin R. ; et al. | 2021-12-02 |
Multi-Zone Platen Temperature Control
App 20210343550 - Anglin; Kevin R. ; et al. | 2021-11-04 |
Techniques and apparatus for elongation patterning using angled ion beams
Grant 11,127,593 - Anglin , et al. September 21, 2 | 2021-09-21 |
Techniques to engineer nanoscale patterned features using ions
Grant 11,043,380 - Ruffell , et al. June 22, 2 | 2021-06-22 |
Techniques To Engineer Nanoscale Patterned Features Using Ions
App 20210166936 - Ruffell; Simon ; et al. | 2021-06-03 |
Techniques for processing substrates using directional reactive ion etching
Grant 10,971,368 - Sherman , et al. April 6, 2 | 2021-04-06 |
Techniques And Apparatus For Unidirectional Hole Elongation Using Angled Ion Beams
App 20200194271 - Anglin; Kevin ; et al. | 2020-06-18 |
In-situ beam profile metrology
Grant 10,665,421 - Chen , et al. | 2020-05-26 |
In-situ Beam Profile Metrology
App 20200118790 - Chen; Tsung-Liang ; et al. | 2020-04-16 |
Filling A Cavity In A Substrate Using Sputtering And Deposition
App 20200090909 - Ruffell; Simon ; et al. | 2020-03-19 |
Filling a cavity in a substrate using sputtering and deposition
Grant 10,546,730 - Ruffell , et al. Ja | 2020-01-28 |
Techniques And Apparatus For Elongation Patterning Using Angled Ion Beams
App 20190355581 - Anglin; Kevin R. ; et al. | 2019-11-21 |
Substrate Halo Arrangement For Improved Process Uniformity
App 20190272983 - Wallace; Jay ; et al. | 2019-09-05 |
Techniques for manipulating patterned features using ions
Grant 10,381,232 - Ruffell , et al. A | 2019-08-13 |
Apparatus and method for carbon film deposition profile control
Grant 10,280,512 - Chen , et al. | 2019-05-07 |
Techniques for forming patterned features using directional ions
Grant 10,229,832 - Sherman , et al. | 2019-03-12 |
Three dimensional structure fabrication control using novel processing system
Grant 10,222,202 - Evans , et al. | 2019-03-05 |
Non-uniform gate oxide thickness for DRAM device
Grant 10,204,909 - Ruffell , et al. Feb | 2019-02-12 |
Three Dimensional Structure Fabrication Control Using Novel Processing System
App 20180340769 - Evans; Morgan D. ; et al. | 2018-11-29 |
Techniques To Engineer Nanoscale Patterned Features Using Ions
App 20180330944 - Ruffell; Simon ; et al. | 2018-11-15 |
FinFet spacer etch with no fin recess and no gate-spacer pull-down
Grant 10,109,494 - Ruffell October 23, 2 | 2018-10-23 |
Techniques For Manipulating Patterned Features Using Ions
App 20180261463 - Ruffell; Simon ; et al. | 2018-09-13 |
Techniques For Processing Substrates Using Directional Reactive Ion Etching
App 20180182637 - Sherman; Steven R. ; et al. | 2018-06-28 |
Techniques to engineer nanoscale patterned features using ions
Grant 10,008,384 - Ruffell , et al. June 26, 2 | 2018-06-26 |
Techniques for manipulating patterned features using ions
Grant 9,984,889 - Ruffell , et al. May 29, 2 | 2018-05-29 |
Techniques for processing substrates using directional reactive ion etching
Grant 9,934,981 - Sherman , et al. April 3, 2 | 2018-04-03 |
High efficiency apparatus and method for depositing a layer on a three dimensional structure
Grant 9,929,015 - Omstead , et al. March 27, 2 | 2018-03-27 |
Techniques For Forming Patterned Features Using Directional Ions
App 20180082844 - Sherman; Steven R. ; et al. | 2018-03-22 |
Method for selectively depositing a layer on a three dimensional structure
Grant 9,847,228 - Ruffell , et al. December 19, 2 | 2017-12-19 |
Filling A Cavity In A Substrate Using Sputtering And Deposition
App 20170330796 - Ruffell; Simon ; et al. | 2017-11-16 |
Techniques For Manipulating Patterned Features Using Ions
App 20170263460 - Ruffell; Simon ; et al. | 2017-09-14 |
Non-uniform Gate Oxide Thickness For Dram Device
App 20170179133 - Ruffell; Simon ; et al. | 2017-06-22 |
Finfet Spacer Etch With No Fin Recess And No Gate-spacer Pull-down
App 20170133491 - Ruffell; Simon | 2017-05-11 |
FinFET spacer etch with no fin recess and no gate-spacer pull-down
Grant 9,589,811 - Ruffell March 7, 2 | 2017-03-07 |
Apparatus And Method For Carbon Film Deposition Profile Control
App 20170029950 - Chen; Alex Tsung-Liang ; et al. | 2017-02-02 |
Finfet Spacer Etch With No Fin Recess And No Gate-spacer Pull-down
App 20160379832 - Ruffell; Simon | 2016-12-29 |
Method For Selectively Depositing A Layer On A Three Dimensional Structure
App 20160379827 - Ruffell; Simon ; et al. | 2016-12-29 |
Techniques To Engineer Nanoscale Patterned Features Using Ions
App 20160379816 - Ruffell; Simon ; et al. | 2016-12-29 |
Method for selectively depositing a layer on a three dimensional structure
Grant 9,453,279 - Ruffell , et al. September 27, 2 | 2016-09-27 |
Techniques for forming angled structures for reduced defects in heteroepitaxy of semiconductor films
Grant 9,287,123 - Srinivasan , et al. March 15, 2 | 2016-03-15 |
High Efficiency Apparatus And Method For Depositing A Layer On A Three Dimensional Structure
App 20160005594 - Omstead; Thomas R. ; et al. | 2016-01-07 |
Techniques For Forming Angled Structures For Reduced Defects In Heteroepitaxy Of Semiconductor Films
App 20150311073 - SRINIVASAN; SWAMINATHAN ; et al. | 2015-10-29 |
Magnetic memory and method of fabrication
Grant 9,082,949 - Kontos , et al. July 14, 2 | 2015-07-14 |
Compound semiconductor growth using ion implantation
Grant 9,023,722 - Evans , et al. May 5, 2 | 2015-05-05 |
Techniques For Processing Substrates Using Directional Reactive Ion Etching
App 20150083581 - Sherman; Steven R. ; et al. | 2015-03-26 |
Magnetic memory and method of fabrication
Grant 8,946,836 - Kontos , et al. February 3, 2 | 2015-02-03 |
Method of implanting high aspect ratio features
Grant 8,846,508 - England , et al. September 30, 2 | 2014-09-30 |
Magnetic Memory And Method Of Fabrication
App 20130285177 - Kontos; Alexander C. ; et al. | 2013-10-31 |
Magnetic Memory And Method Of Fabrication
App 20130288394 - Kontos; Alexander C. ; et al. | 2013-10-31 |
Compound Semiconductor Growth Using Ion Implantation
App 20120289031 - EVANS; Morgan D. ; et al. | 2012-11-15 |
Semiconductor Doping Process
App 20100084613 - Maxwell; Ian Andrew ; et al. | 2010-04-08 |
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