Rueger; Neal R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rueger; Neal R..The latest application filed is for "device for controlling placement of nanoparticles".

Company Profile

0.62.69

Rueger; Neal R. - Boise ID

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Device for positioning nanoparticles Grant 9,610,593 - Subramanian , et al. April 4, 2	2017-04-04
Methods and apparatuses for energetic neutral flux generation for processing a substrate Grant 9,257,294 - Rueger February 9, 2	2016-02-09
Device for Controlling Placement of Nanoparticles App 20150283563 - Subramanian; Krupakar M. ; et al.	2015-10-08
Method for positioning spacers in pitch multiplication Grant 9,117,766 - Sant , et al. August 25, 2	2015-08-25
Field emission devices and methods for making the same Grant 9,099,272 - Rueger August 4, 2	2015-08-04
Device for controlling placement of nanoparticles Grant 9,061,297 - Subramanian , et al. June 23, 2	2015-06-23
Method For Positioning Spacers In Pitch Multiplication App 20150024602 - Sant; Sanket ; et al.	2015-01-22
Methods And Apparatuses For Energetic Neutral Flux Generation For Processing A Substrate App 20140349493 - Rueger; Neal R.	2014-11-27
Method for positioning spacers in pitch multiplication Grant 8,865,598 - Sant , et al. October 21, 2	2014-10-21
Field Emission Devices And Methods For Making The Same App 20140273706 - Rueger; Neal R.	2014-09-18
System for Controlling Placement of Nanoparticles, and Methods of Using Same App 20140252135 - Subramanian; Krupakar M. ; et al.	2014-09-11
Methods and apparatuses for energetic neutral flux generation for processing a substrate Grant 8,828,883 - Rueger September 9, 2	2014-09-09
Devices comprising nanotubes or nanowires having alterable characteristics and related methods Grant 8,770,026 - Rueger July 8, 2	2014-07-08
Field emission devices and methods for making the same Grant 8,729,787 - Rueger May 20, 2	2014-05-20
Method For Positioning Spacers In Pitch Multiplication App 20140087563 - Sant; Sanket ; et al.	2014-03-27
Plasma-generating structures and display devices Grant 8,674,602 - Rueger , et al. March 18, 2	2014-03-18
Profiling solid state samples Grant 8,609,542 - Rueger , et al. December 17, 2	2013-12-17
Method for positioning spacers in pitch multiplication Grant 8,598,041 - Sant , et al. December 3, 2	2013-12-03
Profiling Solid State Samples App 20130180950 - Rueger; Neal R. ; et al.	2013-07-18
Electron beam processing device and method using carbon nanotube emitter Grant 8,414,787 - Rueger , et al. April 9, 2	2013-04-09
Profiling solid state samples Grant 8,389,415 - Rueger , et al. March 5, 2	2013-03-05
Devices Comprising Nanotubes Or Nanowires Having Alterable Characteristics, And Related Methods App 20120299440 - Rueger; Neal R.	2012-11-29
Plasma-generating structures, display devices, and methods of forming plasma-generating structures Grant 8,274,221 - Rueger , et al. September 25, 2	2012-09-25
Devices comprising nanotubes for use as sensors and/or transducers, and related methods Grant 8,256,293 - Rueger September 4, 2	2012-09-04
Method For Positioning Spacers In Pitch Multiplication App 20120202350 - Sant; Sanket ; et al.	2012-08-09
Method for positioning spacers for pitch multiplication Grant 8,173,550 - Sant , et al. May 8, 2	2012-05-08
Methods And Apparatuses For Energetic Neutral Flux Generation For Processing A Substrate App 20120048831 - Rueger; Neal R.	2012-03-01
Method of forming a nitrogen-enriched region within silicon-oxide-containing masses Grant 8,058,130 - Sandhu , et al. November 15, 2	2011-11-15
Method For Positioning Spacers For Pitch Multiplication App 20110269252 - Sant; Sanket ; et al.	2011-11-03
Integrated circuit inspection system Grant 8,049,514 - Sandhu , et al. November 1, 2	2011-11-01
Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted deposition Grant 8,033,884 - Rueger , et al. October 11, 2	2011-10-11
Multiple spacer steps for pitch multiplication Grant 8,003,542 - Sant , et al. August 23, 2	2011-08-23
Plasma processing, deposition and ALD methods Grant 8,003,000 - Rueger August 23, 2	2011-08-23
Electron Beam Etching Device And Method App 20110056625 - Rueger; Neal R. ; et al.	2011-03-10
Devices Comprising Nanotubes For Use As Sensors And/or Transducers, And Related Methods App 20110023608 - Rueger; Neal R.	2011-02-03
Profiling Solid State Samples App 20100314354 - Rueger; Neal R. ; et al.	2010-12-16
Electron beam etching device and method Grant 7,833,427 - Rueger , et al. November 16, 2	2010-11-16
Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same Grant 7,819,005 - Rueger October 26, 2	2010-10-26
Profiling solid state samples Grant 7,791,071 - Rueger , et al. September 7, 2	2010-09-07
Electron Beam Processing Device And Method Using Carbon Nanotube Emitter App 20100221922 - Rueger; Neal R. ; et al.	2010-09-02
Integrated Circuit Inspection System App 20100141265 - Sandhu; Gurtej S. ; et al.	2010-06-10
Electronic beam processing device and method using carbon nanotube emitter Grant 7,718,080 - Rueger , et al. May 18, 2	2010-05-18
Copper Layer Processing App 20100051577 - Rueger; Neal R.	2010-03-04
Integrated circuit inspection system Grant 7,662,648 - Sandhu , et al. February 16, 2	2010-02-16
Protection in integrated circuits Grant 7,632,737 - Rueger , et al. December 15, 2	2009-12-15
Atomic layer deposition using electron bombardment Grant 7,628,855 - Rueger December 8, 2	2009-12-08
Plasma And Electron Beam Etching Device And Method App 20090288603 - Rueger; Neal R. ; et al.	2009-11-26
Multiple Spacer Steps For Pitch Multiplication App 20090258492 - Sant; Sanket ; et al.	2009-10-15
Method of Forming a Nitrogen-Enriched Region within Silicon-Oxide-Containing Masses App 20090215253 - Sandhu; Gurtej S. ; et al.	2009-08-27
Plasma and electron beam etching device and method Grant 7,569,484 - Rueger , et al. August 4, 2	2009-08-04
Multiple spacer steps for pitch multiplication Grant 7,560,390 - Sant , et al. July 14, 2	2009-07-14
Protection in integrated circuits Grant 7,494,894 - Rueger , et al. February 24, 2	2009-02-24
Sensor And Transducer Devices Comprising Carbon Nanotubes, Methods Of Making And Using The Same App 20080314149 - Rueger; Neal R.	2008-12-25
Transistor structures Grant 7,459,757 - Sandhu , et al. December 2, 2	2008-12-02
Plasma Processing, Deposition and ALD Methods App 20080274622 - Rueger; Neal R.	2008-11-06
Methods of forming a nitrogen enriched region Grant 7,432,166 - Sandhu , et al. October 7, 2	2008-10-07
Plasma processing, deposition, and ALD methods Grant 7,402,526 - Rueger July 22, 2	2008-07-22
Field emission devices and methods for making the same App 20080143230 - Rueger; Neal R.	2008-06-19
Methods of forming transistors Grant 7,344,948 - Sandhu , et al. March 18, 2	2008-03-18
Electronic beam processing device and method using carbon nanotube emitter App 20080038894 - Rueger; Neal R. ; et al.	2008-02-14
Profiling solid state samples App 20080038863 - Rueger; Neal R. ; et al.	2008-02-14
Electron beam etching device and method App 20080038928 - Rueger; Neal R. ; et al.	2008-02-14
Plasma and electron beam etching device and method App 20080038933 - Rueger; Neal R. ; et al.	2008-02-14
Plasma processing, deposition and ALD methods Grant 7,323,400 - Rueger January 29, 2	2008-01-29
Method and system for monitoring plasma using optical emission spectrometry Grant 7,312,857 - Rueger , et al. December 25, 2	2007-12-25
Electron Induced Chemical Etching For Materials Characterization App 20070278180 - Williamson; Mark J. ; et al.	2007-12-06
Method and structure for shallow trench isolation during integrated circuit device manufacture Grant 7,279,377 - Rueger , et al. October 9, 2	2007-10-09
Methods of forming semiconductor constructions Grant 7,276,426 - Rueger October 2, 2	2007-10-02
Methods of filling gaps using high density plasma chemical vapor deposition Grant 7,273,793 - Rueger , et al. September 25, 2	2007-09-25
Method and system for discretely controllable plasma processing Grant 7,262,555 - Rueger , et al. August 28, 2	2007-08-28
System and method for detecting flow in a mass flow controller Grant 7,255,128 - Sandhu , et al. August 14, 2	2007-08-14
Transistor Structures App 20070138577 - Sandhu; Gurtej S. ; et al.	2007-06-21
Atomic layer deposition using electron bombardment App 20070134816 - Rueger; Neal R.	2007-06-14
Method of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition Grant 7,202,183 - Rueger , et al. April 10, 2	2007-04-10
Atomic layer deposition using electron bombardment Grant 7,189,287 - Rueger March 13, 2	2007-03-13
Integrated circuit inspection system App 20070046172 - Sandhu; Gurtej S. ; et al.	2007-03-01
Method and structure for shallow trench isolation during integrated circuit device manufacture App 20070037341 - Rueger; Neal R. ; et al.	2007-02-15
Multiple spacer steps for pitch multiplication App 20060273456 - Sant; Sanket ; et al.	2006-12-07
Protection In Integrated Circuits App 20060270240 - Rueger; Neal R. ; et al.	2006-11-30
Inter-metal dielectric fill App 20060265868 - Rueger; Neal R. ; et al.	2006-11-30
Plasma processing, deposition, and ALD methods App 20060264012 - Rueger; Neal R.	2006-11-23
Plasma processing apparatuses and methods App 20060260750 - Rueger; Neal R.	2006-11-23
Inter-metal Dielectric Fill App 20060246719 - Rueger; Neal R. ; et al.	2006-11-02
System And Method For Detecting Flow In A Mass Flow Controller App 20060236513 - Sandhu; Gurtej Singh ; et al.	2006-10-26
Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases App 20060228815 - Rueger; Neal R.	2006-10-12
System And Method For Detecting Flow In A Mass Flow Controller App 20060219031 - Sandhu; Gurtej Singh ; et al.	2006-10-05
System And Method For Detecting Flow In A Mass Flow Controller App 20060223204 - Sandhu; Gurtej Singh ; et al.	2006-10-05
System And Method For Detecting Flow In A Mass Flow Controller App 20060218762 - Sandhu; Gurtej Singh ; et al.	2006-10-05
System and method for detecting flow in a mass flow controller Grant 7,114,404 - Sandhu , et al. October 3, 2	2006-10-03
Method and system for discretely controllable plasma processing App 20060208649 - Rueger; Neal R. ; et al.	2006-09-21
Plasma detection and associated systems and methods for controlling microfeature workpiece deposition processes App 20060165873 - Rueger; Neal R. ; et al.	2006-07-27
Systems and methods for depositing material onto microfeature workpieces App 20060134345 - Rueger; Neal R. ; et al.	2006-06-22
Method of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition App 20060134924 - Rueger; Neal R. ; et al.	2006-06-22
Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition Grant 7,056,833 - Rueger , et al. June 6, 2	2006-06-06
Plasma processing apparatuses and methods App 20060042752 - Rueger; Neal R.	2006-03-02
Plasma processing, deposition, and ALD methods App 20060046477 - Rueger; Neal R.	2006-03-02
Inter-metal dielectric fill App 20060038293 - Rueger; Neal R. ; et al.	2006-02-23
Method and system for monitoring plasma using optical emission spectrometry App 20060007425 - Rueger; Neal R. ; et al.	2006-01-12
Atomic layer deposition using electron bombardment App 20050284360 - Rueger, Neal R.	2005-12-29
Methods of forming semiconductor constructions App 20050245044 - Rueger, Neal R.	2005-11-03
Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases App 20050221617 - Rueger, Neal R.	2005-10-06
Method and system for monitoring plasma using optical emission spectroscopy Grant 6,950,178 - Rueger , et al. September 27, 2	2005-09-27
Methods of filling gaps using high density plasma chemical vapor deposition App 20050196976 - Rueger, Neal R. ; et al.	2005-09-08
Gas delivery system for deposition processes, and methods of using same Grant 6,936,547 - Li , et al. August 30, 2	2005-08-30
Methods of forming semiconductor constructions Grant 6,908,807 - Rueger June 21, 2	2005-06-21
Method and system for monitoring plasma using optical emission spectrometry App 20050078310 - Rueger, Neal R. ; et al.	2005-04-14
Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition App 20050064729 - Rueger, Neal R. ; et al.	2005-03-24
Deposition and chamber treatment methods Grant 6,866,900 - Li , et al. March 15, 2	2005-03-15
Gas delivery system for deposition processes, and methods of using same App 20050011449 - Li, Weimin ; et al.	2005-01-20
Gas delivery system for deposition processes, and methods of using same App 20040083972 - Li, Weimin ; et al.	2004-05-06
System and method for detecting flow in a mass flow controller App 20040063231 - Sandhu, Gurtej Singh ; et al.	2004-04-01
Protection in integrated circuits App 20040043580 - Rueger, Neal R. ; et al.	2004-03-04
Deposition and chamber treatment methods App 20040037973 - Li, Weimin ; et al.	2004-02-26
Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors Grant 6,660,658 - Sandhu , et al. December 9, 2	2003-12-09
Methods of incorporating nitrogen into silicon-oxide-containing layers Grant 6,660,657 - Sandhu , et al. December 9, 2	2003-12-09
Methods of forming semiconductor constructions App 20030186501 - Rueger, Neal R.	2003-10-02
System and method for detecting flow in a mass flow controller Grant 6,627,465 - Sandhu , et al. September 30, 2	2003-09-30
Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas Grant 6,606,802 - Sandhu , et al. August 19, 2	2003-08-19
Cleaning Efficiency Improvement In A High Density Plasma Process Chamber Using Thermally Hot Gas App 20030101613 - Sandhu, Gurtej S. ; et al.	2003-06-05
System and method for detecting flow in a mass flow controller App 20030045011 - Sandhu, Gurtej Singh ; et al.	2003-03-06
Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors App 20020182812 - Sandhu, Gurtej S. ; et al.	2002-12-05
Methods Of Forming Transistors App 20020098710 - Sandhu, Gurtej S. ; et al.	2002-07-25
Methods of forming a nitrogen enriched region App 20020094621 - Sandhu, Gurtej S. ; et al.	2002-07-18
Transistor Structures App 20020094620 - Sandhu, Gurtej S. ; et al.	2002-07-18

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