Patent | Date |
---|
Method of material deposition Grant 11,069,523 - Routh, Jr. , et al. July 20, 2 | 2021-07-20 |
Face-on, gas-assisted etching for plan-view lamellae preparation Grant 11,062,879 - Franco , et al. July 13, 2 | 2021-07-13 |
Method Of Material Deposition App 20210118678 - Routh; Brian Roberts ;   et al. | 2021-04-22 |
Method For Large-area 3d Analysis Of Samples Using Glancing Incidence Fib Milling App 20210118646 - Rue; Chad ;   et al. | 2021-04-22 |
Method, Device And System For The Treatment Of Biological Cryogenic Samples By Plasma Focused Ion Beams App 20210066056 - DE MARCO; Alex ;   et al. | 2021-03-04 |
Method and apparatus for the planarization of surfaces Grant 10,930,514 - Brundage , et al. February 23, 2 | 2021-02-23 |
Face-on, Gas-assisted Etching For Plan-view Lamellae Preparation App 20200126756 - Franco; Noel Thomas ;   et al. | 2020-04-23 |
Face-on, gas-assisted etching for plan-view lamellae preparation Grant 10,546,719 - Franco , et al. Ja | 2020-01-28 |
Method and Apparatus for the Planarization of Surfaces App 20190378689 - BRUNDAGE; Philip ;   et al. | 2019-12-12 |
Enhanced charged particle beam processes for carbon removal Grant 10,347,463 - Rue , et al. July 9, 2 | 2019-07-09 |
Method, Device And System For The Treatment Of Biological Cryogenic Samples By Plasma Focused Ion Beams App 20190206664 - DE MARCO; Alex ;   et al. | 2019-07-04 |
Ion implantation to alter etch rate Grant 10,325,754 - Foord , et al. | 2019-06-18 |
Tomography sample preparation systems and methods with improved speed, automation, and reliability Grant 10,190,953 - Delpy , et al. Ja | 2019-01-29 |
Face-on, Gas-assisted Etching For Plan-view Lamellae Preparation App 20180350558 - Franco; Noel Thomas ;   et al. | 2018-12-06 |
Method Of Material Deposition App 20180277361 - Routh, JR.; Brian Roberts ;   et al. | 2018-09-27 |
Enhanced Charged Particle Beam Processes For Carbon Removal App 20180166272 - Rue; Chad ;   et al. | 2018-06-14 |
Material characterization using ion channeling imaging Grant 9,983,152 - Randolph , et al. May 29, 2 | 2018-05-29 |
Tomography Sample Preparation Systems And Methods With Improved Speed, Automation, And Reliability App 20180143110 - Delpy; Guillaume ;   et al. | 2018-05-24 |
Method of material deposition Grant 9,978,586 - Routh, Jr. , et al. May 22, 2 | 2018-05-22 |
Material Characterization Using Ion Channeling Imaging App 20180136147 - Randolph; Steven ;   et al. | 2018-05-17 |
Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam Grant 9,761,467 - Rue , et al. September 12, 2 | 2017-09-12 |
Method Of Material Deposition App 20170133220 - Routh, JR.; Brian Roberts ;   et al. | 2017-05-11 |
Adaptive Control For Charged Particle Beam Processing App 20170002467 - Straw; Marcus ;   et al. | 2017-01-05 |
Low energy ion beam etch Grant 9,443,697 - Rue September 13, 2 | 2016-09-13 |
Ion Implantation to Alter Etch Rate App 20150348752 - Foord; David ;   et al. | 2015-12-03 |
Gas Injection System With Precursor For Planar Deprocessing Of Semiconductor Devices Using A Focused Ion Beam App 20150294885 - Rue; Chad ;   et al. | 2015-10-15 |
High accuracy beam placement for local area navigation Grant 9,087,366 - Young , et al. July 21, 2 | 2015-07-21 |
Precursor for planar deprocessing of semiconductor devices using a focused ion beam Grant 9,064,811 - Rue , et al. June 23, 2 | 2015-06-23 |
High Accuracy Beam Placement For Local Area Navigation App 20150016677 - Young; Richard J. ;   et al. | 2015-01-15 |
Precursor for Planar Deprocessing of Semiconductor Devices using a Focused Ion Beam App 20140357088 - Rue; Chad ;   et al. | 2014-12-04 |
High accuracy beam placement for local area navigation Grant 8,781,219 - Warschauer , et al. July 15, 2 | 2014-07-15 |
Charged particle beam processing system with visual and infrared imaging Grant 8,610,092 - Rue , et al. December 17, 2 | 2013-12-17 |
Low Energy Ion Beam Etch App 20130248356 - Rue; Chad | 2013-09-26 |
Navigation and sample processing using an ion source containing both low-mass and high-mass species Grant 8,455,822 - Rue June 4, 2 | 2013-06-04 |
High accuracy beam placement for local area navigation Grant 8,358,832 - Young , et al. January 22, 2 | 2013-01-22 |
High Accuracy Beam Placement for Local Area Navigation App 20120328151 - Warschauer; Reinier Louis ;   et al. | 2012-12-27 |
Navigation and Sample Processing Using an Ion Source Containing both Low-Mass and High-Mass Species App 20120056088 - Rue; Chad | 2012-03-08 |
High Accuracy Beam Placement For Local Area Navigation App 20120045097 - YOUNG; RICHARD J. ;   et al. | 2012-02-23 |
Charged Particle Beam Processing System with Visual and Infrared Imaging App 20120006987 - Rue; Chad ;   et al. | 2012-01-12 |
High accuracy beam placement for local area navigation Grant 8,059,918 - Young , et al. November 15, 2 | 2011-11-15 |
In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques Grant 7,781,733 - Herschbein , et al. August 24, 2 | 2010-08-24 |
High Accuracy Beam Placement For Local Area Navigation App 20100092070 - YOUNG; RICHARD J. ;   et al. | 2010-04-15 |
In-situ High-resolution Light-optical Channel For Optical Viewing And Surface Processing In Parallel With Charged Particle (fib And Sem) Techniques App 20080283777 - Herschbein; Steven B. ;   et al. | 2008-11-20 |
High-resolution optical channel for non-destructive navigation and processing of integrated circuits Grant 7,351,966 - Marchman , et al. April 1, 2 | 2008-04-01 |
High-resolution Optical Channel For Non-destructive Navigation And Processing Of Integrated Circuits App 20080067369 - Marchman; Herschel M. ;   et al. | 2008-03-20 |
Ion detector for ion beam applications Grant 7,119,333 - Herschbein , et al. October 10, 2 | 2006-10-10 |
Improved Ion Detector For Ionbeam Applications App 20060097159 - Herschbein; Steven B. ;   et al. | 2006-05-11 |
Apparatus And Method For Manipulating Sample Temperature For Focused Ion Beam Processing App 20060065853 - Rue; Chad ;   et al. | 2006-03-30 |
Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool Grant 6,946,064 - Fischer , et al. September 20, 2 | 2005-09-20 |
Dry etch process to edit copper lines Grant 6,900,137 - Herschbein , et al. May 31, 2 | 2005-05-31 |
System And Method Of Altering A Very Small Surface Area By Multiple Channel Probe App 20050016952 - Hamann, Hendrik F. ;   et al. | 2005-01-27 |
System And Methods Of Altering A Very Small Surface Area App 20050016954 - Hamann, Hendrik F. ;   et al. | 2005-01-27 |
Metal dry etch using electronic field Grant 6,843,893 - Herschbein , et al. January 18, 2 | 2005-01-18 |
Sample Mount For Performing Sputter-deposition In A Focused Ion Beam (fib) Tool App 20050006231 - Fischer, Lawrence S. ;   et al. | 2005-01-13 |
Dry Etch Process To Edit Copper Lines App 20040188380 - Herschbein, Steven B. ;   et al. | 2004-09-30 |
Dry etch process for copper App 20040132287 - Fischer, Lawrence S. ;   et al. | 2004-07-08 |
Metal dry etch using electronic field App 20040112857 - Herschbein, Steven B. ;   et al. | 2004-06-17 |
Tool having a plurality of electrodes and corresponding method of altering a very small surface App 20040060904 - Herschbein, Steven Brett ;   et al. | 2004-04-01 |