Rubingh; Maria Johanna Agnes

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rubingh; Maria Johanna Agnes.The latest application filed is for "lithographic apparatus and method of modifying a beam of radiation within a lithographic apparatus".

Company Profile

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Rubingh; Maria Johanna Agnes - Eindhoven N/A NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus and method of modifying a beam of radiation within a lithographic apparatus Grant 9,146,477 - Jansen , et al. September 29, 2	2015-09-29
Lithographic Apparatus and Method of Modifying a Beam of Radiation Within a Lithographic Apparatus App 20120162620 - Hendricus JANSEN; Bastiaan Stephanus ; et al.	2012-06-28
Lithographic apparatus, device manufacturing method and exchangeable optical element Grant 7,724,351 - Loopstra , et al. May 25, 2	2010-05-25
Device manufacturing method, computer program product and lithographic apparatus Grant 7,456,931 - De Winter , et al. November 25, 2	2008-11-25
Device manufacturing method, computer program product and lithographic apparatus App 20080170212 - De Winter; Laurentius Cornelius ; et al.	2008-07-17
Device manufacturing method, computer program product and lithographic apparatus Grant 7,307,690 - De Winter , et al. December 11, 2	2007-12-11
Lithographic apparatus, device manufacturing method and exchangeable optical element App 20070177122 - Loopstra; Erik Roelof ; et al.	2007-08-02
System for flushing at least one internal space of an objective Grant 6,825,914 - Schroeder , et al. November 30, 2	2004-11-30
System for flushing at least one internal space of an objective App 20020155384 - Schroeder, Joachim ; et al.	2002-10-24

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