loadpatents
Patent applications and USPTO patent grants for Ruan; Fang.The latest application filed is for "clean processes for boron carbon film deposition".
Patent | Date |
---|---|
Processing systems and methods to control process drift Grant 11,430,641 - Chua , et al. August 30, 2 | 2022-08-30 |
Clean Processes For Boron Carbon Film Deposition App 20220127722 - Zhao; Jiheng ;   et al. | 2022-04-28 |
Gas Mixer To Enable Rps Purging App 20220122851 - Ruan; Fang ;   et al. | 2022-04-21 |
Cover Wafer For Semiconductor Processing Chamber App 20220122822 - Parimi; Venkata Sharat Chandra ;   et al. | 2022-04-21 |
Modular Zone Control For A Processing Chamber App 20220108891 - Huang; Zubin ;   et al. | 2022-04-07 |
Faceplate With Edge Flow Control App 20210335574 - Ruan; Fang ;   et al. | 2021-10-28 |
Faceplate Having Blocked Center Hole App 20210156028 - Ruan; Fang ;   et al. | 2021-05-27 |
Precursor delivery system and methods related thereto Grant 11,009,455 - Huang , et al. May 18, 2 | 2021-05-18 |
Chamber Components For Gas Delivery Modulation App 20210142984 - Ruan; Fang ;   et al. | 2021-05-13 |
Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ;   et al. | 2021-05-13 |
Optical Absorption Sensor For Semiconductor Processing App 20210134568 - Ruan; Fang ;   et al. | 2021-05-06 |
Method Of Processing A Substrate App 20200266064 - NARAYANAN; Rajaram ;   et al. | 2020-08-20 |
Precursor Delivery System And Methods Related Thereto App 20200041407 - HUANG; Zubin ;   et al. | 2020-02-06 |
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