Roy; Sarathi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Roy; Sarathi.The latest application filed is for "methods and apparatus for controlling a lithographic process".

Company Profile

3.6.10

Roy; Sarathi - Eindhoven NL
ROY; Sarathi - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Computational metrology based correction and control Grant 11,448,973 - Rijpstra , et al. September 20, 2	2022-09-20
Methods And Apparatus For Controlling A Lithographic Process App 20220091514 - WERKMAN; Roy ; et al.	2022-03-24
Methods using fingerprint and evolution analysis Grant 11,281,110 - Van Dongen , et al. March 22, 2	2022-03-22
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method Grant 11,243,470 - Kumar , et al. February 8, 2	2022-02-08
Optimizing An Apparatus For Multi-stage Processing Of Product Units App 20220004108 - NIJE; Jelle ; et al.	2022-01-06
Determining A Correction To A Process App 20210333785 - ROY; Sarathi ; et al.	2021-10-28
Optimizing an apparatus for multi-stage processing of product units Grant 11,150,562 - Nije , et al. October 19, 2	2021-10-19
Methods Using Fingerprint And Evolution Analysis App 20210255547 - Van Dongen; Jeroen ; et al.	2021-08-19
Method and apparatus for detecting substrate surface variations Grant 11,092,902 - D'Achard Van Enschut , et al. August 17, 2	2021-08-17
Determining a correction to a process Grant 11,086,305 - Roy , et al. August 10, 2	2021-08-10
Determining A Correction To A Process App 20210165399 - ROY; Sarathi ; et al.	2021-06-03
Computational Metrology Based Correction And Control App 20210080837 - RIJPSTRA; Manouk ; et al.	2021-03-18
Computational Metrology Based Sampling Scheme App 20200371441 - TEL; Wim Tjibbo ; et al.	2020-11-26
Optimizing An Apparatus For Multi-stage Processing Of Product Units App 20200233315 - NIJE; Jelle ; et al.	2020-07-23
Method and Apparatus for Detecting Substrate Surface Variations App 20200124977 - D'ACHARD VAN ENSCHUT; Johannes Franciscus Martinus ; et al.	2020-04-23
Method And Apparatus For Deriving Corrections, Method And Apparatus For Determining A Property Of A Structure, Device Manufactur App 20190212660 - KUMAR; Nitish ; et al.	2019-07-11

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