loadpatents
Patent applications and USPTO patent grants for Rotter; Lawrence.The latest application filed is for "broadband and wide field angle compensator".
Patent | Date |
---|---|
Broadband and wide field angle compensator Grant 9,857,292 - Rotter , et al. January 2, 2 | 2018-01-02 |
Broadband And Wide Field Angle Compensator App 20170052112 - Rotter; Lawrence ;   et al. | 2017-02-23 |
Broadband and wide field angle compensator Grant 9,519,093 - Rotter , et al. December 13, 2 | 2016-12-13 |
Multiple angles of incidence semiconductor metrology systems and methods Grant 9,310,290 - Wang , et al. April 12, 2 | 2016-04-12 |
Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods App 20150285735 - Wang; David Y. ;   et al. | 2015-10-08 |
Multiple angles of incidence semiconductor metrology systems and methods Grant 9,116,103 - Wang , et al. August 25, 2 | 2015-08-25 |
Broadband And Wide Field Angle Compensator App 20150055123 - Rotter; Lawrence ;   et al. | 2015-02-26 |
Multiple Angles Of Incidence Semiconductor Metrology Systems And Methods App 20140375981 - Wang; David Y. ;   et al. | 2014-12-25 |
Calibration Of An Optical Metrology System For Critical Dimension Application Matching App 20130245985 - Flock; Klaus ;   et al. | 2013-09-19 |
Measurement system with separate optimized beam paths Grant 7,227,637 - Wang , et al. June 5, 2 | 2007-06-05 |
Flat spectrum illumination source for optical metrology Grant 7,154,607 - Hendrix , et al. December 26, 2 | 2006-12-26 |
Measurement system with separate optimized beam paths App 20060180761 - Wang; David Y. ;   et al. | 2006-08-17 |
Measurement system with separate optimized beam paths Grant 7,061,614 - Wang , et al. June 13, 2 | 2006-06-13 |
Flat spectrum illumination source for optical metrology App 20040150828 - Hendrix, James Lee ;   et al. | 2004-08-05 |
Measurement system with separate optimized beam paths App 20030071996 - Wang, David Y. ;   et al. | 2003-04-17 |
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