Patent | Date |
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Self-aligned, over etched hard mask fabrication method and structure Grant 11,158,506 - Libsch , et al. October 26, 2 | 2021-10-26 |
Tool and method of fabricating a self-aligned solid state thin film battery Grant 11,056,722 - Libsch , et al. July 6, 2 | 2021-07-06 |
Feedback control of dimensions in nanopore and nanofluidic devices Grant 11,015,258 - Harrer , et al. May 25, 2 | 2021-05-25 |
Techniques to improve reliability in Cu interconnects using Cu intermetallics Grant 10,943,863 - Hu , et al. March 9, 2 | 2021-03-09 |
Techniques to improve reliability in Cu interconnects using Cu intermetallics Grant 10,818,590 - Hu , et al. October 27, 2 | 2020-10-27 |
Self-Aligned, Over Etched Hard Mask Fabrication Method and Structure App 20200251336 - Kind Code | 2020-08-06 |
Self-aligned 3D solid state thin film battery Grant 10,720,670 - Libsch , et al. | 2020-07-21 |
Self-aligned, over etched hard mask fabrication method and structure Grant 10,679,853 - Libsch , et al. | 2020-06-09 |
Techniques to Improve Reliability in Cu Interconnects Using Cu Intermetallics App 20200006226 - Hu; Chao-Kun ;   et al. | 2020-01-02 |
Techniques to Improve Reliability in Cu Interconnects Using Cu Intermetallics App 20200006227 - Hu; Chao-Kun ;   et al. | 2020-01-02 |
Techniques to improve reliability in Cu interconnects using Cu intermetallics Grant 10,461,026 - Hu , et al. Oc | 2019-10-29 |
Feedback Control Of Dimensions In Nanopore And Nanofluidic Devices App 20190323138 - Harrer; Stefan ;   et al. | 2019-10-24 |
Self-Aligned, Over Etched Hard Mask Fabrication Method and Structure App 20190244815 - Libsch; Frank Robert ;   et al. | 2019-08-08 |
Self-aligned 3D Solid State Thin Film Battery App 20190245247 - Libsch; Frank Robert ;   et al. | 2019-08-08 |
Tool and Method of Fabricating a Self-Aligned Solid State Thin Film Battery App 20190245246 - Libsch; Frank Robert ;   et al. | 2019-08-08 |
Feedback control of dimensions in nanopore and nanofluidic devices Grant 10,323,333 - Harrer , et al. | 2019-06-18 |
Feedback control of dimensions in nanopore and nanofluidic devices Grant 10,316,423 - Harrer , et al. | 2019-06-11 |
DNA sequencing using multiple metal layer structure with different organic coatings forming different transient bondings to DNA Grant 10,267,784 - Afzali-Ardakani , et al. | 2019-04-23 |
Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors Grant 9,891,189 - Engelmann , et al. February 13, 2 | 2018-02-13 |
Techniques to Improve Reliability in Cu Interconnects Using Cu Intermetallics App 20180005939 - Hu; Chao-Kun ;   et al. | 2018-01-04 |
Techniques For Fabricating Horizontally Aligned Nanochannels For Microfluidics And Biosensors App 20170370876 - Engelmann; Sebastian U. ;   et al. | 2017-12-28 |
Reduced process degradation of spin torque magnetoresistive random access memory Grant 9,853,210 - Annunziata , et al. December 26, 2 | 2017-12-26 |
Reduced Process Degradation Of Spin Torque Magnetoresistive Random Access Memory App 20170141299 - Annunziata; Anthony J. ;   et al. | 2017-05-18 |
Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors Grant 9,643,179 - Engelmann , et al. May 9, 2 | 2017-05-09 |
Dna Sequencing Using Multiple Metal Layer Structure With Different Organic Coatings Forming Different Transient Bondings To Dna App 20170059548 - Afzali-Ardakani; Ali ;   et al. | 2017-03-02 |
Feedback Control Of Dimensions In Nanopore And Nanofluidic Devices App 20160355942 - Harrer; Stefan ;   et al. | 2016-12-08 |
Feedback Control Of Dimensions In Nanopore And Nanofluidic Devices App 20160355943 - Harrer; Stefan ;   et al. | 2016-12-08 |
DNA sequencing using multiple metal layer structure with different organic coatings forming different transient bondings to DNA Grant 9,513,277 - Afzali-Ardakani , et al. December 6, 2 | 2016-12-06 |
Feedback control of dimensions in nanopore and nanofluidic devices Grant 9,422,154 - Harrer , et al. August 23, 2 | 2016-08-23 |
Dna Sequencing Using Multiple Metal Layer Structure With Different Organic Coatings Forming Different Transient Bondings To Dna App 20160139105 - Afzali-Ardakani; Ali ;   et al. | 2016-05-19 |
DNA sequencing using multiple metal layer structure with different organic coatings forming different transient bondings to DNA Grant 9,285,339 - Afzali-Ardakani , et al. March 15, 2 | 2016-03-15 |
Fabrication of tunneling junction for nanopore DNA sequencing Grant 9,222,930 - Peng , et al. December 29, 2 | 2015-12-29 |
Dna Sequencing Using Multiple Metal Layer Structure With Different Organic Coatings Forming Different Transient Bondings To Dna App 20150160159 - Afzali-Ardakani; Ali ;   et al. | 2015-06-11 |
Fabrication of tunneling junction for nanopore DNA sequencing Grant 9,046,511 - Peng , et al. June 2, 2 | 2015-06-02 |
DNA sequence using multiple metal layer structure with different organic coatings forming different transient bondings to DNA Grant 8,986,524 - Afzali-Ardakani , et al. March 24, 2 | 2015-03-24 |
Implantless dopant segregation for silicide contacts Grant 8,889,537 - Cabral, Jr. , et al. November 18, 2 | 2014-11-18 |
Fabrication Of Tunneling Junction For Nanopore Dna Sequencing App 20140312003 - Peng; Hongbo ;   et al. | 2014-10-23 |
Fabrication Of Tunneling Junction For Nanopore Dna Sequencing App 20140312002 - Peng; Hongbo ;   et al. | 2014-10-23 |
Electron beam sculpting of tunneling junction for nanopore DNA sequencing Grant 8,858,764 - Peng , et al. October 14, 2 | 2014-10-14 |
Electron beam sculpting of tunneling junction for nanopore DNA sequencing Grant 8,852,407 - Peng , et al. October 7, 2 | 2014-10-07 |
DNA sequencing using multiple metal layer structure with organic coatings forming transient bonding to DNA bases Grant 8,764,968 - Afzali-Ardakani , et al. July 1, 2 | 2014-07-01 |
Charged entities as locomotive to control motion of polymers through a nanochannel Grant 8,691,067 - Harrer , et al. April 8, 2 | 2014-04-08 |
Memory cell with post deposition method for regrowth of crystalline phase change material Grant 8,680,501 - Schrott , et al. March 25, 2 | 2014-03-25 |
Charged entities as locomotive to control motion of polymers through a nanochannel Grant 8,641,879 - Harrer , et al. February 4, 2 | 2014-02-04 |
Crossed slit structure for nanopores App 20140004300 - Bai; Jingwei ;   et al. | 2014-01-02 |
Crossed slit structure for nanopores App 20140001149 - Bai; Jingwei ;   et al. | 2014-01-02 |
Nanofludic field effect transistor based on surface charge modulated nanochannel Grant 08618581 - | 2013-12-31 |
Nanofludic field effect transistor based on surface charge modulated nanochannel Grant 8,618,581 - Peng , et al. December 31, 2 | 2013-12-31 |
Nanostructure electrode for pseudocapacitive energy storage Grant 8,599,533 - Haight , et al. December 3, 2 | 2013-12-03 |
High energy density storage material device using nanochannel structure Grant 8,564,935 - Haight , et al. October 22, 2 | 2013-10-22 |
Surface charge enabled nanoporous semi-permeable membrane for desalination Grant 8,448,790 - Cotte , et al. May 28, 2 | 2013-05-28 |
High Energy Density Storage Material Device Using Nanochannel Structure App 20130128413 - HAIGHT; RICHARD A. ;   et al. | 2013-05-23 |
Memory Cell With Post Deposition Method For Regrowth Of Crystalline Phase Change Material App 20130119339 - Lam; Chung H. ;   et al. | 2013-05-16 |
Charged Entities As Locomotive To Control Motion Of Polymers Through A Nanochannel App 20130068618 - Harrer; Stefan ;   et al. | 2013-03-21 |
Charged Entities As Locomotive To Control Motion Of Polymers Through A Nanochannel App 20130068617 - Harrer; Stefan ;   et al. | 2013-03-21 |
High energy density storage material device using nanochannel structure Grant 8,390,987 - Haight , et al. March 5, 2 | 2013-03-05 |
Post deposition method for regrowth of crystalline phase change material Grant 8,354,659 - Lam , et al. January 15, 2 | 2013-01-15 |
Dna Sequencing Using Multiple Metal Layer Structure With Organic Coatings Forming Transient Bonding To Dna Bases App 20130001082 - Afzali-Ardakani; Ali ;   et al. | 2013-01-03 |
Electron Beam Sculpting Of Tunneling Junction For Nanopore Dna Sequencing App 20120325656 - Peng; Hongbo ;   et al. | 2012-12-27 |
High Energy Density Storage Material Device Using Nanochannel Structure App 20120293915 - Haight; Richard A. ;   et al. | 2012-11-22 |
Surface charge enabled nanoporous semi-permeable membrane for desalination Grant 8,307,994 - Cotte , et al. November 13, 2 | 2012-11-13 |
Surface Charge Enabled Nanoporous Semi-permeable Membrane For Desalination App 20120273362 - Cotte; John M. ;   et al. | 2012-11-01 |
Nanoporous semi-permeable membrane and methods for fabricating the same Grant 8,297,449 - Afzali-Ardakani , et al. October 30, 2 | 2012-10-30 |
Surface Charge Enabled Nanoporous Semi-permeable Membrane For Desalination App 20120267249 - COTTE; JOHN M. ;   et al. | 2012-10-25 |
High energy density storage material device using nanochannel structure Grant 8,287,604 - Haight , et al. October 16, 2 | 2012-10-16 |
Reprogrammable fuse structure and method Grant 8,278,155 - Burr , et al. October 2, 2 | 2012-10-02 |
Dna Motion Control Based On Nanopore With Organic Coating Forming Transient Bonding To Dna App 20120193235 - Afzali-Ardakani; Ali ;   et al. | 2012-08-02 |
Dna Sequencing Using Multiple Metal Layer Structure With Organic Coatings Forming Transient Bonding To Dna Bases App 20120193231 - Afzali-Ardakani; Ali ;   et al. | 2012-08-02 |
Dna Sequencing Using Multiple Metal Layer Structure With Different Organic Coatings Forming Different Transient Bondings To Dna App 20120193237 - Afzali-Ardakani; Ali ;   et al. | 2012-08-02 |
Electron Beam Sculpting Of Tunneling Junction For Nanopore Dna Sequencing App 20120193236 - Peng; Hongbo ;   et al. | 2012-08-02 |
Dosimeter powered by passive RF absorption Grant 8,212,218 - Cabral, Jr. , et al. July 3, 2 | 2012-07-03 |
Feedback Control Of Dimensions In Nanopore And Nanofluidic Devices App 20120103821 - Harrer; Stefan ;   et al. | 2012-05-03 |
Nanostructure Electrode For Pseudocapacitive Energy Storage App 20120057273 - Haight; Richard A. ;   et al. | 2012-03-08 |
Nanofludic field effect transistor based on surface charge modulated nanochannel Grant 8,110,410 - Peng , et al. February 7, 2 | 2012-02-07 |
Implantless Dopant Segregation for Silicide Contacts App 20120009771 - Cabral, JR.; Cyril ;   et al. | 2012-01-12 |
Precisely tuning feature sizes on hard masks via plasma treatment Grant 8,084,319 - Peng , et al. December 27, 2 | 2011-12-27 |
Ring-shaped electrode and manufacturing method for same Grant 8,084,760 - Lung , et al. December 27, 2 | 2011-12-27 |
Piezoelectric-based nanopore device for the active control of the motion of polymers through the same Grant 8,039,250 - Peng , et al. October 18, 2 | 2011-10-18 |
Amorphous nitride release layers for imprint lithography, and method of use Grant 8,029,716 - Houle , et al. October 4, 2 | 2011-10-04 |
Post Deposition Method For Regrowth Of Crystalline Phase Change Material App 20110227021 - Schrott; Alejandro G. ;   et al. | 2011-09-22 |
Piezoelectric-based Nanopore Device For The Active Control Of The Motion Of Polymers Through The Same App 20110223652 - Peng; Hongbo ;   et al. | 2011-09-15 |
Post deposition method for regrowth of crystalline phase change material Grant 8,017,433 - Lam , et al. September 13, 2 | 2011-09-13 |
Reprogrammable Fuse Structure and Method App 20110207286 - Burr; Geoffrey W. ;   et al. | 2011-08-25 |
Systems and methods for controlling position of charged polymer inside nanopore Grant 8,003,319 - Polonsky , et al. August 23, 2 | 2011-08-23 |
Precisely Tuning Feature Sizes on Hard Masks Via Plasma Treatment App 20110201204 - Peng; Hongbo ;   et al. | 2011-08-18 |
Atomic layer deposition metallic contacts, gates and diffusion barriers Grant 7,998,842 - Cabral, Jr. , et al. August 16, 2 | 2011-08-16 |
Post Deposition Method For Regrowth Of Crystalline Phase Change Material App 20110193045 - Schrott; Alejandro G. ;   et al. | 2011-08-11 |
High Energy Density Storage Material Device Using Nanochannel Structure App 20110188172 - Haight; Richard A. ;   et al. | 2011-08-04 |
Nanoporous Semi-Permeable Membrane and Methods for Fabricating the Same App 20110168560 - Afzali-Ardakani; Ali ;   et al. | 2011-07-14 |
Reprogrammable fuse structure and method Grant 7,960,808 - Burr , et al. June 14, 2 | 2011-06-14 |
Large grain size conductive structure for narrow interconnect openings Grant 7,956,463 - Yang , et al. June 7, 2 | 2011-06-07 |
Dosimeter Powered by Passive RF Absorption App 20110127438 - Cabral, JR.; Cyril ;   et al. | 2011-06-02 |
Copper interconnect structure with amorphous tantalum iridium diffusion barrier Grant 7,951,708 - DeHaven , et al. May 31, 2 | 2011-05-31 |
Surface Charge Enabled Nanoporous Semi-permeable Membrane For Desalination App 20110094884 - Cotte; John M. ;   et al. | 2011-04-28 |
Large Grain Size Conductive Structure For Narrow Interconnect Openings App 20110062587 - Yang; Chih-Chao ;   et al. | 2011-03-17 |
Self-aligned in-contact phase change memory device Grant 7,901,980 - Cheek , et al. March 8, 2 | 2011-03-08 |
Copper Interconnect Structure With Amorphous Tantalum Iridium Diffusion Barrier App 20100311236 - DeHaven; Patrick W. ;   et al. | 2010-12-09 |
Ring-shaped Electrode And Manufacturing Method For Same App 20100264396 - Lung; Hsiang-Lan ;   et al. | 2010-10-21 |
Silicide interconnect structure Grant 7,749,898 - Besser , et al. July 6, 2 | 2010-07-06 |
Systems and Methods for Controlling the Position of a Charged Polymer Inside a Nanopore App 20100025249 - Polonsky; Stanislav ;   et al. | 2010-02-04 |
Silicide Interconnect Structure App 20090315182 - Besser; Paul R. ;   et al. | 2009-12-24 |
Atomic laminates for diffucion barrier applications App 20090302474 - Barmak; Katayun ;   et al. | 2009-12-10 |
Self-aligned In-contact Phase Change Memory Device App 20090298223 - Cheek; Roger W. ;   et al. | 2009-12-03 |
Mobility Enhanced FET Devices App 20090298244 - Doris; Bruce B. ;   et al. | 2009-12-03 |
Amorphous Nitride Release Layers For Imprint Lithography, And Method Of Use App 20090194502 - Houle; Frances A. ;   et al. | 2009-08-06 |
Method To Enhance Performance Of Complex Metal Oxide Programmable Memory App 20090186443 - Joseph; Eric A. ;   et al. | 2009-07-23 |
Phase change memory cell with limited switchable volume Grant 7,514,705 - Breitwisch , et al. April 7, 2 | 2009-04-07 |
Structure for confining the switching current in phase memory (PCM) cells Grant 7,488,967 - Burr , et al. February 10, 2 | 2009-02-10 |
Mobility Enhanced FET Devices App 20080217700 - Doris; Bruce B. ;   et al. | 2008-09-11 |
Systems and Methods for Controlling the Position of a Charged Polymer Inside a Nanopore App 20080187915 - Polonsky; Stanislav ;   et al. | 2008-08-07 |
Method for direct electroplating of copper onto a non-copper plateable layer Grant 7,405,153 - Malhotra , et al. July 29, 2 | 2008-07-29 |
ULTRA-THIN Cu ALLOY SEED FOR INTERCONNECT APPLICATION App 20080164613 - Edelstein; Daniel C. ;   et al. | 2008-07-10 |
Reprogrammable fuse structure and method Grant 7,388,273 - Burr , et al. June 17, 2 | 2008-06-17 |
Method of forming an interconnect structure diffusion barrier with high nitrogen content Grant 7,378,338 - Cabral, Jr. , et al. May 27, 2 | 2008-05-27 |
Self-aligned In-contact Phase Change Memory Device App 20080090400 - Cheek; Roger W. ;   et al. | 2008-04-17 |
Reprogrammable Fuse Structure and Method App 20070290233 - Burr; Geoffrey W. ;   et al. | 2007-12-20 |
Phase change memory cell with limited switchable volume App 20070246748 - Breitwisch; Matthew J. ;   et al. | 2007-10-25 |
On-chip Cu interconnection using 1 to 5 nm thick metal cap Grant 7,247,946 - Bruley , et al. July 24, 2 | 2007-07-24 |
Method For Direct Electroplating Of Copper Onto A Non-copper Plateable Layer App 20070166995 - Malhotra; Sandra G. ;   et al. | 2007-07-19 |
PE-ALD of TaN diffusion barrier region on low-k materials Grant 7,211,507 - Dunn , et al. May 1, 2 | 2007-05-01 |
Plasma enhanced ALD of tantalum nitride and bilayer Grant 7,186,446 - Kim , et al. March 6, 2 | 2007-03-06 |
Reprogrammable fuse structure and method App 20060278895 - Burr; Geoffrey W. ;   et al. | 2006-12-14 |
Interconnect Structure Diffusion Barrier With High Nitrogen Content App 20060264048 - Cabral; Cyril JR. ;   et al. | 2006-11-23 |
Structure for confining the switching current in phase memory (PCM) cells App 20060226409 - Burr; Geoffrey W. ;   et al. | 2006-10-12 |
Interconnect structure diffusion barrier with high nitrogen content Grant 7,098,537 - Cabral, Jr. , et al. August 29, 2 | 2006-08-29 |
On-chip Cu interconnection using 1 to 5 nm thick metal cap App 20060160350 - Bruley; John ;   et al. | 2006-07-20 |
ALD deposition of ruthenium Grant 7,074,719 - Kim , et al. July 11, 2 | 2006-07-11 |
Crystallographic modification of hard mask properties Grant 7,001,835 - Clevenger , et al. February 21, 2 | 2006-02-21 |
Atomic layer deposition metallic contacts, gates and diffusion barriers App 20060003557 - Cabral; Cyril JR. ;   et al. | 2006-01-05 |
PE-ALD OF TaN DIFFUSION BARRIER REGION ON LOW-K MATERIALS App 20050269703 - Dunn, Derren N. ;   et al. | 2005-12-08 |
Atomic layer deposition of metallic contacts, gates and diffusion barriers Grant 6,943,097 - Cabral, Jr. , et al. September 13, 2 | 2005-09-13 |
Ald deposition of ruthenium App 20050118807 - Kim, Hyungiun ;   et al. | 2005-06-02 |
Crystallographic Modification of Hard mask Properties App 20050112862 - Clevenger, Lawrence A. ;   et al. | 2005-05-26 |
Interconnect Structure Diffusion Barrier with High Nitrogen Content App 20050110144 - Cabral, Cyril JR. ;   et al. | 2005-05-26 |
Plasma enhanced ALD of tantalum nitride and bilayer App 20050095443 - Kim, Hyungjun ;   et al. | 2005-05-05 |
Atomic laminates for diffusion barrier applications App 20050070097 - Barmak, Katayun ;   et al. | 2005-03-31 |
Atomic layer deposition of metallic contacts, gates and diffusion barriers App 20050042865 - Cabral, Cyril JR. ;   et al. | 2005-02-24 |
Method for forming a perovskite thin film using a sputtering method with a fully oxidized perovskite target Grant 6,210,545 - Farooq , et al. April 3, 2 | 2001-04-03 |
Laser methods for circuit repair on integrated circuits and substrates Grant 5,182,230 - Donelon , et al. January 26, 1 | 1993-01-26 |
Laser methods for circuit repair on integrated circuits and substrates Grant 5,171,709 - Donelon , et al. December 15, 1 | 1992-12-15 |
Large area cathode lift-off sputter deposition device Grant 4,824,544 - Mikalesen , et al. April 25, 1 | 1989-04-25 |
Hollow cathode Grant 4,633,129 - Cuomo , et al. December 30, 1 | 1986-12-30 |
Hollow cathode enhanced magnetron sputter device Grant 4,588,490 - Cuomo , et al. May 13, 1 | 1986-05-13 |