Patent | Date |
---|
Modulated reflectance measurement system using UV probe Grant 8,817,260 - Opsal , et al. August 26, 2 | 2014-08-26 |
Modulated Reflectance Measurement System Using Uv Probe App 20100134785 - Opsal; Jon ;   et al. | 2010-06-03 |
Modulated reflectance measurement system using UV probe Grant 7,646,486 - Opsal , et al. January 12, 2 | 2010-01-12 |
Digital Picture Frame Device And System App 20090316056 - Rosencwaig; Allan ;   et al. | 2009-12-24 |
Modulated Reflectance Measurement System Using Uv Probe App 20080158565 - Opsal; Jon ;   et al. | 2008-07-03 |
Digital Picture Frame Device And System App 20080143890 - Rosencwaig; Allan ;   et al. | 2008-06-19 |
Modulated reflectance measurement system using UV probe Grant 7,362,441 - Opsal , et al. April 22, 2 | 2008-04-22 |
Beam profile complex reflectance system and method for thin film and critical dimension measurements Grant 7,286,243 - Rosencwaig October 23, 2 | 2007-10-23 |
High-sensitivity surface detection system and method App 20070229833 - Rosencwaig; Allan ;   et al. | 2007-10-04 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 7,248,375 - Opsal , et al. July 24, 2 | 2007-07-24 |
Modulated reflectance measurement system using UV probe App 20070008541 - Opsal; Jon ;   et al. | 2007-01-11 |
Modulated reflectance measurement system using UV probe Grant 7,126,690 - Opsal , et al. October 24, 2 | 2006-10-24 |
Optical inspection equipment for semiconductor wafers with precleaning Grant 7,068,370 - Rosencwaig , et al. June 27, 2 | 2006-06-27 |
Optical scatterometry of asymmetric lines and structures Grant 7,061,627 - Opsal , et al. June 13, 2 | 2006-06-13 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20060012803 - Opsal; Jon ;   et al. | 2006-01-19 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,972,852 - Opsal , et al. December 6, 2 | 2005-12-06 |
Beam profile complex reflectance system and method for thin film and critical dimension measurements App 20050248773 - Rosencwaig, Allan | 2005-11-10 |
Optical inspection equipment for semiconductor wafers with precleaning App 20050231719 - Rosencwaig, Allan ;   et al. | 2005-10-20 |
Optical inspection equipment for semiconductor wafers with precleaning Grant 6,930,771 - Rosencwaig , et al. August 16, 2 | 2005-08-16 |
Thin film optical measurement system and method with calibrating ellipsometer Grant 6,922,244 - Rosencwaig , et al. July 26, 2 | 2005-07-26 |
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer Grant 6,894,781 - Wei , et al. May 17, 2 | 2005-05-17 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20050057760 - Opsal, Jon ;   et al. | 2005-03-17 |
Optical scatterometry of asymmetric lines and structures App 20050041258 - Opsal, Jon ;   et al. | 2005-02-24 |
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements Grant 6,842,259 - Rosencwaig , et al. January 11, 2 | 2005-01-11 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,829,057 - Opsal , et al. December 7, 2 | 2004-12-07 |
Thin film optical measurement system and method with calibrating ellipsometer App 20040218180 - Rosencwaig, Allan ;   et al. | 2004-11-04 |
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements Grant 6,813,034 - Rosencwaig , et al. November 2, 2 | 2004-11-02 |
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements App 20040212810 - Rosencwaig, Allan ;   et al. | 2004-10-28 |
Method of monitoring the fabrication of thin film layers forming a DWDM filter Grant 6,781,692 - Rosencwaig August 24, 2 | 2004-08-24 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,774,997 - Rosencwaig , et al. August 10, 2 | 2004-08-10 |
High-temperature superconductivity devices and methods App 20040152599 - Rosencwaig, Allan | 2004-08-05 |
Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry Grant 6,754,305 - Rosencwaig , et al. June 22, 2 | 2004-06-22 |
Modulated reflectance measurement system using UV probe App 20040104352 - Opsal, Jon ;   et al. | 2004-06-03 |
Optical inspection equipment for semiconductor wafers with precleaning App 20040100633 - Rosencwaig, Allan ;   et al. | 2004-05-27 |
Optical inspection equipment for semiconductor wafers with precleaning Grant 6,714,300 - Rosencwaig , et al. March 30, 2 | 2004-03-30 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20040046968 - Opsal, Jon ;   et al. | 2004-03-11 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,678,349 - Opsal , et al. January 13, 2 | 2004-01-13 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,654,131 - Opsal , et al. November 25, 2 | 2003-11-25 |
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer App 20030197864 - Wei, Lanhua ;   et al. | 2003-10-23 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20030160959 - Rosencwaig, Allan ;   et al. | 2003-08-28 |
Combination thin-film stress and thickness measurement device Grant 6,608,689 - Wei , et al. August 19, 2 | 2003-08-19 |
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements App 20030147086 - Rosencwaig, Allan ;   et al. | 2003-08-07 |
Monitoring temperature and sample characteristics using a rotating compensator ellipsometer Grant 6,583,875 - Wei , et al. June 24, 2 | 2003-06-24 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,567,213 - Rosencwaig , et al. May 20, 2 | 2003-05-20 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements App 20030081725 - Opsal, Jon ;   et al. | 2003-05-01 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,512,815 - Opsal , et al. January 28, 2 | 2003-01-28 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements App 20020154736 - Opsal, Jon ;   et al. | 2002-10-24 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20020154302 - Rosencwaig, Allan ;   et al. | 2002-10-24 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements App 20020135783 - Opsal, Jon ;   et al. | 2002-09-26 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements Grant 6,429,943 - Opsal , et al. August 6, 2 | 2002-08-06 |
Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements Grant 6,408,048 - Opsal , et al. June 18, 2 | 2002-06-18 |
Apparatus for analyzing samples using combined thermal wave and x-ray reflectance measurements App 20020001364 - Opsal, Jon ;   et al. | 2002-01-03 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors App 20010033378 - Rosencwaig, Allan ;   et al. | 2001-10-25 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,297,880 - Rosencwaig , et al. October 2, 2 | 2001-10-02 |
Apparatus for analyzing multi-layer thin film stacks on semiconductors Grant 6,278,519 - Rosencwaig , et al. August 21, 2 | 2001-08-21 |
Apparatus for non-invasive analyses of biological compounds Grant 5,657,754 - Rosencwaig August 19, 1 | 1997-08-19 |
Sample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detection Grant 5,596,406 - Rosencwaig , et al. January 21, 1 | 1997-01-21 |
Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices Grant 5,412,473 - Rosencwaig , et al. May 2, 1 | 1995-05-02 |
Apparatus for evaluating thermal and electrical characteristics in a sample Grant 5,228,776 - Smith , et al. July 20, 1 | 1993-07-20 |
Method and apparatus for evaluating the thickness of thin films Grant 5,181,080 - Fanton , et al. January 19, 1 | 1993-01-19 |
Optical measurement device with enhanced sensitivity Grant 5,159,412 - Willenborg , et al. October 27, 1 | 1992-10-27 |
Apparatus for measuring grain sizes in metalized layers Grant 5,149,978 - Opsal , et al. September 22, 1 | 1992-09-22 |
Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor Grant 5,042,952 - Opsal , et al. * August 27, 1 | 1991-08-27 |
High resolution ellipsometric apparatus Grant 5,042,951 - Gold , et al. August 27, 1 | 1991-08-27 |
Method and apparatus for measuring thickness of thin films Grant 4,999,014 - Gold , et al. March 12, 1 | 1991-03-12 |
Method and apparatus for evaluating surface and subsurface features in a semiconductor Grant 4,952,063 - Opsal , et al. * August 28, 1 | 1990-08-28 |
Method and apparatus for evaluating surface and subsurface features in a semiconductor Grant 4,854,710 - Opsal , et al. August 8, 1 | 1989-08-08 |
Apparatus for locating and testing areas of interest on a workpiece Grant 4,795,260 - Schuur , et al. January 3, 1 | 1989-01-03 |
Method and apparatus for optically detecting surface states in materials Grant 4,750,822 - Rosencwaig , et al. June 14, 1 | 1988-06-14 |
Evaluating both thickness and compositional variables in a thin film sample Grant 4,679,946 - Rosencwaig , et al. * July 14, 1 | 1987-07-14 |
Method and apparatus for evaluating surface conditions of a sample Grant 4,636,088 - Rosencwaig , et al. * January 13, 1 | 1987-01-13 |
Method and apparatus for detecting thermal waves Grant 4,634,290 - Rosencwaig , et al. * January 6, 1 | 1987-01-06 |
Evaluation of surface and subsurface characteristics of a sample Grant 4,632,561 - Rosencwaig , et al. December 30, 1 | 1986-12-30 |
Detecting thermal waves to evaluate thermal parameters Grant 4,579,463 - Rosencwaig , et al. April 1, 1 | 1986-04-01 |
Thin film thickness measurement with thermal waves Grant 4,522,510 - Rosencwaig , et al. June 11, 1 | 1985-06-11 |
Method for detection of thermal waves with a laser probe Grant 4,521,118 - Rosencwaig June 4, 1 | 1985-06-04 |
Thin film thickness measurements and depth profiling utilizing a thermal wave detection system Grant 4,513,384 - Rosencwaig April 23, 1 | 1985-04-23 |
Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy Grant 4,484,820 - Rosencwaig November 27, 1 | 1984-11-27 |
Method for introduction of gases into microspheres Grant 4,257,798 - Hendricks , et al. March 24, 1 | 1981-03-24 |
Thermoacoustic microscopy Grant 4,255,971 - Rosencwaig March 17, 1 | 1981-03-17 |
Photo acoustic cell Grant 4,028,932 - Rosencwaig June 14, 1 | 1977-06-14 |
Methods and means for analyzing substances Grant 3,948,345 - Rosencwaig April 6, 1 | 1976-04-06 |