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Patent applications and USPTO patent grants for Rosa; Jason Della.The latest application filed is for "recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors".
Patent | Date |
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Electrostatic chuck having thermally isolated zones with minimal crosstalk Grant 10,304,715 - Parkhe , et al. | 2019-05-28 |
Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors Grant 9,909,213 - Shoji , et al. March 6, 2 | 2018-03-06 |
Recursive Pumping For Symmetrical Gas Exhaust To Control Critical Dimension Uniformity In Plasma Reactors App 20150041061 - SHOJI; Sergio Fukuda ;   et al. | 2015-02-12 |
Process Kit For Edge Critical Dimension Uniformity Control App 20150001180 - DOAN; Kenny Linh ;   et al. | 2015-01-01 |
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