| Patent | Date |
|---|
Electrostatic Capacitance Sensor
App 20220037177 - FUKUZAKI; YOSHIKI | 2022-02-03 |
Pod opener
Grant 11,232,964 - Sakata January 25, 2 | 2022-01-25 |
Thin plate substrate-holding device and transfer robot provided with this holding device
Grant 11,227,784 - Sakata , et al. January 18, 2 | 2022-01-18 |
Transport Device Having Local Purge Function
App 20210327737 - SAKATA; KATSUNORI ; et al. | 2021-10-21 |
Thin-plate substrate holding finger and transfer robot provided with said finger
Grant 11,107,722 - Sakata August 31, 2 | 2021-08-31 |
Aligner And Correction Value Calculation Method For Aligner
App 20210111055 - TAMATSUKURI; Daigo ; et al. | 2021-04-15 |
Switching Valve And Suction-discharge Device Including The Same
App 20210054329 - MUNAKATA; Teruyoshi ; et al. | 2021-02-25 |
Thin Plate Substrate-holding Device And Transfer Robot Provided With This Holding Device
App 20210050242 - SAKATA; KATSUNORI ; et al. | 2021-02-18 |
Switching valve and suction-discharge device including the same
Grant 10,865,375 - Munakata , et al. December 15, 2 | 2020-12-15 |
Pod Opener
App 20200234987 - SAKATA; Katsunori | 2020-07-23 |
Thin-plate Substrate Holding Finger And Transfer Robot Provided With Said Finger
App 20200101624 - SAKATA; KATSUNORI | 2020-04-02 |
Waveform Analysis Device And Waveform Analysis Method
App 20190339119 - Tamatsukuri; Daigo | 2019-11-07 |
Load port and load port atmosphere replacing method
Grant 10,354,903 - Sakata , et al. July 16, 2 | 2019-07-16 |
Switching Valve And Suction-discharge Device Including The Same
App 20180201893 - Munakata; Teruyoshi ; et al. | 2018-07-19 |
Load Port And Load Port Atmosphere Replacing Method
App 20170178942 - SAKATA; Katsunori ; et al. | 2017-06-22 |
Sensor unit and constant-temperature device
Grant 9,464,266 - Yamashita , et al. October 11, 2 | 2016-10-11 |
Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
Grant 9,437,466 - Sakiya , et al. September 6, 2 | 2016-09-06 |
Constant-temperature device provided with rotating specimen table
Grant 9,364,082 - Hayami June 14, 2 | 2016-06-14 |
Device and method for detecting position of semiconductor substrate
Grant 9,275,886 - Fujimoto , et al. March 1, 2 | 2016-03-01 |
Robot control device and control method
Grant 9,199,373 - Tagashira December 1, 2 | 2015-12-01 |
Device And Method For Detecting Position Of Semiconductor Substrate
App 20150287625 - Fujimoto; Keiji ; et al. | 2015-10-08 |
Constant-temperature equipment
Grant 9,040,291 - Yamashita May 26, 2 | 2015-05-26 |
Constant-temperature equipment
Grant 9,040,292 - Yamashita May 26, 2 | 2015-05-26 |
Storage Container, Shutter Opening/closing Unit Of Storage Container, And Wafer Stocker Using Storage Container And Shutter Opening/closing Unit
App 20150030416 - SAKIYA; Fumio ; et al. | 2015-01-29 |
Transport apparatus, position teaching method, and sensor jig
Grant 8,688,261 - Hirota April 1, 2 | 2014-04-01 |
Conveyance arm and conveyance robot with same
Grant 8,677,855 - Yokoyama March 25, 2 | 2014-03-25 |
Robot Control Device And Control Method
App 20130085606 - Tagashira; Ryuma | 2013-04-04 |
Container and loader for substrate
Grant 8,348,583 - Fujii , et al. January 8, 2 | 2013-01-08 |
Conveyance Arm And Conveyance Robot With Same
App 20120240710 - YOKOYAMA; Kouji | 2012-09-27 |
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
Grant 8,158,536 - Sakurai , et al. April 17, 2 | 2012-04-17 |
Shuttle-type conveying device, microplate feeding and collecting device, pickup device for microplate, cassette for microplate, and shelf for containing microplate
Grant 8,118,153 - Yamasaki , et al. February 21, 2 | 2012-02-21 |
Shuttle-type Conveying Device, Microplate Feeding And Collecting Device, Pickup Device For Microplate, Cassette For Microplate, And Shelf For Containing Microplate
App 20110200419 - YAMASAKI; Yukito ; et al. | 2011-08-18 |
Shuttle type conveying device, microplate feeding and collecting device, pickup device for microplate, cassette for microplate, and shelf for containing microplate
Grant 7,954,624 - Yamasaki , et al. June 7, 2 | 2011-06-07 |
Transport Apparatus, Position Teaching Method, And Sensor Jig
App 20110130864 - Hirota; Kenji | 2011-06-02 |
Method and system for teaching reference position of semiconductor wafer in automated wafer handling manufacturing equipment
Grant 7,933,665 - Sakiya , et al. April 26, 2 | 2011-04-26 |
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
App 20100237476 - Sakurai; Toshio ; et al. | 2010-09-23 |
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
Grant 7,749,920 - Sakurai , et al. July 6, 2 | 2010-07-06 |
Drive source and transportation robot
Grant 7,704,036 - Sato April 27, 2 | 2010-04-27 |
Device for temporarily loading, storing and unloading a container
Grant 7,695,234 - Yamashita April 13, 2 | 2010-04-13 |
Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system
Grant 7,635,244 - Sakiya December 22, 2 | 2009-12-22 |
Shuttle Type Conveying Device, Microplate Feeding And Collecting Device, Pickup Device For Microplate, Cassette For Microplate, And Shelf For Receiving Microplate
App 20090287345 - Yamasaki; Yukito ; et al. | 2009-11-19 |
Liquid composition, manufacturing method thereof, low dielectric constant films, abrasive materials, and electronic components
App 20090283013 - Takahagi; Takayuki ; et al. | 2009-11-19 |
Robot simulation device, and robot simulation program
Grant 7,606,633 - Hosokawa , et al. October 20, 2 | 2009-10-20 |
Linear motor
Grant 7,425,783 - Sakiya September 16, 2 | 2008-09-16 |
Cylinder, load port using it, and production system
Grant 7,377,736 - Fujii , et al. May 27, 2 | 2008-05-27 |
Drive Source And Transportation Robot
App 20080019816 - Sato; Masaaki | 2008-01-24 |
Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device
Grant 7,315,373 - Fukuzaki , et al. January 1, 2 | 2008-01-01 |
Linear motor
App 20070035184 - Sakiya; Fumio | 2007-02-15 |
Low-dielectric films, and manufacturion method thereof, and electronic component using it
App 20060244034 - Sakurai; Toshio ; et al. | 2006-11-02 |
Wafer mapping device and load port provided with same
Grant 7,115,891 - Komatsu October 3, 2 | 2006-10-03 |
Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
Grant 7,086,822 - Maeda August 8, 2 | 2006-08-08 |
Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system
App 20050191155 - Sakiya, Fumio | 2005-09-01 |
Device for temporarily loading keeping and unloading a container
App 20050036856 - Yamashita, Seishi | 2005-02-17 |
Cylinder, load port using it, and production system
Grant 6,652,212 - Kimoto , et al. November 25, 2 | 2003-11-25 |
Container
Grant 6,186,331 - Kinpara , et al. February 13, 2 | 2001-02-13 |
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