Roos; Matthias
Patent Applications and Registrations
Patent applications and USPTO patent grants for Roos; Matthias.The latest application filed is for "vacuum system, in particular euv lithography system, and optical element".
- Roos; Matthias - Aalen DE
| Patent | Date |
|---|---|
| Vacuum system, in particular EUV lithography system, and optical element Grant 10,599,052 - Roos , et al. | 2020-03-24 |
| Vacuum System, In Particular Euv Lithography System, And Optical Element App 20190196344 - ROOS; Matthias ; et al. | 2019-06-27 |
| Vacuum system, in particular EUV lithography system, and optical element Grant 10,241,421 - Roos , et al. | 2019-03-26 |
| Vacuum linear feed-through and vacuum system having said vacuum linear feed-through Grant 9,952,519 - Roos , et al. April 24, 2 | 2018-04-24 |
| Vacuum Linear Feed-through And Vacuum System Having Said Vacuum Linear Feed-through App 20170212428 - Roos; Matthias ; et al. | 2017-07-27 |
| Vacuum System, in Particular EUV Lithography System, and Optical Element App 20170168402 - Roos; Matthias ; et al. | 2017-06-15 |
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