Roobol; Sander Bas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Roobol; Sander Bas.The latest application filed is for "reflector manufacturing method and associated reflector".

Company Profile

17.20.21

Roobol; Sander Bas - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for determining a radiation beam intensity profile Grant 11,353,796 - Coenen , et al. June 7, 2	2022-06-07
Reflector Manufacturing Method And Associated Reflector App 20220134693 - ROOBOL; Sander Bas ; et al.	2022-05-05
Method and apparatus for detecting substrate surface variations Grant 11,092,902 - D'Achard Van Enschut , et al. August 17, 2	2021-08-17
Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus Grant 10,983,361 - Roobol , et al. April 20, 2	2021-04-20
Optical detector Grant 10,976,265 - Roobol , et al. April 13, 2	2021-04-13
HHG source, inspection apparatus and method for performing a measurement Grant 10,816,906 - Lin , et al. October 27, 2	2020-10-27
Determining an edge roughness parameter of a periodic structure Grant 10,725,387 - Coenen , et al.	2020-07-28
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate Grant 10,670,974 - Brussaard , et al.	2020-06-02
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,649,344 - Roobol , et al.	2020-05-12
Apparatus for delivering gas and illumination source for generating high harmonic radiation Grant 10,630,037 - Srivastava , et al.	2020-04-21
Method and Apparatus for Determining a Radiation Beam Intensity Profile App 20200098486 - COENEN; Teis Johan ; et al.	2020-03-26
Method and apparatus for inspection and metrology Grant 10,578,979 - Van Der Post , et al.	2020-03-03
Apparatus for delivering gas and illumination source for generating high harmonic radiation Grant 10,530,111 - Srivastava , et al. J	2020-01-07
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,451,559 - Van Voorst , et al. Oc	2019-10-22
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus Grant 10,379,448 - Mathijssen , et al. A	2019-08-13
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation App 20190212657 - SRIVASTAVA; Sudhir ; et al.	2019-07-11
Method And Apparatus For Inspection And Metrology App 20190212655 - VAN DER POST; Sietse Thijmen ; et al.	2019-07-11
Metrology Apparatus for and a Method of Determining a Characteristic of Interest of a Structure on a Substrate App 20190204757 - BRUSSAARD; Gerrit Jacobus Hendrik ; et al.	2019-07-04
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,330,606 - Van Voorst , et al.	2019-06-25
HHG Source, Inspection Apparatus and Method for Performing a Measurement App 20190155171 - LIN; Nan ; et al.	2019-05-23
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,267,744 - Tinnemans , et al.	2019-04-23
Method and apparatus for inspection and metrology Grant 10,248,029 - Van Der Post , et al.	2019-04-02
HHG source, inspection apparatus and method for performing a measurement Grant 10,234,771 - Lin , et al.	2019-03-19
Optical Detector App 20190049393 - ROOBOL; Sander Bas ; et al.	2019-02-14
Determining An Edge Roughness Parameter Of A Periodic Structure App 20190025706 - COENEN; Teis Johan ; et al.	2019-01-24
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20190003981 - Van Voorst; Peter Danny ; et al.	2019-01-03
Method and apparatus for determining the property of a structure, device manufacturing method Grant 10,133,192 - Tinnemans , et al. November 20, 2	2018-11-20
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation App 20180267411 - SRIVASTAVA; Sudhir ; et al.	2018-09-20
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus App 20180254597 - VAN DER POST; Sietse Thijmen ; et al.	2018-09-06
Lithographic apparatus and method for performing a measurement Grant 10,067,068 - Den Boef , et al. September 4, 2	2018-09-04
Methods of Aligning a Diffractive Optical System and Diffracting Beams, Diffractive Optical Element and Apparatus App 20180239160 - Roobol; Sander Bas ; et al.	2018-08-23
Method and apparatus for generating illuminating radiation Grant 10,048,596 - Lin , et al. August 14, 2	2018-08-14
Methods And Apparatus For Predicting Performance Of A Measurement Method, Measurement Method And Apparatus App 20180224753 - MATHIJSSEN; Simon Gijsbert Josephus ; et al.	2018-08-09
Method And Apparatus For Inspection And Metrology App 20180188658 - VAN DER POST; Sietse Thijmen ; et al.	2018-07-05
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20180136568 - ROOBOL; Sander Bas ; et al.	2018-05-17
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20180073992 - VAN VOORST; Peter Danny ; et al.	2018-03-15
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20180011029 - TINNEMANS; Patricius Aloysius Jacobus ; et al.	2018-01-11
Method and Apparatus for Generating Illuminating Radiation App 20170322497 - LIN; Nan ; et al.	2017-11-09
Method and Apparatus for Determining the Property of a Structure, Device Manufacturing Method App 20170315055 - TINNEMANS; Patricius Aloysius Jacobus ; et al.	2017-11-02
HHG Source, Inspection Apparatus and Method for Performing a Measurement App 20170315456 - LIN; Nan ; et al.	2017-11-02
Lithographic Apparatus and Method for Performing a Measurement App 20170184511 - DEN BOEF; Arie Jeffrey ; et al.	2017-06-29

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