loadpatents
Patent applications and USPTO patent grants for Rondum; Erik S..The latest application filed is for "retaining ring for cmp".
Patent | Date |
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System and process for in situ byproduct removal and platen cooling during CMP Grant 10,350,728 - Diao , et al. July 16, 2 | 2019-07-16 |
Retaining ring for CMP Grant 10,322,492 - Nagengast , et al. | 2019-06-18 |
Retaining Ring For Cmp App 20180021918 - Nagengast; Andrew J. ;   et al. | 2018-01-25 |
Systems and methods for substrate polishing end point detection using improved friction measurement Grant 9,862,070 - Chang , et al. January 9, 2 | 2018-01-09 |
System And Process For In Situ Byproduct Removal And Platen Cooling During Cmp App 20160167195 - DIAO; Jie ;   et al. | 2016-06-16 |
Systems and methods for substrate polishing end point detection using improved friction measurement Grant 9,061,394 - Chang , et al. June 23, 2 | 2015-06-23 |
Method Of Forming Polishing Sheet App 20140237905 - Bonner; Benjamin A. ;   et al. | 2014-08-28 |
Systems And Methods For Substrate Polishing End Point Detection Using Improved Friction Measurement App 20130122782 - Chang; Shou-Sung ;   et al. | 2013-05-16 |
Chemical mechanical polisher with heater and method Grant 8,439,723 - Marks , et al. May 14, 2 | 2013-05-14 |
Measurement Of Pad Thickness And Control Of Conditioning App 20120270477 - Nangoy; Roy C. ;   et al. | 2012-10-25 |
Polishing article with integrated window stripe Grant 7,841,925 - Menk , et al. November 30, 2 | 2010-11-30 |
Monolithic Linear Polishing Sheet App 20100112919 - Bonner; Benjamin A. ;   et al. | 2010-05-06 |
Chemical Mechanical Polisher With Heater And Method App 20100035515 - Marks; Robert ;   et al. | 2010-02-11 |
Polishing apparatus with grooved subpad Grant 7,601,050 - Zuniga , et al. October 13, 2 | 2009-10-13 |
Polishing Article With Integrated Window Stripe App 20090253358 - Menk; Gregory E. ;   et al. | 2009-10-08 |
Polishing article with integrated window stripe Grant 7,553,214 - Menk , et al. June 30, 2 | 2009-06-30 |
Leader And Trailer For Linear Polishing Sheet App 20090088051 - Menk; Gregory E. ;   et al. | 2009-04-02 |
Materials for chemical mechanical polishing Grant 7,429,210 - Bonner , et al. September 30, 2 | 2008-09-30 |
Smart polishing media assembly for planarizing substrates App 20070212976 - McReynolds; Peter ;   et al. | 2007-09-13 |
Polishing system with spiral-grooved subpad App 20070197147 - Rondum; Erik S. ;   et al. | 2007-08-23 |
Dechuck using subpad with recess App 20070197132 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing article with integrated window stripe App 20070197133 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing apparatus with grooved subpad App 20070197141 - Zuniga; Steven M. ;   et al. | 2007-08-23 |
Polishing article with window stripe App 20070197145 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Polishing article with integrated window stripe App 20070197134 - Menk; Gregory E. ;   et al. | 2007-08-23 |
Materials For Chemical Mechanical Polishing App 20070117500 - BONNER; BENJAMIN A. ;   et al. | 2007-05-24 |
Materials for chemical mechanical polishing Grant 7,179,159 - Bonner , et al. February 20, 2 | 2007-02-20 |
Materials for chemical mechanical polishing App 20060246831 - Bonner; Benjamin A. ;   et al. | 2006-11-02 |
Platen with patterned surface for chemical mechanical polishing App 20040072518 - Prabhu, Gopalakrishna B. ;   et al. | 2004-04-15 |
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