Patent | Date |
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Reticles with subdivided blocking regions Grant 8,822,108 - Rolfson September 2, 2 | 2014-09-02 |
Reticles With Subdivided Blocking Regions App 20130157179 - Rolfson; J. Brett | 2013-06-20 |
Methods of fabricating reticles with subdivided blocking regions Grant 8,383,301 - Rolfson February 26, 2 | 2013-02-26 |
Reticles With Subdivided Blocking Regions And Methods Of Fabrication App 20120070768 - Rolfson; J. Brett | 2012-03-22 |
Reticles with subdivided blocking regions Grant 8,071,262 - Rolfson December 6, 2 | 2011-12-06 |
Multi-layer, attenuated phase-shifting mask Grant 7,838,183 - Rolfson November 23, 2 | 2010-11-23 |
Methods for forming and cleaning photolithography reticles Grant 7,767,365 - Carpenter , et al. August 3, 2 | 2010-08-03 |
Reticles With Subdivided Blocking Regions App 20100112462 - Rolfson; J. Brett | 2010-05-06 |
Multi-layer, Attenuated Phase-shifting Mask App 20100040962 - Rolfson; J. Brett | 2010-02-18 |
Multi-layer, attenuated phase-shifting mask Grant 7,611,809 - Rolfson November 3, 2 | 2009-11-03 |
Methods for converting reticle configurations and methods for modifying reticles Grant 7,592,105 - Chance , et al. September 22, 2 | 2009-09-22 |
Semiconductor constructions comprising multi-level patterns of radiation-imageable material Grant 7,535,112 - Aiton , et al. May 19, 2 | 2009-05-19 |
Reticles Grant 7,494,750 - Rolfson February 24, 2 | 2009-02-24 |
Reticles and methods of forming reticles Grant 7,455,937 - Rolfson November 25, 2 | 2008-11-25 |
Methods for forming and cleaning photolithography reticles App 20080057411 - Carpenter; Craig M. ;   et al. | 2008-03-06 |
Partial edge bead removal to allow improved grounding during e-beam mask writing Grant 7,338,609 - Rolfson March 4, 2 | 2008-03-04 |
Multi Layer, Attenuated Phase Shifting Mask App 20070202418 - Rolfson; J. Brett | 2007-08-30 |
Methods of forming wire bonds for semiconductor constructions Grant 7,262,123 - Aiton , et al. August 28, 2 | 2007-08-28 |
Multi-layer, attenuated phase-shifting mask Grant 7,226,708 - Rolfson June 5, 2 | 2007-06-05 |
Semiconductor constructions comprising multi-level patterns of radiation-imageable material App 20070072343 - Aiton; John ;   et al. | 2007-03-29 |
Methods for converting reticle configurations Grant 7,147,974 - Chance , et al. December 12, 2 | 2006-12-12 |
Methods for converting reticle configurations App 20060257757 - Chance; Randall W. ;   et al. | 2006-11-16 |
Partial edge bead removal to allow improved grounding during e-beam mask writing App 20060130969 - Rolfson; J. Brett | 2006-06-22 |
Reticles and methods of forming reticles App 20060121361 - Rolfson; J. Brett | 2006-06-08 |
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials Grant 7,057,263 - Moore , et al. June 6, 2 | 2006-06-06 |
Partial edge bead removal to allow improved grounding during e-beam mask writing App 20060113280 - Rolfson; J. Brett | 2006-06-01 |
Ion implant lithography method of processing a semiconductor substrate Grant 7,018,936 - Rolfson March 28, 2 | 2006-03-28 |
Device and method addressing gas contamination in a wet process App 20060037628 - Rolfson; J. Brett | 2006-02-23 |
Semiconductor constructions comprising multi-level patterns of radiation-imageable material; and methods of forming wire bonds for semiconductor constructions App 20060024942 - Aiton; John ;   et al. | 2006-02-02 |
Partial edge bead removal to allow improved grounding during e-beam mask writing Grant 6,986,850 - Rolfson January 17, 2 | 2006-01-17 |
Multi-layer, attenuated phase-shifting mask App 20060008710 - Rolfson; J. Brett | 2006-01-12 |
Method and apparatus for uniformly baking substrates such as photomasks Grant 6,979,528 - Rolfson December 27, 2 | 2005-12-27 |
Apparatus for uniformly baking substrates such as photomasks App 20050205007 - Rolfson, J. Brett | 2005-09-22 |
Apparatus for uniformly baking substrates such as photomasks Grant 6,908,511 - Rolfson June 21, 2 | 2005-06-21 |
Multi-layer, attenuated phase-shifting mask Grant 6,908,715 - Rolfson June 21, 2 | 2005-06-21 |
Methods for converting reticle configurations App 20050077266 - Chance, Randal W. ;   et al. | 2005-04-14 |
Device addressing gas contamination in a wet process Grant 6,866,049 - Rolfson March 15, 2 | 2005-03-15 |
Radiation shielding for field emitters Grant 6,860,777 - Williams , et al. March 1, 2 | 2005-03-01 |
Partial edge bead removal to allow improved grounding during e-beam mask writing App 20050008943 - Rolfson, J. Brett | 2005-01-13 |
Integrated capacitor bottom electrode for use with conformal dielectric Grant 6,838,338 - Sandhu , et al. January 4, 2 | 2005-01-04 |
Methods of masking and etching a semiconductor substrate, and ion implant lithography methods of processing a semiconductor substrate App 20040147129 - Rolfson, J. Brett | 2004-07-29 |
Methods of forming patterns across photoresist and methods of forming radiation-patterning tools Grant 6,767,690 - Rolfson July 27, 2 | 2004-07-27 |
Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry Grant 6,767,785 - Rolfson , et al. July 27, 2 | 2004-07-27 |
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials App 20040124441 - Moore, John T. ;   et al. | 2004-07-01 |
Device addressing gas contamination in a wet process App 20040069330 - Rolfson, J. Brett | 2004-04-15 |
Methods of masking and etching a semiconductor substrate, and ion implant lithography methods of processing a semiconductor substrate Grant 6,696,224 - Rolfson February 24, 2 | 2004-02-24 |
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials Grant 6,693,345 - Moore , et al. February 17, 2 | 2004-02-17 |
Multi-layer, attenuated phase-shifting mask App 20040023134 - Rolfson, J. Brett | 2004-02-05 |
Method of alloying a semiconductor device Grant 6,664,171 - Gonzalez , et al. December 16, 2 | 2003-12-16 |
Method of alloying a semiconductor device App 20030173565 - Gonzalez, Fernando ;   et al. | 2003-09-18 |
Methods of forming patterns across photoresist and methods of forming radiation-patterning tools App 20030162106 - Rolfson, J. Brett | 2003-08-28 |
Integrated capacitor bottom electrode for use with conformal dielectric App 20030153145 - Sandhu, Gurtej S. ;   et al. | 2003-08-14 |
Multi-layer, attenuated phase-shifting mask Grant 6,599,666 - Rolfson July 29, 2 | 2003-07-29 |
Method and apparatus for uniformly baking substrates such as photomasks App 20030124470 - Rolfson, J. Brett | 2003-07-03 |
Method and apparatus for uniformly baking substrates such as photomasks App 20030124469 - Rolfson, J. Brett | 2003-07-03 |
Methods of masking and etching a semiconductor substrate, and ion implant lithography methods of processing a semiconductor substrate App 20030096195 - Rolfson, J. Brett | 2003-05-22 |
Method of alloying a semiconductor device App 20030077913 - Gonzalez, Fernando ;   et al. | 2003-04-24 |
Radiation shielding for field emitters App 20030057861 - Williams, Terry N. ;   et al. | 2003-03-27 |
Method for removing contaminants from a semiconductor wafer Grant 6,506,689 - Rolfson January 14, 2 | 2003-01-14 |
Multi-layer, attenuated phase-shifting mask App 20020132173 - Rolfson, J. Brett | 2002-09-19 |
Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry App 20020132419 - Rolfson, J. Brett ;   et al. | 2002-09-19 |
Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride Grant 6,451,504 - Rolfson , et al. September 17, 2 | 2002-09-17 |
Methods of forming patterns across photoresist and methods of forming radiation-patterning tools App 20020119397 - Rolfson, J. Brett | 2002-08-29 |
Method for CMOS well drive in a non-inert ambient App 20020076870 - Rolfson, J. Brett ;   et al. | 2002-06-20 |
Reflectance method for evaluating the surface characteristics of opaque materials App 20020067489 - Thakur, Randhir P.S. ;   et al. | 2002-06-06 |
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials App 20020047202 - Moore, John T. ;   et al. | 2002-04-25 |
Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry App 20020003283 - Rolfson, J Brett ;   et al. | 2002-01-10 |
Reflectance method for evaluating the surface characteristics of opaque materials App 20020003622 - Thakur, Randhir P.S. ;   et al. | 2002-01-10 |
Integrated Circuitry App 20020003282 - ROLFSON, J. BRETT ;   et al. | 2002-01-10 |
Methods Of Forming Resistors App 20010046734 - ROLFSON, J. BRETT ;   et al. | 2001-11-29 |
Semiconductor Processing Methods Of Forming Photoresist Over Silicon Nitride Materials App 20010044218 - MOORE, JOHN T. ;   et al. | 2001-11-22 |
Method And Apparatus For Controlling Rate Of Pressure Change In A Vacuum Process Chamber App 20010039921 - ROLFSON, J. BRETT ;   et al. | 2001-11-15 |
Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride App 20010023051 - Rolfson, J. Brett ;   et al. | 2001-09-20 |
Semiconductor processing apparatuses, and methods of forming antireflective coating materials over substrates App 20010019899 - Rolfson, J. Brett ;   et al. | 2001-09-06 |
Reflectance method for evaluating the surface characteristics of opaque materials App 20010017698 - Thakur, Randhir P.S. ;   et al. | 2001-08-30 |
Mask, and method and apparatus for making it App 20010013501 - Rolfson, J. Brett | 2001-08-16 |
Method for removing contaminants from a semiconductor wafer App 20010009814 - Rolfson, J. Brett | 2001-07-26 |
Reflectance method for evaluating the surface characteristics of opaque materials App 20010008448 - Thakur, Randhir P.S. ;   et al. | 2001-07-19 |
System for fabricating lithographic stencil masks Grant 6,261,427 - Rolfson July 17, 2 | 2001-07-17 |
Method for removing contaminants from a semiconductor wafer Grant 6,255,228 - Rolfson July 3, 2 | 2001-07-03 |
Etch stop use in etching of silicon oxide App 20010003679 - Cathey, David A. ;   et al. | 2001-06-14 |
Process for forming features on a semiconductor wafer using a phase shifting mask that can be used with two different wavelengths of light App 20010001693 - Pierrat, Christophe ;   et al. | 2001-05-24 |
Semiconductive material stencil mask, methods of manufacturing stencil masks from semiconductive material, and methods for maintaining dimensions of openings in semiconductive materials stencil masks App 20010001694 - Rolfson, J. Brett | 2001-05-24 |
Integrated capacitor bottom electrode for use with conformal dielectric App 20010001257 - Sandhu, Gurtej S. ;   et al. | 2001-05-17 |
Etch stop for use in etching of silicon oxide Grant 6,232,218 - Cathey , et al. May 15, 2 | 2001-05-15 |
Integrated capacitor bottom electrode for use with conformal dielectric Grant 6,211,033 - Sandhu , et al. April 3, 2 | 2001-04-03 |
Method of forming a phase shifting reticle Grant 6,183,915 - Rolfson February 6, 2 | 2001-02-06 |
Method of patterning substrates using multilayer resist processing Grant 6,136,511 - Reinberg , et al. October 24, 2 | 2000-10-24 |
Method for removing contaminants from a semiconductor wafer Grant 6,114,254 - Rolfson September 5, 2 | 2000-09-05 |
Apparatus and system for fabricating lithographic stencil masks Grant 6,110,331 - Rolfson August 29, 2 | 2000-08-29 |
Field isolation structure formed using ozone oxidation and tapering Grant 6,072,226 - Thakur , et al. June 6, 2 | 2000-06-06 |
Method for CMOS well drive in a non-inert ambient Grant 6,004,868 - Rolfson , et al. December 21, 1 | 1999-12-21 |
Method for reducing gaseous species of contamination in wet processes Grant 6,001,189 - Rolfson December 14, 1 | 1999-12-14 |
Method for fabricating lithographic stencil masks Grant 5,968,336 - Rolfson October 19, 1 | 1999-10-19 |
Low temperature sub-atmospheric ozone oxidation process for making thin gate oxides Grant 5,946,588 - Ahmad , et al. August 31, 1 | 1999-08-31 |
Phase shifting mask and process for forming comprising a phase shift layer for shifting two wavelengths of light Grant 5,876,878 - Pierrat , et al. March 2, 1 | 1999-03-02 |
Insulative barrier useful in field emission displays for reducing surface leakage Grant 5,831,378 - Rolfson , et al. November 3, 1 | 1998-11-03 |
Ultraviolet light reflectance method for evaluating the surface characteristics of opaque materials Grant 5,825,498 - Thakur , et al. October 20, 1 | 1998-10-20 |
Method of forming opaque border on semiconductor photomask Grant 5,804,336 - Rolfson September 8, 1 | 1998-09-08 |
Method for depositing doped amorphous or polycrystalline silicon on a substrate Grant 5,789,030 - Rolfson August 4, 1 | 1998-08-04 |
Atom lithographic mask having diffraction grating aligned with primary mask pattern Grant 5,786,116 - Rolfson July 28, 1 | 1998-07-28 |
Method for depositing polysilicon with discontinuous grain boundaries Grant 5,786,027 - Rolfson July 28, 1 | 1998-07-28 |
Method of phase shift lithography Grant 5,766,829 - Cathey, Jr. , et al. June 16, 1 | 1998-06-16 |
Integrated capacitor bottom electrode for use with conformal dielectric Grant 5,754,390 - Sandhu , et al. May 19, 1 | 1998-05-19 |
Method and apparatus for removing photoresist using UV and ozone/oxygen mixture Grant 5,709,754 - Morinville , et al. January 20, 1 | 1998-01-20 |
Method and apparatus for facilitating removal of material from the backside of wafers via a plasma etch Grant 5,707,485 - Rolfson , et al. January 13, 1 | 1998-01-13 |
Method of phase shift mask fabrication comprising a tapered edge and phase conflict resolution Grant 5,672,450 - Rolfson September 30, 1 | 1997-09-30 |
Method for forming an improved field isolation structure using ozone enhanced oxidation and tapering Grant 5,672,539 - Thakur , et al. September 30, 1 | 1997-09-30 |
Method of lithography using reticle pattern blinders Grant 5,667,918 - Brainerd , et al. September 16, 1 | 1997-09-16 |
Method to form self-aligned gate structures and focus rings Grant 5,653,619 - Cloud , et al. August 5, 1 | 1997-08-05 |
Phase shifting mask Grant 5,576,126 - Rolfson November 19, 1 | 1996-11-19 |
Method of making substractive rim phase shifting masks Grant 5,495,959 - Rolfson March 5, 1 | 1996-03-05 |
Method of chromeless phase shift mask fabrication suitable for auto-cad layout Grant 5,487,962 - Rolfson January 30, 1 | 1996-01-30 |
Method of making masks for phase shifting lithography to avoid phase conflicts Grant 5,468,578 - Rolfson November 21, 1 | 1995-11-21 |
Field emission structures produced on macro-grain polysilicon substrates Grant 5,438,240 - Cathey , et al. * August 1, 1 | 1995-08-01 |
Process for selectively etching integrated circuit devices having deep trenches or troughs or elevated features with re-entrant profiles Grant 5,403,435 - Cathey , et al. April 4, 1 | 1995-04-04 |
Method for formation of a trench accessible cold-cathode field emission device Grant 5,374,868 - Tjaden , et al. December 20, 1 | 1994-12-20 |
Removable bandpass filter for microlithographic aligners Grant 5,372,901 - Rolfson , et al. December 13, 1 | 1994-12-13 |
Field emission structures produced on macro-grain polysilicon substrates Grant 5,329,207 - Cathey , et al. July 12, 1 | 1994-07-12 |
Method of selectively etching silicon dioxide dielectric layers on semiconductor wafers Grant 5,300,463 - Cathey , et al. April 5, 1 | 1994-04-05 |
Method to form self-aligned gate structures and focus rings Grant 5,259,799 - Doan , et al. * November 9, 1 | 1993-11-09 |
Method of fabricating a chromeless phase shift reticle Grant 5,240,796 - Lee , et al. * August 31, 1 | 1993-08-31 |
Spacers for field emission display fabricated via self-aligned high energy ablation Grant 5,232,549 - Cathey , et al. August 3, 1 | 1993-08-03 |
Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology Grant 5,229,331 - Doan , et al. July 20, 1 | 1993-07-20 |
Process for etching a semiconductor device using an improved protective etching mask Grant 5,223,083 - Cathey , et al. June 29, 1 | 1993-06-29 |
Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology Grant 5,205,770 - Lowrey , et al. April 27, 1 | 1993-04-27 |
Method of fabricating phase shift reticles including chemically mechanically planarizing Grant 5,194,344 - Cathey, Jr. , et al. March 16, 1 | 1993-03-16 |
Method of fabricating phase shifting reticles with an accurate phase shift layer Grant 5,194,346 - Rolfson , et al. March 16, 1 | 1993-03-16 |
Method to form self-aligned gate structures and focus rings Grant 5,186,670 - Doan , et al. February 16, 1 | 1993-02-16 |