Rogalsky; Olaf
Patent Applications and Registrations
Patent applications and USPTO patent grants for Rogalsky; Olaf.The latest application filed is for "process for cleaning optical elements for the ultraviolet wavelength range".
- Rogalsky; Olaf - Ulm DE
- Rogalsky; Olaf - Oberkochen DE
| Patent | Date |
|---|---|
| Process for cleaning optical elements for the ultraviolet wavelength range Grant 11,256,182 - Forcht , et al. February 22, 2 | 2022-02-22 |
| Imaging optical system for microlithography Grant 10,754,132 - Rogalsky , et al. A | 2020-08-25 |
| Process For Cleaning Optical Elements For The Ultraviolet Wavelength Range App 20200064748 - FORCHT; Konstantin ; et al. | 2020-02-27 |
| Lithographic Projection Objective App 20190025709 - Rogalsky; Olaf ; et al. | 2019-01-24 |
| Lithographic projection objective Grant 10,042,265 - Rogalsky , et al. August 7, 2 | 2018-08-07 |
| Lithographic Projection Objective App 20170031247 - Rogalsky; Olaf ; et al. | 2017-02-02 |
| Lithographic projection objective Grant 9,494,868 - Rogalsky , et al. November 15, 2 | 2016-11-15 |
| Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2 | 2015-10-20 |
| Lithographic Projection Objective App 20140078482 - Rogalsky; Olaf ; et al. | 2014-03-20 |
| Lithographic projection objective Grant 8,605,253 - Rogalsky , et al. December 10, 2 | 2013-12-10 |
| Imaging Optical System for Microlithography App 20130188246 - Rogalsky; Olaf ; et al. | 2013-07-25 |
| Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ; et al. | 2013-03-21 |
| Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2 | 2012-11-27 |
| Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ; et al. | 2010-10-21 |
| Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2 | 2010-08-24 |
| Lithographic Projection Objective App 20090153829 - Rogalsky; Olaf ; et al. | 2009-06-18 |
| Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ; et al. | 2008-05-08 |
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