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Patent applications and USPTO patent grants for Rodrigues; Silverst.The latest application filed is for "modular microwave source with multiple metal housings".
Patent | Date |
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Modular Microwave Source With Multiple Metal Housings App 20210391149 - Kraus; Philip Allan ;   et al. | 2021-12-16 |
Monolithic Modular Microwave Source With Integrated Temperature Control App 20210100076 - Carducci; James ;   et al. | 2021-04-01 |
Monolithic Modular Microwave Source With Integrated Process Gas Distribution App 20210098231 - Carducci; James ;   et al. | 2021-04-01 |
Apparatus for controlling temperature uniformity of a showerhead Grant 10,780,447 - Fovell , et al. Sept | 2020-09-22 |
Apparatus For Controlling Temperature Uniformity Of A Showerhead App 20170304849 - Fovell; Richard ;   et al. | 2017-10-26 |
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