Roderick; Craig A

Patent Applications and Registrations

Patent applications and USPTO patent grants for Roderick; Craig A.The latest application filed is for "inductively coupled rf plasma reactor and plasma chamber enclosure structure therefor".

Company Profile

0.24.5

Roderick; Craig A - San Jose CA
Roderick, Craig A. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma reactor having RF power applicator and a dual-purpose window Grant 6,790,311 - Collins , et al. September 14, 2	2004-09-14
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor App 20040163764 - Collins, Kenneth S. ; et al.	2004-08-26
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor Grant 6,736,931 - Collins , et al. May 18, 2	2004-05-18
Plasma reactor using inductive RF coupling, and processes Grant 6,545,420 - Collins , et al. April 8, 2	2003-04-08
Plasma reactor using inductive RF coupling, and processes Grant 6,518,195 - Collins , et al. February 11, 2	2003-02-11
Magnetic confinement in a plasma reactor having an RF bias electrode Grant 6,488,807 - Collins , et al. December 3, 2	2002-12-03
Inductively coupled RF plasma reactor having an antenna adjacent a window electrode Grant 6,444,085 - Collins , et al. September 3, 2	2002-09-03
Plasma reactor having RF power applicator and a dual-purpose window App 20020096259 - Collins, Kenneth S. ; et al.	2002-07-25
Plasma reactor having a dual mode RF power application Grant 6,365,063 - Collins , et al. April 2, 2	2002-04-02
Plasma system with a balanced source Grant 6,353,206 - Roderick March 5, 2	2002-03-05
Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor App 20020020499 - Collins, Kenneth S. ; et al.	2002-02-21
Processes Used In An Inductively Coupled Plasma Reactor App 20020004309 - COLLINS, KENNETH S. ; et al.	2002-01-10
Thermal Control Apparatus For Inductively Coupled Rf Plasma Reactor Having An Overhead Solenoidal Antenna App 20010054483 - COLLINS, KENNETH S. ; et al.	2001-12-27
Plasma etch processes Grant 6,251,792 - Collins , et al. June 26, 2	2001-06-26
Plasma chamber support having an electrically coupled collar ring Grant 6,074,488 - Roderick , et al. June 13, 2	2000-06-13
Process used in an RF coupled plasma reactor Grant 6,068,784 - Collins , et al. May 30, 2	2000-05-30
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,036,877 - Collins , et al. March 14, 2	2000-03-14
Electrostatic chuck usable in high density plasma Grant 5,583,737 - Collins , et al. December 10, 1	1996-12-10
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,574,410 - Collins , et al. November 12, 1	1996-11-12
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,572,170 - Collins , et al. November 5, 1	1996-11-05
Silicon scavenger in an inductively coupled RF plasma reactor Grant 5,556,501 - Collins , et al. September 17, 1	1996-09-17
Electrostatic chuck usable in high density plasma Grant 5,539,609 - Collins , et al. July 23, 1	1996-07-23
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Grant 5,392,018 - Collins , et al. February 21, 1	1995-02-21
Electrostatic chuck for high power plasma processing Grant 5,350,479 - Collins , et al. September 27, 1	1994-09-27
Variable RF power splitter Grant 5,349,313 - Collins , et al. September 20, 1	1994-09-20
UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers Grant 5,300,460 - Collins , et al. April 5, 1	1994-04-05
VHF/UHF reactor system Grant 5,210,466 - Collins , et al. May 11, 1	1993-05-11
Electronically tuned matching network using predictor-corrector control system Grant 5,187,454 - Collins , et al. February 16, 1	1993-02-16
Electronically tuned VHF/UHF matching network Grant 5,065,118 - Collins , et al. November 12, 1	1991-11-12

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