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Substrate holder and method of manufacturing a substrate holder Grant 11,376,663 - Lafarre , et al. July 5, 2 | 2022-07-05 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20220152703 - Lafarre; Raymond Wilhelmus Louis ;   et al. | 2022-05-19 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 11,235,388 - Lafarre , et al. February 1, 2 | 2022-02-01 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20210114101 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2021-04-22 |
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20210107061 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2021-04-15 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,898,955 - Lafarre , et al. January 26, 2 | 2021-01-26 |
Substrate holder and method of manufacturing a substrate holder Grant 10,875,096 - Lafarre , et al. December 29, 2 | 2020-12-29 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20190224755 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2019-07-25 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,245,641 - Lafarre , et al. | 2019-04-02 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,126,663 - Lafarre , et al. November 13, 2 | 2018-11-13 |
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Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20180081284 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2018-03-22 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,829,803 - Louis Lafarre , et al. November 28, 2 | 2017-11-28 |
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20170312826 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2017-11-02 |
Substrate holder and method of manufacturing a substrate holder Grant 9,737,934 - Lafarre , et al. August 22, 2 | 2017-08-22 |
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20170036272 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2017-02-09 |
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20160377994 - LAFARRE; Raymond Wilhelmus Louis ;   et al. | 2016-12-29 |
Substrate holder and method of manufacturing a substrate holder Grant 9,507,274 - Lafarre , et al. November 29, 2 | 2016-11-29 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,442,395 - Lafarre , et al. September 13, 2 | 2016-09-13 |
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