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Ground path systems for providing a shorter and symmetrical ground path
Grant 11,434,569 - Nguyen , et al. September 6, 2 | 2022-09-06 |
On stack overlay improvement for 3D NAND
Grant 11,276,569 - Lin , et al. March 15, 2 | 2022-03-15 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 11,136,665 - Bois , et al. October 5, 2 | 2021-10-05 |
Precursor delivery system and methods related thereto
Grant 11,009,455 - Huang , et al. May 18, 2 | 2021-05-18 |
Methods and Apparatus for Controlling RF Parameters at Multiple Frequencies
App 20210059037 - Ye; Zheng John ; et al. | 2021-02-25 |
Baffle Implementation For Improving Bottom Purge Gas Flow Uniformity
App 20200388470 - PATHAK; Nitin ; et al. | 2020-12-10 |
Semiconductor process equipment
Grant 10,734,265 - Janakiraman , et al. | 2020-08-04 |
Substrate Supports Including Metal-ceramic Interfaces
App 20200173017 - RAMALINGAM; Chidambara A. ; et al. | 2020-06-04 |
Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same
Grant 10,663,491 - Ye , et al. | 2020-05-26 |
Coating Material For Processing Chambers
App 20200058539 - RATHI; Sudha ; et al. | 2020-02-20 |
On Stack Overlay Improvement For 3d Nand
App 20200043723 - LIN; Yongjing ; et al. | 2020-02-06 |
Precursor Delivery System And Methods Related Thereto
App 20200041407 - HUANG; Zubin ; et al. | 2020-02-06 |
Semiconductor Processing Apparatus For High Rf Power Process
App 20200013586 - MA; Jun ; et al. | 2020-01-09 |
Apparatus For Suppressing Parasitic Plasma In Plasma Enhanced Chemical Vapor Deposition Chamber
App 20190378696 - ADDEPALLI; Sai Susmita ; et al. | 2019-12-12 |
Ground Path Systems For Providing A Shorter And Symmetrical Ground Path
App 20190360100 - NGUYEN; Tuan Anh ; et al. | 2019-11-28 |
Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process
Grant 10,438,860 - Bansal , et al. O | 2019-10-08 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20190153592 - BOIS; Dale Du ; et al. | 2019-05-23 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 10,227,695 - Du Bois , et al. | 2019-03-12 |
Semiconductor Process Equipment
App 20180308735 - JANAKIRAMAN; Karthik ; et al. | 2018-10-25 |
Semiconductor process equipment
Grant 10,056,279 - Janakiraman , et al. August 21, 2 | 2018-08-21 |
Voltage-current Probe For Measuring Radio-frequency Electrical Power In A High-temperature Environment And Method Of Calibrating The Same
App 20180231587 - YE; Zheng John ; et al. | 2018-08-16 |
Semiconductor Process Equipment
App 20160218029 - JANAKIRAMAN; Karthik ; et al. | 2016-07-28 |
Microwave excursion detection for semiconductor processing
Grant 8,841,629 - Hendrickson , et al. September 23, 2 | 2014-09-23 |
Microwave Excursion Detection For Semiconductor Processing
App 20140000515 - HENDRICKSON; SCOTT A. ; et al. | 2014-01-02 |
Ultraviolet reflector with coolant gas holes and method
Grant 8,338,809 - Yang , et al. December 25, 2 | 2012-12-25 |
Ultraviolet Reflector With Coolant Gas Holes And Method
App 20110248183 - Yang; Yao-Hung ; et al. | 2011-10-13 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20110159211 - Du Bois; Dale R. ; et al. | 2011-06-30 |
Ultraviolet reflector with coolant gas holes and method
Grant 7,964,858 - Yang , et al. June 21, 2 | 2011-06-21 |
Ultraviolet Reflector With Coolant Gas Holes And Method
App 20100096564 - Yang; Yao-Hung ; et al. | 2010-04-22 |
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