Robles; Stuardo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Robles; Stuardo.The latest application filed is for "apparatus for improving film stability of halogen-doped silicon oxide films".

Company Profile

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Robles; Stuardo - Sunnyvale CA
Robles; Stuardo - Cupertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for improving film stability of halogen-doped silicon oxide films Grant 6,374,770 - Lee , et al. April 23, 2	2002-04-23
Method for forming low compressive stress fluorinated ozone/TEOS oxide film Grant 6,121,164 - Yieh , et al. September 19, 2	2000-09-19
Method and apparatus for improving film stability of halogen-doped silicon oxide films Grant 6,103,601 - Lee , et al. August 15, 2	2000-08-15
Method and apparatus for controlling the deposition of a fluorinated carbon film Grant 6,035,803 - Robles , et al. March 14, 2	2000-03-14
Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films Grant 6,009,827 - Robles , et al. January 4, 2	2000-01-04
Method and apparatus for forming a thin polymer layer on an integrated circuit structure Grant 5,958,510 - Sivaramakrishnam , et al. September 28, 1	1999-09-28
Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films Grant 5,814,377 - Robles , et al. September 29, 1	1998-09-29
Method and apparatus for depositing a multilayered low dielectric constant film Grant 5,804,259 - Robles September 8, 1	1998-09-08
Chemical vapor deposition reactor system and integrated circuit Grant 5,648,175 - Russell , et al. July 15, 1	1997-07-15

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