Robertson, Robert McCormick

Patent Applications and Registrations

Patent applications and USPTO patent grants for Robertson, Robert McCormick.The latest application filed is for "method and apparatus for electrostatically maintaining substrate flatness".

Company Profile

0.5.3

Robertson, Robert McCormick - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for electrostatically maintaining substrate flatness App 20050272273 - Shang, Quanyuan ; et al.	2005-12-08
Method and apparatus for electrostatically maintaining substrate flatness Grant 6,902,682 - Shang , et al. June 7, 2	2005-06-07
Method of annealing large area glass substrates Grant 6,610,374 - Tsai , et al. August 26, 2	2003-08-26
Method and apparatus for electrostatically maintaining substrate flatness App 20030070616 - Shang, Quanyuan ; et al.	2003-04-17
Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology Grant 6,468,601 - Shang , et al. October 22, 2	2002-10-22
Method of annealing large area glass substrates App 20020018862 - Tsai, Chuang-Chuang ; et al.	2002-02-14
Annealing an amorphous film using microwave energy Grant 6,172,322 - Shang , et al. January 9, 2	2001-01-09
Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology Grant 6,055,927 - Shang , et al. May 2, 2	2000-05-02

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