Roberts; Rick J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Roberts; Rick J..The latest application filed is for "cluster tool architecture for processing a substrate".

Company Profile

0.18.24

Roberts; Rick J. - San Jose CA US
Roberts; Rick J. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cluster tool architecture for processing a substrate Grant 8,550,031 - Ishikawa , et al. October 8, 2	2013-10-08
Cluster Tool Architecture For Processing A Substrate App 20120320361 - Ishikawa; Tetsuya ; et al.	2012-12-20
Cluster Tool Architecture For Processing A Substrate App 20120180983 - ISHIKAWA; TETSUYA ; et al.	2012-07-19
Cluster tool architecture for processing a substrate Grant 8,215,262 - Ishikawa , et al. July 10, 2	2012-07-10
Cluster tool architecture for processing a substrate Grant 8,181,596 - Ishikawa , et al. May 22, 2	2012-05-22
Cluster tool architecture for processing a substrate Grant 8,146,530 - Ishikawa , et al. April 3, 2	2012-04-03
Cluster tool architecture for processing a substrate Grant 7,925,377 - Ishikawa , et al. April 12, 2	2011-04-12
Cluster tool architecture for processing a substrate Grant 7,743,728 - Ishikawa , et al. June 29, 2	2010-06-29
Cluster tool architecture for processing a substrate Grant 7,694,647 - Ishikawa , et al. April 13, 2	2010-04-13
Cluster Tool Architecture For Processing A Substrate App 20090067956 - Ishikawa; Tetsuya ; et al.	2009-03-12
Cluster Tool Architecture For Processing A Substrate App 20090064928 - Ishikawa; Tetsuya ; et al.	2009-03-12
Cluster Tool Architecture For Processing A Substrate App 20090064929 - Ishikawa; Tetsuya ; et al.	2009-03-12
Apparatus and method for heating substrates Grant 7,431,585 - Zhao , et al. October 7, 2	2008-10-07
Cluster Tool Architecture For Processing A Substrate App 20080223293 - Ishikawa; Tetsuya ; et al.	2008-09-18
Cluster Tool Architecture For Processing A Substrate App 20080199282 - Ishikawa; Tetsuya ; et al.	2008-08-21
Apparatus and method for heating substrates Grant 7,381,052 - Zhao , et al. June 3, 2	2008-06-03
Cluster tool architecture for processing a substrate Grant 7,357,842 - Ishikawa , et al. April 15, 2	2008-04-15
Methods And Apparatus For E-beam Treatment Used To Fabricate Integrated Circuit Devices App 20070275569 - MOGHADAM; FARHAD ; et al.	2007-11-29
Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices Grant 7,256,139 - Moghadam , et al. August 14, 2	2007-08-14
Ion Implanted Insulator Material With Reduced Dielectric Constant App 20070042580 - Al-Bayati; Amir ; et al.	2007-02-22
Method for ion implanting insulator material to reduce dielectric constant Grant 7,166,524 - Al-Bayati , et al. January 23, 2	2007-01-23
Cluster Tool Architecture For Processing A Substrate App 20060286300 - Ishikawa; Tetsuya ; et al.	2006-12-21
Cluster Tool Architecture For Processing A Substrate App 20060278165 - Ishikawa; Tetsuya ; et al.	2006-12-14
Apparatus and method for heating substrates App 20060223233 - Zhao; Jun ; et al.	2006-10-05
Cluster tool architecture for processing a substrate App 20060134330 - Ishikawa; Tetsuya ; et al.	2006-06-22
Cluster tool architecture for processing a substrate App 20060130750 - Ishikawa; Tetsuya ; et al.	2006-06-22
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques Grant 6,992,024 - Cui , et al. January 31, 2	2006-01-31
Method for ion implanting insulator material to reduce dielectric constant App 20050191828 - Al-Bayati, Amir ; et al.	2005-09-01
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices Grant 6,936,551 - Moghadam , et al. August 30, 2	2005-08-30
Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices App 20050130404 - Moghadam, Farhad ; et al.	2005-06-16
Anti-stratification-solution delivery system for spin-on dielectrics Grant 6,895,776 - Zhao , et al. May 24, 2	2005-05-24
Multistep cure technique for spin-on-glass films Grant 6,878,644 - Cui , et al. April 12, 2	2005-04-12
Anti-stratification-solution Delivery System For Spin-on Dielectrics App 20050005629 - Zhao, Jun ; et al.	2005-01-13
Electron beam treatment of SixNy films App 20040266123 - Cui, Zhenjiang ; et al.	2004-12-30
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques App 20040224496 - Cui, Zhenjiang ; et al.	2004-11-11
Multistep cure technique for spin-on-glass films App 20040224479 - Cui, Zhenjiang ; et al.	2004-11-11
Cluster tool for E-beam treated films App 20040069410 - Moghadam, Farhad ; et al.	2004-04-15
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques Grant 6,693,050 - Cui , et al. February 17, 2	2004-02-17
Process and an integrated tool for low k dielectric deposition including a pecvd capping module App 20040020601 - Zhao, Jun ; et al.	2004-02-05
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices App 20030232495 - Moghadam, Farhad ; et al.	2003-12-18
Apparatus and method for heating substrates App 20030138560 - Zhao, Jun ; et al.	2003-07-24

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