ROBERTS; Michael Philip

Patent Applications and Registrations

Patent applications and USPTO patent grants for ROBERTS; Michael Philip.The latest application filed is for "use of vacuum during transfer of substrates".

Company Profile

3.1.12

ROBERTS; Michael Philip - Tigard OR
Roberts; Michael Philip - Thomasville PA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Use Of Vacuum During Transfer Of Substrates App 20220305601 - CHANDRASEKHARAN; Ramesh ; et al.	2022-09-29
Use Of Rotation To Correct For Azimuthal Non-uniformities In Semiconductor Substrate Processing App 20220243323 - CHANDRASEKHARAN; Ramesh ; et al.	2022-08-04
Temperature Control Of A Multi-zone Pedestal App 20220243332 - CHANDRASEKHARAN; Ramesh ; et al.	2022-08-04
Independently Adjustable Flowpath Conductance In Multi-station Semiconductor Processing App 20220228263 - Roberts; Michael Philip ; et al.	2022-07-21
Rapid Tuning Of Critical Dimension Non-uniformity By Modulating Temperature Transients Of Multi-zone Substrate Supports App 20220223440 - KUMAR; Ravi ; et al.	2022-07-14
Trim And Deposition Profile Control With Multi-zone Heated Substrate Support For Multi-patterning Processes App 20220205105 - CHANDRASEKHARAN; Ramesh ; et al.	2022-06-30
Pedestals For Modulating Film Properties In Atomic Layer Deposition (ald) Substrate Processing Chambers App 20220162749 - LAVOIE; Adrien ; et al.	2022-05-26
Multi zone substrate support for ALD film property correction and tunability Grant 11,236,422 - Roberts , et al. February 1, 2	2022-02-01
Electrostatic Chuck With Seal Surface App 20210013080 - Breiling; Patrick G. ; et al.	2021-01-14
Dual Gas Feed Showerhead for Deposition App 20200024739 - Roberts; Michael Philip ; et al.	2020-01-23
Multi Zone Pedestal For Ald Film Property Correction And Tunability App 20190153600 - Roberts; Michael Philip ; et al.	2019-05-23
Medical Aspiration Apparatus App 20140100531 - Ankrum; James Allen ; et al.	2014-04-10

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