Roberson, Jr.; Glenn A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Roberson, Jr.; Glenn A..The latest application filed is for "removal of cmp and post-cmp residue from semiconductors using supercritical carbon dioxide process".

Company Profile

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Roberson, Jr.; Glenn A. - Hollister CA
Roberson, Jr.; Glenn A. - Carmel CA
Roberson, Jr.; Glenn A. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process Grant 7,064,070 - Mullee , et al. June 20, 2	2006-06-20
Vibrating scoop basket Grant 7,044,520 - Roberson, Jr. , et al. May 16, 2	2006-05-16
Molecular contamination control system Grant 6,368,411 - Roberson, Jr. , et al. April 9, 2	2002-04-09
Removal of CMP residue from semiconductors using supercritical carbon dioxide process Grant 6,277,753 - Mullee , et al. August 21, 2	2001-08-21
Molecular contamination control system Grant 6,221,163 - Roberson, Jr. , et al. April 24, 2	2001-04-24
Docking and environmental purging system for integrated circuit wafer transport assemblies Grant 6,120,371 - Roberson, Jr. , et al. September 19, 2	2000-09-19
Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization Grant 6,096,185 - Corlett , et al. August 1, 2	2000-08-01
Molecular contamination control system Grant 6,042,651 - Roberson, Jr. , et al. March 28, 2	2000-03-28
Molecular contamination control system Grant 5,879,458 - Roberson, Jr. , et al. March 9, 1	1999-03-09
Docking and environmental purging system for integrated circuit wafer transport assemblies Grant 5,674,123 - Roberson, Jr. , et al. October 7, 1	1997-10-07
Process for precise volumetrio diluting/mixing of chemicals Grant 5,490,611 - Bernosky , et al. February 13, 1	1996-02-13
Process and apparatus for precise volumetric diluting/mixing of chemicals Grant 5,370,269 - Bernosky , et al. December 6, 1	1994-12-06
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol Grant 5,315,766 - Roberson, Jr. , et al. * May 31, 1	1994-05-31
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol Grant 5,115,576 - Roberson, Jr. , et al. May 26, 1	1992-05-26
Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol Grant 4,977,688 - Roberson, Jr. , et al. December 18, 1	1990-12-18
Processing apparatus for thin disc-like workpieces Grant 3,921,788 - Roberson, Jr. , et al. November 25, 1	1975-11-25

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