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Patent applications and USPTO patent grants for Robbins; Roger A..The latest application filed is for "micromechanical getter anchor".
Patent | Date |
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Method and apparatus for MEMS device nebulizer lubrication system Grant 7,264,179 - Robbins September 4, 2 | 2007-09-04 |
Micromechanical Getter Anchor App 20070177246 - Robbins; Roger A. ;   et al. | 2007-08-02 |
Micromechanical getter anchor App 20060138642 - Robbins; Roger A. ;   et al. | 2006-06-29 |
Anchor for device package Grant 6,992,375 - Robbins , et al. January 31, 2 | 2006-01-31 |
Method and apparatus for MEMS device nebulizer lubrication system App 20050178848 - Robbins, Roger A. | 2005-08-18 |
Method and apparatus for MEMS device nebulizer lubrication system Grant 6,921,680 - Robbins July 26, 2 | 2005-07-26 |
Method and apparatus for MEMS device nebulizer lubrication system App 20030129782 - Robbins, Roger A. | 2003-07-10 |
Micromechanical getter anchor App 20020063322 - Robbins, Roger A. ;   et al. | 2002-05-30 |
Surface treatment material deposition and recapture Grant 6,365,229 - Robbins April 2, 2 | 2002-04-02 |
Lubricant delivery for micromechanical devices Grant 6,300,294 - Robbins , et al. October 9, 2 | 2001-10-09 |
Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp Grant 5,474,614 - Robbins December 12, 1 | 1995-12-12 |
Method and apparatus for reducing etching erosion in a plasma containment tube Grant 5,423,942 - Robbins , et al. June 13, 1 | 1995-06-13 |
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