Patent | Date |
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Anode structure for a lithium metal battery Grant 11,309,540 - Brown , et al. April 19, 2 | 2022-04-19 |
Polymer Electrolyte Lamination Layer For Lithium Metal Battery App 20220093969 - Ma; Lin ;   et al. | 2022-03-24 |
Electrochemical Cell Design With Lithium Metal Anode App 20220093908 - Ritchie; Alan A. ;   et al. | 2022-03-24 |
Methods for reducing material overhang in a feature of a substrate Grant 11,162,170 - Ritchie , et al. November 2, 2 | 2021-11-02 |
Liquid Electrolyte For Lithium Metal Battery App 20210083326 - Ritchie; Alan A. ;   et al. | 2021-03-18 |
Liquid electrolyte for a lithium metal battery Grant 10,886,567 - Ritchie , et al. January 5, 2 | 2021-01-05 |
Corrosion resistant current collector for lithium metal anode Grant 10,847,834 - Brown , et al. November 24, 2 | 2020-11-24 |
Anode structure for a lithium metal battery Grant 10,741,835 - Brown , et al. A | 2020-08-11 |
Laminated Lithium Metal Anode With Protective Coatings App 20200194794 - Ritchie; Alan A. ;   et al. | 2020-06-18 |
Apparatus for gas injection in a physical vapor deposition chamber Grant 9,957,601 - Rasheed , et al. May 1, 2 | 2018-05-01 |
Methods And Apparatus For Stable Substrate Processing With Multiple Rf Power Supplies App 20170183768 - GE; ZHENBIN ;   et al. | 2017-06-29 |
Gas line weldment design and process for CVD aluminum Grant 9,593,417 - Lee , et al. March 14, 2 | 2017-03-14 |
Methods and apparatus for stable substrate processing with multiple RF power supplies Grant 9,593,410 - Ge , et al. March 14, 2 | 2017-03-14 |
Pinned target design for RF capacitive coupled plasma Grant 9,404,174 - Young , et al. August 2, 2 | 2016-08-02 |
Methods for processing a substrate using multiple substrate support positions Grant 9,315,891 - Lee , et al. April 19, 2 | 2016-04-19 |
Method and apparatus for measuring pressure in a physical vapor deposition chamber Grant 9,177,763 - Rasheed , et al. November 3, 2 | 2015-11-03 |
Methods For Reducing Material Overhang In A Feature Of A Substrate App 20150221486 - RITCHIE; ALAN A. ;   et al. | 2015-08-06 |
Uniformity tuning capable ESC grounding kit for RF PVD chamber Grant 9,087,679 - Rasheed , et al. July 21, 2 | 2015-07-21 |
Methods for processing a substrate using a selectively grounded and movable process kit ring Grant 8,865,012 - Ge , et al. October 21, 2 | 2014-10-21 |
Apparatus For Gas Injection In A Physical Vapor Deposition Chamber App 20140261177 - RASHEED; MUHAMMAD ;   et al. | 2014-09-18 |
Method And Apparatus For Measuring Pressure In A Physical Vapor Deposition Chamber App 20140260544 - RASHEED; MUHAMMAD ;   et al. | 2014-09-18 |
Methods For Processing A Substrate Using A Selectively Grounded And Movable Process Kit Ring App 20140273483 - GE; ZHENBIN ;   et al. | 2014-09-18 |
Methods For Processing A Substrate Using Multiple Substrate Support Positions App 20140263169 - LEE; JOUNG JOO ;   et al. | 2014-09-18 |
Methods And Apparatus For Stable Substrate Processing With Multiple Rf Power Supplies App 20140251788 - GE; Zhenbin ;   et al. | 2014-09-11 |
Rf Delivery System With Dual Matching Networks With Capacitive Tuning And Power Switching App 20140216922 - RITCHIE; ALAN A. | 2014-08-07 |
Gas Line Weldment Design And Process For Cvd Aluminum App 20140053776 - LEE; Wei Ti ;   et al. | 2014-02-27 |
Gas line weldment design and process for CVD aluminum Grant 8,535,443 - Lee , et al. September 17, 2 | 2013-09-17 |
Pinned Target Design For Rf Capacitive Coupled Plasma App 20130186751 - YOUNG; DONNY ;   et al. | 2013-07-25 |
Uniformity Tuning Capable Esc Grounding Kit For Rf Pvd Chamber App 20120211354 - Rasheed; Muhammad M. ;   et al. | 2012-08-23 |
Unique passivation technique for a CVD blocker plate to prevent particle formation Grant 7,857,947 - Ritchie , et al. December 28, 2 | 2010-12-28 |
Deposition processes for titanium nitride barrier and aluminum Grant 7,824,743 - Lee , et al. November 2, 2 | 2010-11-02 |
Deposition Processes For Titanium Nitride Barrier And Aluminum App 20090087585 - LEE; WEI TI ;   et al. | 2009-04-02 |
Radiation shield for cryogenic pump for high temperature physical vapor deposition Grant 7,389,645 - Ritchie June 24, 2 | 2008-06-24 |
Radiation shield for cryogenic pump for high temperature physical vapor deposition App 20070101733 - Ritchie; Alan A. | 2007-05-10 |
Unique Passivation Technique For A Cvd Blocker Plate To Prevent Particle Formation App 20070022952 - Ritchie; Alan A. ;   et al. | 2007-02-01 |
Gas Line Weldment Design And Process For Cvd Aluminum App 20070023144 - Lee; Wei Ti ;   et al. | 2007-02-01 |