Rief; Klaus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Rief; Klaus.The latest application filed is for "method for moving an optical element of a projection exposure apparatus for microlithography".
- Rief; Klaus - Aalen-Oberalfingen N/A DE
- Rief; Klaus - Aalen DE
| Patent | Date |
|---|---|
| Damping device Grant 9,513,452 - Vogler , et al. December 6, 2 | 2016-12-06 |
| Method for moving an optical element of a projection exposure apparatus for microlithography Grant 8,879,046 - Aubele , et al. November 4, 2 | 2014-11-04 |
| Method For Moving An Optical Element Of A Projection Exposure Apparatus For Microlithography App 20140078487 - Aubele; Karl-Eugen ; et al. | 2014-03-20 |
| Imaging device in a projection exposure facility Grant 8,514,371 - Hummel , et al. August 20, 2 | 2013-08-20 |
| Optical Devices Having Kinematic Components App 20130038848 - Weber; Jochen ; et al. | 2013-02-14 |
| Projection objective for semiconductor lithography Grant 8,199,315 - Rief June 12, 2 | 2012-06-12 |
| Damping Device App 20120138401 - Vogler; Alexander ; et al. | 2012-06-07 |
| Imaging Device In A Projection Exposure Facility App 20110199597 - Hummel; Wolfgang ; et al. | 2011-08-18 |
| Imaging device in a projection exposure facility Grant 7,961,294 - Hummel , et al. June 14, 2 | 2011-06-14 |
| Projection Objective For A Microlithography Apparatus And Method App 20100128367 - Beckenbach; Mariella ; et al. | 2010-05-27 |
| Imaging device in a projection exposure machine Grant 7,710,542 - Hummel , et al. May 4, 2 | 2010-05-04 |
| Holding device for an optical element with support force equalization Grant 7,609,464 - Rief , et al. October 27, 2 | 2009-10-27 |
| Imaging Device in a Projection Exposure Machine App 20090141258 - Back; Stephan ; et al. | 2009-06-04 |
| Imaging Device In A Projection Exposure Facility App 20090040487 - Hummel; Wolfgang ; et al. | 2009-02-12 |
| Imaging device in a projection exposure machine Grant 7,486,382 - Back , et al. February 3, 2 | 2009-02-03 |
| Projection Objective For Semiconductor Lithography App 20080285002 - Rief; Klaus | 2008-11-20 |
| Imaging Device In A Projection Exposure Machine App 20080174757 - Hummel; Wolfgang ; et al. | 2008-07-24 |
| Optical Devices Having Kinemtaic Components App 20080117397 - Weber; Jochen ; et al. | 2008-05-22 |
| Holding Device For An Optical Element With Support Force Equalization App 20080043349 - Rief; Klaus ; et al. | 2008-02-21 |
| Imaging device in a projection exposure facility Grant 7,304,717 - Hummel , et al. December 4, 2 | 2007-12-04 |
| Imaging device in a projection exposure machine App 20060164619 - Back; Stephan ; et al. | 2006-07-27 |
| Imaging device in a projection exposure facility App 20040263812 - Hummel, Wolfgang ; et al. | 2004-12-30 |
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