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Monoalkoxysilanes And Dense Organosilica Films Made Therefrom
App 20220301862 - XIAO; MANCHAO ; et al. | 2022-09-22 |
Silicon Compounds And Methods For Depositing Films Using Same
App 20220293417 - VRTIS; RAYMOND NICHOLAS ; et al. | 2022-09-15 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20220157601 - Li; Jianheng ; et al. | 2022-05-19 |
Precursors and flowable CVD methods for making low-k films to fill surface features
Grant 11,270,880 - Li , et al. March 8, 2 | 2022-03-08 |
Silacyclic Compounds And Methods For Depositing Silicon-containing Films Using Same
App 20210339280 - Lei; Xinjian ; et al. | 2021-11-04 |
Use of silicon structure former with organic substituted hardening additive compounds for dense OSG films
Grant 11,164,739 - Vrtis , et al. November 2, 2 | 2021-11-02 |
Silacycloalkane compounds and methods for depositing silicon containing films using same
Grant 11,043,374 - Xiao , et al. June 22, 2 | 2021-06-22 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 11,017,998 - Li , et al. May 25, 2 | 2021-05-25 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20210043446 - Li; Jianheng ; et al. | 2021-02-11 |
Alkoxysilacyclic Or Acyloxysilacyclic Compounds And Methods For Depositing Films Using Same
App 20200354386 - Ridgeway; Robert Gordon ; et al. | 2020-11-12 |
1-Methyl-1-Iso-Propoxy-Silacycloalkanes And Dense Organosilica Films Made Therefrom
App 20200165727 - Entley; William Robert ; et al. | 2020-05-28 |
Silacycloalkane Compounds And Methods For Depositing Silicon Containing Films Using Same
App 20200075323 - Xiao; Manchao ; et al. | 2020-03-05 |
Precursors And Flowable CVD Methods For Making Low-K Films To Fill Surface Features
App 20200058496 - Li; Jianheng ; et al. | 2020-02-20 |
Silicon Compounds And Methods For Depositing Films Using Same
App 20200048286 - Xiao; Manchao ; et al. | 2020-02-13 |
Precursors and flowable CVD methods for making low-K films to fill surface features
Grant 10,468,244 - Li , et al. No | 2019-11-05 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190292658 - Li; Jianheng ; et al. | 2019-09-26 |
Alkyl-alkoxysilacyclic compounds
Grant 10,395,920 - Vrtis , et al. A | 2019-08-27 |
Use of Silicon Structure Former with Organic Substituted Hardening Additive Compounds for Dense OSG Films
App 20190244810 - Vrtis; Raymond Nicholas ; et al. | 2019-08-08 |
Method and precursors for manufacturing 3D devices
Grant 10,354,860 - Li , et al. July 16, 2 | 2019-07-16 |
Barrier materials for display devices
Grant 10,319,862 - Ridgeway , et al. | 2019-06-11 |
Silacyclic Compounds and Methods for Depositing Silicon-Containing Films Using Same
App 20190134663 - Lei; Xinjian ; et al. | 2019-05-09 |
Use of silyl bridged alkyl compounds for dense OSG films
Grant 10,249,489 - Vrtis , et al. | 2019-04-02 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20190055645 - Li; Jianheng ; et al. | 2019-02-21 |
Compositions and Methods Using Same for Deposition of Silicon-Containing Film
App 20190017167 - Vrtis; Raymond Nicholas ; et al. | 2019-01-17 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180315598 - Li; Jianheng ; et al. | 2018-11-01 |
Compositions and methods using same for deposition of silicon-containing film
Grant 10,106,890 - Li , et al. October 23, 2 | 2018-10-23 |
Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant Films
App 20180277360 - Li; Jianheng ; et al. | 2018-09-27 |
Alkyl-Alkoxysilacyclic Compounds And Methods For Depositing Films Using Same
App 20180233355 - Vrtis; Raymond Nicholas ; et al. | 2018-08-16 |
Use Of Silyl Bridged Alkyl Compounds For Dense Osg Films
App 20180122632 - Vrtis; Raymond Nicholas ; et al. | 2018-05-03 |
Alkyl-alkoxysilacyclic compounds
Grant 9,922,818 - Vrtis , et al. March 20, 2 | 2018-03-20 |
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
App 20180061636 - Li; Jianheng ; et al. | 2018-03-01 |
Process For Depositing Porous Organosilicate Glass Films For Use As Resistive Random Access Memory
App 20180047898 - RIDGEWAY; Robert Gordon ; et al. | 2018-02-15 |
Compositions And Methods Using Same For Deposition Of Silicon-containing Film
App 20170335449 - LI; Jianheng ; et al. | 2017-11-23 |
Method And Precursors For Manufacturing 3d Devices
App 20160225616 - Li; Jianheng ; et al. | 2016-08-04 |
Method And Composition For Providing Pore Sealing Layer On Porous Low Dielectric Constant Films
App 20160049293 - Li; Jianheng ; et al. | 2016-02-18 |
Alkyl-Alkoxysilacyclic Compounds and Methods for Depositing Films Using Same
App 20150364321 - Vrtis; Raymond Nicholas ; et al. | 2015-12-17 |
Antireflective coatings for photovoltaic applications
Grant 8,987,039 - Hurley , et al. March 24, 2 | 2015-03-24 |
Barrier Materials For Display Devices
App 20150021599 - Ridgeway; Robert Gordon ; et al. | 2015-01-22 |
Oxygen Containing Precursors for Photovoltaic Passivation
App 20130247971 - Haas; Mary Kathryn ; et al. | 2013-09-26 |
Additives to silane for thin film silicon photovoltaic devices
Grant 8,535,760 - Hurley , et al. September 17, 2 | 2013-09-17 |
Precursors for Photovoltaic Passivation
App 20130220410 - Haas; Mary Kathryn ; et al. | 2013-08-29 |
Additives to Silane for Thin Film Silicon Photovoltaic Devices
App 20110061733 - Hurley; Patrick Timothy ; et al. | 2011-03-17 |
Methods For In-situ Chamber Cleaning Process For High Volume Manufacture Of Semiconductor Materials
App 20100180913 - Arena; Chantal ; et al. | 2010-07-22 |
Method for removing carbon-containing residues from a substrate
Grant 7,581,549 - Johnson , et al. September 1, 2 | 2009-09-01 |
Antireflective Coatings For Photovoltaic Applications
App 20090095346 - Hurley; Patrick Timothy ; et al. | 2009-04-16 |
Thermal F2 etch process for cleaning CVD chambers
App 20080142046 - Johnson; Andrew David ; et al. | 2008-06-19 |
Method for removing carbon-containing residues from a substrate
App 20060027249 - Johnson; Andrew David ; et al. | 2006-02-09 |
Low temperature CVD chamber cleaning using dilute NF3
App 20050252529 - Ridgeway, Robert Gordon ; et al. | 2005-11-17 |
Negative ion atmospheric pressure ionization and selected ion mass spectrometry using a 63NI electron source
Grant 6,956,206 - Bandy , et al. October 18, 2 | 2005-10-18 |
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
Grant 6,686,594 - Ji , et al. February 3, 2 | 2004-02-03 |
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
App 20030098419 - Ji, Bing ; et al. | 2003-05-29 |
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