| Patent | Date |
|---|
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 11,087,998 - Rice , et al. August 10, 2 | 2021-08-10 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20210143034 - Rice; Michael Robert ; et al. | 2021-05-13 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 10,971,381 - Rice , et al. April 6, 2 | 2021-04-06 |
Semiconductor device manufacturing platform with single and twinned processing chambers
Grant 10,847,391 - Merry , et al. November 24, 2 | 2020-11-24 |
Electronic Device Manufacturing System
App 20200170117 - Rice; Michael Robert ; et al. | 2020-05-28 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20200126832 - Rice; Michael Robert ; et al. | 2020-04-23 |
Electronic device manufacturing system
Grant 10,595,415 - Rice , et al. | 2020-03-17 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 10,553,469 - Rice , et al. Fe | 2020-02-04 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20190214284 - Rice; Michael Robert ; et al. | 2019-07-11 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20190013216 - Merry; Nir ; et al. | 2019-01-10 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20180138068 - Rice; Michael Robert ; et al. | 2018-05-17 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 9,905,447 - Rice , et al. February 27, 2 | 2018-02-27 |
Mixed-platform Apparatus, Systems, And Methods For Substrate Processing
App 20170290166 - Rice; Michael Robert ; et al. | 2017-10-05 |
Electronic device manufacturing system
Grant 9,717,147 - Rice , et al. July 25, 2 | 2017-07-25 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20160225646 - RICE; Michael Robert ; et al. | 2016-08-04 |
Degassing apparatus adapted to process substrates in multiple tiers with second actuator
Grant 9,177,842 - Englhardt , et al. November 3, 2 | 2015-11-03 |
Linked vacuum processing tools and methods of using the same
Grant 9,147,592 - Englhardt , et al. September 29, 2 | 2015-09-29 |
Methods and apparatus for enhanced gas flow rate control
Grant 9,004,107 - Gregor , et al. April 14, 2 | 2015-04-14 |
Mixed-platform Apparatus, Systems, And Methods For Substrate Processing
App 20150082625 - Rice; Michael Robert ; et al. | 2015-03-26 |
Sealed Substrate Carriers And Systems And Methods For Transporting Substrates
App 20150016941 - Rice; Michael Robert ; et al. | 2015-01-15 |
Sealed substrate carriers and systems and methods for transporting substrates
Grant 8,870,512 - Rice , et al. October 28, 2 | 2014-10-28 |
Semiconductor Device Manufacturing Platform With Single And Twinned Processing Chambers
App 20140262035 - Merry; Nir ; et al. | 2014-09-18 |
Processing system with the dual end-effector handling
Grant 8,796,589 - Quiles , et al. August 5, 2 | 2014-08-05 |
Methods and Apparatus for Enhanced Gas Flow Rate Control
App 20140053912 - Gregor; Mariusch ; et al. | 2014-02-27 |
Linked Vacuum Processing Tools And Methods Of Using The Same
App 20140044503 - Englhardt; Eric A. ; et al. | 2014-02-13 |
Robot Systems, Apparatus, And Methods Adapted To Process Substrates In Multiple Tiers
App 20130039734 - Englhardt; Eric A. ; et al. | 2013-02-14 |
Methods and apparatus for repositioning support for a substrate carrier
Grant 7,914,248 - Elliott , et al. March 29, 2 | 2011-03-29 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,792,608 - Rice , et al. September 7, 2 | 2010-09-07 |
System for transporting substrate carriers
Grant 7,673,735 - Rice , et al. March 9, 2 | 2010-03-09 |
System for transporting substrate carriers
Grant 7,527,141 - Rice , et al. May 5, 2 | 2009-05-05 |
Sealed Substrate Carriers And Systems And Methods For Transporting
App 20090110518 - Rice; Michael Robert ; et al. | 2009-04-30 |
System for transporting substrate carriers
Grant 7,506,746 - Rice , et al. March 24, 2 | 2009-03-24 |
System For Transporting Substrate Carriers
App 20080289932 - Rice; Michael Robert ; et al. | 2008-11-27 |
Methods And Apparatus For Repositioning Support For A Substrate Carrier
App 20080286076 - Elliott; Martin R. ; et al. | 2008-11-20 |
Methods and apparatus for repositioning support for a substrate carrier
Grant 7,409,263 - Elliott , et al. August 5, 2 | 2008-08-05 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,359,767 - Rice , et al. April 15, 2 | 2008-04-15 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
Grant 7,346,431 - Rice , et al. March 18, 2 | 2008-03-18 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor
App 20070274813 - Rice; Michael Robert ; et al. | 2007-11-29 |
System For Transporting Substrate Carriers
App 20070235287 - Rice; Michael Robert ; et al. | 2007-10-11 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
Grant 7,258,520 - Elliott , et al. August 21, 2 | 2007-08-21 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
Grant 7,243,003 - Rice , et al. July 10, 2 | 2007-07-10 |
System for transporting substrate carriers
Grant 7,234,584 - Rice , et al. June 26, 2 | 2007-06-26 |
System For Transporting Substrate Carriers
App 20070059145 - Rice; Michael Robert ; et al. | 2007-03-15 |
Substrate Carrier Handler That Unloads Substrate Carriers Directly From A Moving Conveyor
App 20070061042 - Rice; Michael Robert ; et al. | 2007-03-15 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
App 20060259196 - Rice; Michael Robert ; et al. | 2006-11-16 |
Methods and apparatus for repositioning support for a substrate carrier
App 20060013674 - Elliott; Martin R. ; et al. | 2006-01-19 |
Processing system
App 20050072716 - Quiles, Efrain ; et al. | 2005-04-07 |
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
App 20040081538 - Rice, Michael Robert ; et al. | 2004-04-29 |
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
App 20040076496 - Elliott, Martin R. ; et al. | 2004-04-22 |
System for transporting substrate carriers
App 20040062633 - Rice, Michael Robert ; et al. | 2004-04-01 |
Compact and high throughput semiconductor fabrication system
App 20040018070 - Zhao, Jun ; et al. | 2004-01-29 |
Substrate transfer apparatus
App 20030202865 - Ponnekanti, Hari ; et al. | 2003-10-30 |
Robot for handling semiconductor wafers
Grant 6,582,175 - Cox , et al. June 24, 2 | 2003-06-24 |
Robot for handling semiconductor wafers
App 20030035709 - Cox, Damon ; et al. | 2003-02-20 |
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