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Increased Number Of Load Ports On Factory Interface With Robot That Moves On Track App 20220297320 - Reuter; Paul B. ;   et al. | 2022-09-22 |
Front-ducted Equipment Front End Modules, Side Storage Pods, And Methods Of Operating The Same App 20220293444 - Reuter; Paul B. ;   et al. | 2022-09-15 |
Shortened Load Port For Factory Interface App 20220285193 - Gopalakrishna; Srinivas Poshatrahalli ;   et al. | 2022-09-08 |
Systems, apparatus, and methods for an improved load port Grant 11,404,297 - Bonecutter , et al. August 2, 2 | 2022-08-02 |
Front-ducted equipment front end modules, side storage pods, and methods of operating the same Grant 11,373,891 - Reuter , et al. June 28, 2 | 2022-06-28 |
Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room Grant 11,353,381 - Holeyannavar , et al. June 7, 2 | 2022-06-07 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems App 20220084860 - Reuter; Paul B. ;   et al. | 2022-03-17 |
Systems, apparatus, and methods for an improved load port backplane Grant 11,276,594 - Reuter , et al. March 15, 2 | 2022-03-15 |
Systems And Methods For Integrating Load Locks Into A Factory Interface Footprint Space App 20220068677 - Newman; Jacob ;   et al. | 2022-03-03 |
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods Grant 11,244,844 - Reuter , et al. February 8, 2 | 2022-02-08 |
Prevention Of Contamination Of Substrates During Gas Purging App 20220010427 - Baumgarten; Douglas Brian ;   et al. | 2022-01-13 |
Batch Wafer Degas Chamber And Integration Into Factory Interface And Vacuum-based Mainframe App 20210398824 - Hruzek; Dean C. ;   et al. | 2021-12-23 |
Side storage pods, equipment front end modules, and methods for operating EFEMs Grant 11,189,511 - Reuter , et al. November 30, 2 | 2021-11-30 |
Abatement and strip process chamber in a dual loadlock configuration Grant 11,177,136 - Lee , et al. November 16, 2 | 2021-11-16 |
Abatement and strip process chamber in a dual load lock configuration Grant 11,171,008 - Lee , et al. November 9, 2 | 2021-11-09 |
Electronic device manufacturing load port apparatus, systems, and methods Grant 11,171,029 - Blahnik , et al. November 9, 2 | 2021-11-09 |
Load Port Operation In Electronic Device Manufacturing Apparatus, Systems, And Methods App 20210343564 - Reuter; Paul B | 2021-11-04 |
Load port operation in electronic device manufacturing apparatus, systems, and methods Grant 11,081,379 - Reuter August 3, 2 | 2021-08-03 |
Selectable-rate bottom purge apparatus and methods Grant 11,061,417 - Hruzek , et al. July 13, 2 | 2021-07-13 |
Abatement and strip process chamber in a load lock configuration Grant 10,943,788 - Salinas , et al. March 9, 2 | 2021-03-09 |
Systems, Apparatus, And Methods For An Improved Load Port App 20210057249 - Bonecutter; Luke W. ;   et al. | 2021-02-25 |
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200411350 - LEE; Jared Ahmad ;   et al. | 2020-12-31 |
Systems, apparatus, and methods for an improved load port Grant 10,832,928 - Bonecutter , et al. November 10, 2 | 2020-11-10 |
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods Grant 10,758,045 - Weiss , et al. Sep | 2020-09-01 |
Selectable-rate Bottom Purge Apparatus And Methods App 20200201363 - Hruzek; Dean C. ;   et al. | 2020-06-25 |
Systems, Apparatus, And Methods For An Improved Load Port Backplane App 20200152497 - Reuter; Paul B. ;   et al. | 2020-05-14 |
Abatement And Strip Process Chamber In A Load Lock Configuration App 20200144067 - SALINAS; Martin Jeffrey ;   et al. | 2020-05-07 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Equipment Front End Modules App 20200135499 - Pannese; Patrick ;   et al. | 2020-04-30 |
Front-ducted Equipment Front End Modules, Side Storage Pods, And Methods Of Operating The Same App 20200135523 - Reuter; Paul B. ;   et al. | 2020-04-30 |
Side Storage Pods, Electronic Device Processing Systems, And Methods For Operating The Same App 20200135522 - Reuter; Paul B. ;   et al. | 2020-04-30 |
Side Storage Pods, Equipment Front End Modules, And Methods For Operating Efems App 20200135525 - Reuter; Paul B. ;   et al. | 2020-04-30 |
High Flow Velocity, Gas-purged, Side Storage Pod Apparatus, Assemblies, And Methods App 20200135521 - Reuter; Paul B. ;   et al. | 2020-04-30 |
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200126802 - LEE; Jared Ahmad ;   et al. | 2020-04-23 |
Method And Apparatus For Substrate Transfer And Radical Confinement App 20200066563 - LEE; Jared Ahmad ;   et al. | 2020-02-27 |
Abatement and strip process chamber in a load lock configuration Grant 10,566,205 - Salinas , et al. Feb | 2020-02-18 |
Abatement And Strip Process Chamber In A Load Lock Configuration App 20200051825 - SALINAS; Martin Jeffrey ;   et al. | 2020-02-13 |
Electronic Device Manufacturing Load Port Apparatus, Systems, And Methods App 20200043770 - Blahnik; David T. ;   et al. | 2020-02-06 |
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20200027742 - LEE; Jared Ahmad ;   et al. | 2020-01-23 |
Systems, apparatus, and methods for an improved load port backplane Grant 10,541,165 - Reuter , et al. Ja | 2020-01-21 |
Load Port Operation In Electronic Device Manufacturing Apparatus, Systems, And Methods App 20190393065 - Reuter; Paul B. | 2019-12-26 |
Substrate Manufacturing Apparatus And Methods With Factory Interface Chamber Heating App 20190362989 - Reuter; Paul B. ;   et al. | 2019-11-28 |
Method and apparatus for substrate transfer and radical confinement Grant 10,468,282 - Lee , et al. No | 2019-11-05 |
Abatement and strip process chamber in a dual loadlock configuration Grant 10,453,694 - Lee , et al. Oc | 2019-10-22 |
Electronic device manufacturing load port apparatus, systems, and methods Grant 10,453,726 - Blahnik , et al. Oc | 2019-10-22 |
Load port operation in electronic device manufacturing apparatus, systems, and methods Grant 10,446,428 - Reuter Oc | 2019-10-15 |
Gas systems and methods for chamber ports Grant 10,381,247 - Madiwal , et al. A | 2019-08-13 |
Load Lock Door Assemblies, Load Lock Apparatus, Electronic Device Processing Systems, And Methods App 20190208907 - Weiss; Eran ;   et al. | 2019-07-11 |
Systems, Apparatus, And Methods For An Improved Load Port App 20190189484 - Bonecutter; Luke W. ;   et al. | 2019-06-20 |
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods Grant 10,278,501 - Weiss , et al. | 2019-05-07 |
Segmented focus ring assembly Grant 10,276,354 - Lee , et al. | 2019-04-30 |
Systems, apparatus, and methods for an improved load port Grant 10,262,884 - Bonecutter , et al. | 2019-04-16 |
Thin heated substrate support Grant 10,204,805 - Yousif , et al. Feb | 2019-02-12 |
Method and apparatus for substrate transfer and radical confinement Grant 10,090,181 - Lee , et al. October 2, 2 | 2018-10-02 |
Load Port Operation In Electronic Device Manufacturing Apparatus, Systems, And Methods App 20180269095 - Reuter; Paul B. | 2018-09-20 |
Method And Apparatus For Substrate Transfer And Radical Confinement App 20180247850 - LEE; Jared Ahmad ;   et al. | 2018-08-30 |
Systems, Apparatus, And Methods For An Improved Load Port Backplane App 20180130684 - Reuter; Paul B. ;   et al. | 2018-05-10 |
Systems, Apparatus, And Methods For An Improved Load Port App 20180130685 - Bonecutter; Luke W. ;   et al. | 2018-05-10 |
Electronic Device Manufacturing Load Port Apparatus, Systems, And Methods App 20180130686 - Blahnik; David T. ;   et al. | 2018-05-10 |
Thin Heated Substrate Support App 20170040192 - YOUSIF; Imad ;   et al. | 2017-02-09 |
Processing systems and apparatus adapted to process substrates in electronic device manufacturing Grant 9,524,889 - Hongkham , et al. December 20, 2 | 2016-12-20 |
Gas Systems And Methods For Chamber Ports App 20160358792 - Madiwal; Nagendra V. ;   et al. | 2016-12-08 |
Loadlock Apparatus, Cooling Plate Assembly, And Electronic Device Processing Systems And Methods App 20160314997 - Reuter; Paul B. ;   et al. | 2016-10-27 |
Gas apparatus, systems, and methods for chamber ports Grant 9,435,025 - Madiwal , et al. September 6, 2 | 2016-09-06 |
Substrate Lift Assemblies App 20160240410 - Reuter; Paul B. ;   et al. | 2016-08-18 |
Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations Grant 9,355,876 - Reuter , et al. May 31, 2 | 2016-05-31 |
Load Lock Door Assembly, Load Lock Apparatus, Electronic Device Processing Systems, And Methods App 20150311102 - Weiss; Eran ;   et al. | 2015-10-29 |
Gas Apparatus, Systems, And Methods For Chamber Ports App 20150083330 - Madiwal; Nagendra V. ;   et al. | 2015-03-26 |
Process Load Lock Apparatus, Lift Assemblies, Electronic Device Processing Systems, And Methods Of Processing Substrates In Load Lock Locations App 20140262036 - Reuter; Paul B. ;   et al. | 2014-09-18 |
Processing Systems, Apparatus, And Methods Adapted To Process Substrates In Electronic Device Manufacturing App 20140263165 - Hongkham; Steve S. ;   et al. | 2014-09-18 |
Segmented Focus Ring Assembly App 20140110057 - LEE; Jared Ahmad ;   et al. | 2014-04-24 |
Method And Apparatus For Substrate Transfer And Radical Confinement App 20140087561 - Lee; Jared Ahmad ;   et al. | 2014-03-27 |
Thin Heated Substrate Support App 20130334199 - Yousif; Imad ;   et al. | 2013-12-19 |
Abatement And Strip Process Chamber In A Dual Loadlock Configuration App 20130337655 - Lee; Jared Ahmad ;   et al. | 2013-12-19 |
Abatement And Strip Process Chamber In A Load Lock Configuration App 20130224953 - SALINAS; Martin Jeffrey ;   et al. | 2013-08-29 |
Vacuum Chambers With Shared Pump App 20120222813 - Pal; Aniruddha ;   et al. | 2012-09-06 |