loadpatents
Patent applications and USPTO patent grants for Rettig; Curtis L..The latest application filed is for "homogeneous laser light source having temporally variable seed source for area processing applications".
Patent | Date |
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Homogeneous Laser Light Source Having Temporally Variable Seed Source for Area Processing Applications App 20170184942 - Clark; James Burton ;   et al. | 2017-06-29 |
Homogeneous Laser Light Source for Area Processing Applications App 20170179675 - Clark; James Burton ;   et al. | 2017-06-22 |
Gas discharge laser chamber improvements Grant 7,522,650 - Partlo , et al. April 21, 2 | 2009-04-21 |
Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ;   et al. | 2008-01-31 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source Grant 7,217,941 - Rettig , et al. May 15, 2 | 2007-05-15 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source App 20050279946 - Rettig, Curtis L. ;   et al. | 2005-12-22 |
Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ;   et al. | 2005-10-20 |
Gas discharge laser chamber improvements App 20050226301 - Partlo, William N. ;   et al. | 2005-10-13 |
LPP EUV light source App 20050205811 - Partlo, William N. ;   et al. | 2005-09-22 |
Six to ten KHz, or greater gas discharge laser system Grant 6,914,919 - Watson , et al. July 5, 2 | 2005-07-05 |
Four KHz gas discharge laser system Grant 6,882,674 - Wittak , et al. April 19, 2 | 2005-04-19 |
Discharge produced plasma EUV light source App 20040160155 - Partlo, William N. ;   et al. | 2004-08-19 |
Fan for gas discharge laser Grant 6,765,946 - Partlo , et al. July 20, 2 | 2004-07-20 |
Four KHz gas discharge laser Grant 6,757,316 - Newman , et al. June 29, 2 | 2004-06-29 |
Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ;   et al. | 2004-06-10 |
Four KHz gas discharge laser system App 20030118072 - Wittak, Christian J. ;   et al. | 2003-06-26 |
Six to ten KHz, or greater gas discharge laser system App 20030012234 - Watson, Tom A. ;   et al. | 2003-01-16 |
Fan for gas discharge laser App 20020094005 - Partlo, William N. ;   et al. | 2002-07-18 |
Four KHz gas discharge laser App 20020021728 - Newman, Peter C. ;   et al. | 2002-02-21 |
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