| Patent | Date |
|---|
Superstrate and a method of using the same
Grant 11,126,083 - Resnick , et al. September 21, 2 | 2021-09-21 |
Imprint system and imprinting process with spatially non-uniform illumination
Grant 10,663,869 - Khusnatdinov , et al. | 2020-05-26 |
Planarization process and apparatus
Grant 10,580,659 - Khusnatdinov , et al. | 2020-03-03 |
Superstrate And A Method Of Using The Same
App 20190227437 - RESNICK; Douglas J. ; et al. | 2019-07-25 |
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
Grant RE47,483 - Resnick , et al. | 2019-07-02 |
Imprint System And Imprinting Process With Spatially Non-uniform Illumination
App 20190179228 - Khusnatdinov; Niyaz ; et al. | 2019-06-13 |
Planarization Process and Apparatus
App 20190080922 - Khusnatdinov; Niyaz ; et al. | 2019-03-14 |
Method for forming planarized etch mask structures over existing topography
Grant 10,079,152 - LaBrake , et al. September 18, 2 | 2018-09-18 |
Method For Forming Planarized Etch Mask Structures Over Existing Topography
App 20180247823 - LaBrake; Dwayne L. ; et al. | 2018-08-30 |
Fabrication of seamless large area master templates for imprint lithography using step and repeat tools
Grant 9,452,574 - Resnick , et al. September 27, 2 | 2016-09-27 |
Methods and systems of material removal and pattern transfer
Grant 8,980,751 - Schmid , et al. March 17, 2 | 2015-03-17 |
Imprint lithography template
Grant 8,877,073 - Schmid , et al. November 4, 2 | 2014-11-04 |
Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
Grant 8,556,616 - Resnick , et al. October 15, 2 | 2013-10-15 |
Template pillar formation
Grant 8,512,585 - Doyle , et al. August 20, 2 | 2013-08-20 |
Fabrication Of Seamless Large Area Master Templates For Imprint Lithography Using Step And Repeat Tools
App 20130153534 - Resnick; Douglas J. ; et al. | 2013-06-20 |
In-situ cleaning of an imprint lithography tool
Grant 8,394,203 - Schmid , et al. March 12, 2 | 2013-03-12 |
Template Pillar Formation
App 20120111832 - Doyle; Gary F. ; et al. | 2012-05-10 |
Methods And Systems Of Material Removal And Pattern Transfer
App 20110183521 - Schmid; Gerard M. ; et al. | 2011-07-28 |
Etch-enhanced technique for lift-off patterning
Grant 7,985,530 - Schmid , et al. July 26, 2 | 2011-07-26 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20110171340 - Resnick; Douglas J. ; et al. | 2011-07-14 |
Method of creating a template employing a lift-off process
Grant 7,906,274 - Schmid , et al. March 15, 2 | 2011-03-15 |
Template having a silicon nitride, silicon carbide or silicon oxynitride film
Grant 7,874,831 - Resnick , et al. January 25, 2 | 2011-01-25 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20100291257 - Resnick; Douglas J. ; et al. | 2010-11-18 |
Etch-Enhanced Technique for Lift-Off Patterning
App 20100266965 - Schmid; Gerard M. ; et al. | 2010-10-21 |
Substrate Patterning
App 20100112310 - Truskett; Van Nguyen ; et al. | 2010-05-06 |
Imprint Lithography Template
App 20100102029 - Schmid; Gerard M. ; et al. | 2010-04-29 |
Manufacture Of Drop Dispense Apparatus
App 20100099047 - Truskett; Van Nguyen ; et al. | 2010-04-22 |
Complementary Alignment Marks for Imprint Lithography
App 20100092599 - Selinidis; Kosta S. ; et al. | 2010-04-15 |
In-Situ Cleaning of an Imprint Lithography Tool
App 20100085555 - Schmid; Gerard M. ; et al. | 2010-04-08 |
Particle Mitigation for Imprint Lithography
App 20100078846 - Resnick; Douglas J. ; et al. | 2010-04-01 |
Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film
App 20100040718 - Resnick; Douglas J. ; et al. | 2010-02-18 |
Template Pillar Formation
App 20090200266 - Doyle; Gary F. ; et al. | 2009-08-13 |
Self-aligned process for fabricating imprint templates containing variously etched features
Grant 7,547,398 - Schmid , et al. June 16, 2 | 2009-06-16 |
Method of Creating a Template Employing a Lift-Off Process
App 20090130598 - Schmid; Gerard M. ; et al. | 2009-05-21 |
Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film
App 20090004319 - Resnick; Douglas J. ; et al. | 2009-01-01 |
Lithographic template and method of formation and use
Grant 7,432,024 - Talin , et al. October 7, 2 | 2008-10-07 |
Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
App 20080160129 - Resnick; Douglas J. ; et al. | 2008-07-03 |
Self-Aligned Process for Fabricating Imprint Templates Containing Variously Etched Features
App 20070243655 - Schmid; Gerard M. ; et al. | 2007-10-18 |
Direct imprinting of etch barriers using step and flash imprint lithography
Grant 7,163,888 - Gehoski , et al. January 16, 2 | 2007-01-16 |
Lithographic Template And Method Of Formation And Use
App 20060222968 - Talin; Albert Alec ; et al. | 2006-10-05 |
Lithographic template and method of formation and use
Grant 7,083,880 - Talin , et al. August 1, 2 | 2006-08-01 |
Lithographic template having a repaired gap defect method of repair and use
Grant 7,063,919 - Mancini , et al. June 20, 2 | 2006-06-20 |
Direct imprinting of etch barriers using step and flash imprint lithography
App 20060110914 - Gehoski; Kathy A. ; et al. | 2006-05-25 |
Lithographic template and method of formation and use
Grant 6,890,688 - Mancini , et al. May 10, 2 | 2005-05-10 |
Multi-tiered lithographic template and method of formation and use
Grant 6,852,454 - Mancini , et al. February 8, 2 | 2005-02-08 |
Unitary dual damascene process using imprint lithography
App 20040224261 - Resnick, Douglas J. ; et al. | 2004-11-11 |
Lithographic template and method of formation and use
App 20040033424 - Talin, Albert Alec ; et al. | 2004-02-19 |
Lithographic template having a repaired gap defect method of repair and use
App 20040023126 - Mancini, David P. ; et al. | 2004-02-05 |
Multi-tiered lithographic template and method of formation and use
App 20030232252 - Mancini, David P. ; et al. | 2003-12-18 |
Semiconductor device and method of making the same
Grant 6,630,746 - Mancini , et al. October 7, 2 | 2003-10-07 |
Lithographic template and method of formation and use
App 20030113638 - Mancini, David P. ; et al. | 2003-06-19 |
Amorphous carbon layer for improved adhesion of photoresist and method of fabrication
App 20020058383 - Mancini, David P. ; et al. | 2002-05-16 |
Low stress hard mask formation method during refractory radiation mask fabrication
Grant 6,368,752 - Dauksher , et al. April 9, 2 | 2002-04-09 |
Amorphous carbon layer for improved adhesion of photoresist and method of fabrication
Grant 6,368,924 - Mancini , et al. April 9, 2 | 2002-04-09 |
Method of forming an alignment mark
Grant 6,083,806 - Mancini , et al. July 4, 2 | 2000-07-04 |
Process for patterning magnetic films
Grant 6,024,885 - Pendharkar , et al. February 15, 2 | 2000-02-15 |
X-ray lithography method for irradiating an object to form a pattern thereon
Grant 5,509,041 - Resnick , et al. April 16, 1 | 1996-04-16 |
Process for fabricating an X-ray absorbing mask
Grant 5,464,711 - Mogab , et al. November 7, 1 | 1995-11-07 |
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