Renwick; Stephen P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Renwick; Stephen P..The latest application filed is for "high-resolution position encoder with image sensor and encoded target pattern".

Company Profile

1.8.8

Renwick; Stephen P. - Moss Beach CA
Renwick; Stephen P. - San Bruno CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Euv lithography system for dense line patterning Grant 11,099,483 - Flagello , et al. August 24, 2	2021-08-24
High-resolution position encoder with image sensor and encoded target pattern Grant 11,061,338 - Wells , et al. July 13, 2	2021-07-13
EUV lithography system for dense line patterning Grant 10,890,849 - Flagello , et al. January 12, 2	2021-01-12
Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer Grant 10,871,708 - Slonaker , et al. December 22, 2	2020-12-22
High-resolution Position Encoder With Image Sensor And Encoded Target Pattern App 20180217510 - Wells; J. Kyle ; et al.	2018-08-02
Spatial-frequency Matched Wafer Alignment Marks, Wafer Alignment And Overlay Measurement And Processing Using Multiple Different Mark Designs On A Single Layer App 20180210332 - Slonaker; Steven Douglas ; et al.	2018-07-26
Euv Lithography System For Dense Line Patterning App 20170336716 - Flagello; Donis G. ; et al.	2017-11-23
Euv Lithography System For Dense Line Patterning App 20170336715 - Flagello; Donis G. ; et al.	2017-11-23
Systems and methods for adjusting a lithographic scanner Grant 8,438,507 - Renwick , et al. May 7, 2	2013-05-07
System And Method For An Adjusting Optical Proximity Effect For An Exposure Apparatus App 20130044308 - Renwick; Stephen P. ; et al.	2013-02-21
System and method for an adjusting optical proximity effect for an exposure apparatus Grant 8,300,214 - Renwick , et al. October 30, 2	2012-10-30
Systems And Methods For Adjusting A Lithographic Scanner App 20100125823 - RENWICK; Stephen P. ; et al.	2010-05-20
System And Method For An Adjusting Optical Proximity Effect For An Exposure Apparatus App 20090213349 - Renwick; Stephen P. ; et al.	2009-08-27
Method to diagnose imperfections in illuminator of a lithographic tool Grant 6,943,882 - Renwick , et al. September 13, 2	2005-09-13
Method to diagnose imperfections in illuminator of a lithographic tool App 20040119957 - Renwick, Stephen P. ; et al.	2004-06-24

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