Rennon; Siegfried

Patent Applications and Registrations

Patent applications and USPTO patent grants for Rennon; Siegfried.The latest application filed is for "surface correction of mirrors with decoupling coating".

Company Profile

0.6.6

Rennon; Siegfried - Westhausen DE
Rennon; Siegfried - Wuerzburg N/A DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Surface correction of mirrors with decoupling coating Grant 9,921,483 - Dier , et al. March 20, 2	2018-03-20
Surface Correction Of Mirrors With Decoupling Coating App 20160209750 - DIER; Oliver ; et al.	2016-07-21
Projection objective for a microlithographic EUV projection exposure apparatus Grant 8,693,098 - Rennon , et al. April 8, 2	2014-04-08
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 8,520,307 - Wolf , et al. August 27, 2	2013-08-27
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20130100426 - Warm; Berndt ; et al.	2013-04-25
Projection Objective For A Microlithographic Euv Projection Exposure Apparatus App 20110090559 - Rennon; Siegfried ; et al.	2011-04-21
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110083542 - Wolf; Oliver ; et al.	2011-04-14
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 7,880,969 - Wolf , et al. February 1, 2	2011-02-01
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20100007866 - Warm; Berndt ; et al.	2010-01-14
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090021839 - Wolf; Oliver ; et al.	2009-01-22

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