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Method and apparatus for cleaning substrates App 20030062333 - Kranz, Martin ;   et al. | 2003-04-03 |
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Precleaning process for metal plug that minimizes damage to low-kappa dielectric App 20020106908 - Cohen, Barney M. ;   et al. | 2002-08-08 |
Precleaning process for metal plug that minimizes damage to low-.kappa. dielectric Grant 6,346,489 - Cohen , et al. February 12, 2 | 2002-02-12 |
Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications Grant 6,313,033 - Chiang , et al. November 6, 2 | 2001-11-06 |
Barrier applications for aluminum planarization App 20010005629 - Singhvi, Shri ;   et al. | 2001-06-28 |
Barrier applications for aluminum planarization Grant 6,207,558 - Singhvi , et al. March 27, 2 | 2001-03-27 |