Renau; Anthony

Patent Applications and Registrations

Patent applications and USPTO patent grants for Renau; Anthony.The latest application filed is for "system and methods using an inline surface engineering source".

Company Profile

18.72.74

Renau; Anthony - West Newbury MA
Renau; Anthony - W. Newbury MA
Renau; Anthony - Horsham GB2

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System, apparatus and method for bunched ribbon ion beam Grant 11,217,427 - Renau January 4, 2	2022-01-04
System And Methods Using An Inline Surface Engineering Source App 20210313154 - Hatem; Christopher ; et al.	2021-10-07
System and methods using an inline surface engineering source Grant 11,069,511 - Hatem , et al. July 20, 2	2021-07-20
Apparatus And Techniques For Substrate Processing Using Independent Ion Source And Radical Source App 20210166946 - Renau; Anthony ; et al.	2021-06-03
Performance improvement of EUV photoresist by ion implantation Grant 10,990,014 - Ma , et al. April 27, 2	2021-04-27
Gate all around device and method of formation using angled ions Grant 10,930,735 - Sung , et al. February 23, 2	2021-02-23
Gate Devices And Methods Of Formation Using Angled Ions App 20210050349 - RENAU; ANTHONY ; et al.	2021-02-18
Gate devices and methods of formation using angled ions Grant 10,903,211 - Renau , et al. January 26, 2	2021-01-26
Device structure for forming semiconductor device having angled contacts Grant 10,886,279 - Varghese , et al. January 5, 2	2021-01-05
Device Structure For Forming Semiconductor Device Having Angled Contacts App 20200279852 - Varghese; Sony ; et al.	2020-09-03
Extreme Edge Uniformity Control App 20200243308 - Likhanskii; Alexandre ; et al.	2020-07-30
Device structure for forming semiconductor device having angled contacts Grant 10,692,872 - Varghese , et al.	2020-06-23
Gate All Around Device And Method Of Formation Using Angled Ions App 20200185228 - Sung; Min Gyu ; et al.	2020-06-11
Extreme edge uniformity control Grant 10,665,433 - Likhanskii , et al.	2020-05-26
Gate all around device and method of formation using angled ions Grant 10,607,847 - Sung , et al.	2020-03-31
Performance Improvement Of Euv Photoresist By Ion Implantation App 20200096870 - Ma; Tristan Y. ; et al.	2020-03-26
Performance improvement of EUV photoresist by ion implantation Grant 10,545,408 - Ma , et al. Ja	2020-01-28
Device Structure And Techniques For Forming Semiconductor Device Having Angled Conductors App 20200027832 - Varghese; Sony ; et al.	2020-01-23
System And Methods Using An Inline Surface Engineering Source App 20190393019 - Hatem; Christopher ; et al.	2019-12-26
Device Structure For Forming Semiconductor Device Having Angled Contacts App 20190181144 - Varghese; Sony ; et al.	2019-06-13
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 10,290,462 - Koo , et al.	2019-05-14
Performance Improvement Of Euv Photoresist By Ion Implantation App 20190056914 - Ma; Tristan Y. ; et al.	2019-02-21
High Brightness Ion Beam Extraction App 20180166250 - Koo; Bon-Woong ; et al.	2018-06-14
Extreme Edge Uniformity Control App 20180082824 - Likhanskii; Alexandre ; et al.	2018-03-22
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 9,922,795 - Koo , et al. March 20, 2	2018-03-20
Method for selectively depositing a layer on a three dimensional structure Grant 9,847,228 - Ruffell , et al. December 19, 2	2017-12-19
Apparatus and method for generating high current negative hydrogen ion beam Grant 9,773,636 - Lee , et al. September 26, 2	2017-09-26
In situ control of ion angular distribution in a processing apparatus Grant 9,620,335 - Biloiu , et al. April 11, 2	2017-04-11
Apparatus And Method For Generating High Current Negative Hydrogen Ion Beam App 20170053776 - Lee; W. Davis ; et al.	2017-02-23
High Brightness Ion Beam Extraction App 20170032927 - Koo; Bon-Woong ; et al.	2017-02-02
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160379827 - Ruffell; Simon ; et al.	2016-12-29
Angled ion beam processing of heterogeneous structure Grant 9,520,360 - Renau , et al. December 13, 2	2016-12-13
Methods Of Affecting Material Properties And Applications Therefor App 20160326636 - Godet; Ludovic ; et al.	2016-11-10
Method for selectively depositing a layer on a three dimensional structure Grant 9,453,279 - Ruffell , et al. September 27, 2	2016-09-27
Techniques for ion implantation of non-planar field effect transistors Grant 9,455,335 - Renau , et al. September 27, 2	2016-09-27
Methods of affecting material properties and applications therefor Grant 9,425,027 - Godet , et al. August 23, 2	2016-08-23
Angled Ion Beam Processing Of Heterogeneous Structure App 20160233162 - Renau; Anthony ; et al.	2016-08-11
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20160189935 - Biloiu; Costel ; et al.	2016-06-30
Angled ion beam processing of heterogeneous structure Grant 9,337,040 - Renau , et al. May 10, 2	2016-05-10
In situ control of ion angular distribution in a processing apparatus Grant 9,293,301 - Biloiu , et al. March 22, 2	2016-03-22
Techniques to mitigate straggle damage to sensitive structures Grant 9,236,257 - Hatem , et al. January 12, 2	2016-01-12
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160005607 - Russell; Simon ; et al.	2016-01-07
Indirectly heated cathode cartridge design Grant 9,076,625 - Chaney , et al. July 7, 2	2015-07-07
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20150179409 - Biloiu; Costel ; et al.	2015-06-25
Techniques For Diamond Nucleation Control For Thin Film Processing App 20150176116 - GODET; Ludovic ; et al.	2015-06-25
Techniques For Ion Implantation Of Non-planar Field Effect Transistors App 20150132907 - Renau; Anthony ; et al.	2015-05-14
Techniques and apparatus for high rate hydrogen implantation and co-implantion Grant 9,024,282 - Radovanov , et al. May 5, 2	2015-05-05
Apparatus and method for controllably implanting workpieces Grant 8,937,004 - Renau , et al. January 20, 2	2015-01-20
Techniques To Mitigate Straggle Damage To Sensitive Structures App 20140273502 - Hatem; Christopher R. ; et al.	2014-09-18
Techniques And Apparatus For High Rate Hydrogen Implantation And Co-implantion App 20140256121 - Radovanov; Svetlana B. ; et al.	2014-09-11
Apparatus and method for multiple slot ion implantation Grant 8,716,682 - Renau , et al. May 6, 2	2014-05-06
Technique and apparatus for monitoring ion mass, energy, and angle in processing systems Grant 8,698,107 - Godet , et al. April 15, 2	2014-04-15
Inductively Coupled Plasma ION Source Chamber with Dopant Material Shield App 20140097752 - Biloui; Costel ; et al.	2014-04-10
Mask system and method of patterning magnetic media Grant 8,679,356 - Kontos , et al. March 25, 2	2014-03-25
Plasma processing apparatus Grant 8,664,098 - Godet , et al. March 4, 2	2014-03-04
Apparatus And Method For Controllably Implanting Workpieces App 20130234034 - Renau; Anthony ; et al.	2013-09-12
Apparatus and method for controllably implanting workpieces Grant 8,461,030 - Renau , et al. June 11, 2	2013-06-11
Interfacing two insulation parts in high voltage environment Grant 8,455,760 - Low , et al. June 4, 2	2013-06-04
Techniques For Diamond Nucleation Control For Thin Film Processing App 20130045339 - Godet; Ludovic ; et al.	2013-02-21
Mask System And Method Of Patterning Magnetic Media App 20120292285 - Kontos; Alexander C. ; et al.	2012-11-22
Methods Of Affecting Material Properties And Applications Therefor App 20120288637 - Godet; Ludovic ; et al.	2012-11-15
N-type doping of zinc telluride Grant 8,288,255 - Lu , et al. October 16, 2	2012-10-16
Indirectly Heated Cathode Cartridge Design App 20120256097 - Chaney; Craig R. ; et al.	2012-10-11
Apparatus And Method For Multiple Slot Ion Implantation App 20120248328 - Renau; Anthony ; et al.	2012-10-04
N-type Doping Of Zinc Telluride App 20120202340 - LU; Xianfeng ; et al.	2012-08-09
N-type Doping Of Zinc Telluride App 20120202341 - LU; Xiangfeng ; et al.	2012-08-09
Technique And Apparatus For Monitoring Ion Mass, Energy, And Angle In Processing Systems App 20120175518 - Godet; Ludovic ; et al.	2012-07-12
Plasma Processing Apparatus App 20120111834 - Godet; Ludovic ; et al.	2012-05-10
Plasma processing apparatus Grant 8,101,510 - Godet , et al. January 24, 2	2012-01-24
Apparatus And Method For Controllably Implanting Workpieces App 20110124186 - Renau; Anthony ; et al.	2011-05-26
Interfacing Two Insulation Parts In High Voltage Environment App 20110094798 - Low; Russell J. ; et al.	2011-04-28
Interfacing two insulation parts in high voltage environment Grant 7,863,520 - Low , et al. January 4, 2	2011-01-04
Techniques for controlling a charged particle beam Grant 7,820,986 - Lubicki , et al. October 26, 2	2010-10-26
Implanting with improved uniformity and angle control on tilted wafers Grant 7,812,325 - Buonodono , et al. October 12, 2	2010-10-12
Plasma Processing Apparatus App 20100255665 - Godet; Ludovic ; et al.	2010-10-07
Bi mode ion implantation with non-parallel ion beams Grant RE41,214 - Renau , et al. April 13, 2	2010-04-13
Technique for improving ion implantation throughput and dose uniformity Grant 7,683,347 - Gupta , et al. March 23, 2	2010-03-23
Technique for shaping a ribbon-shaped ion beam Grant 7,675,047 - Radovanov , et al. March 9, 2	2010-03-09
Techniques for forming shallow junctions Grant 7,642,150 - Arevalo , et al. January 5, 2	2010-01-05
Maskless Doping Technique for Solar Cells App 20090317937 - Gupta; Atul ; et al.	2009-12-24
Multi-purpose electrostatic lens for an ion implanter system Grant 7,579,605 - Renau , et al. August 25, 2	2009-08-25
Techniques For Cold Implantation Of Carbon-containing Species App 20090200494 - Hatem; Christopher R. ; et al.	2009-08-13
Techniques for providing a ribbon-shaped gas cluster ion beam Grant 7,547,900 - Renau , et al. June 16, 2	2009-06-16
Techniques For Controlling A Charged Particle Beam App 20090072163 - Lubicki; Piotr R. ; et al.	2009-03-19
Interfacing Two Insulation Parts In High Voltage Environment App 20090047801 - Low; Russell J. ; et al.	2009-02-19
Electron confinement inside magnet of ion implanter Grant 7,459,692 - Renau , et al. December 2, 2	2008-12-02
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms Grant 7,459,704 - Olson , et al. December 2, 2	2008-12-02
Ion beam contamination determination Grant 7,402,820 - Low , et al. July 22, 2	2008-07-22
Electron injection in ion implanter magnets Grant 7,402,816 - Renau , et al. July 22, 2	2008-07-22
Techniques For Providing A Ribbon-shaped Gas Cluster Ion Beam App 20080149826 - RENAU; Anthony ; et al.	2008-06-26
Technique for isocentric ion beam scanning Grant 7,391,038 - Olson , et al. June 24, 2	2008-06-24
Techniques For Forming Shallow Junctions App 20080108208 - Arevalo; Edwin A. ; et al.	2008-05-08
Technique for Improved Damage Control in a Plasma Doping (PLAD) Ion Implantation App 20080090392 - Singh; Vikram ; et al.	2008-04-17
Technique For Improving Ion Implantation Throughput And Dose Uniformity App 20080078953 - GUPTA; Atul ; et al.	2008-04-03
Implanting With Improved Uniformity And Angle Control On Tilted Wafers App 20080078950 - Buonodono; James ; et al.	2008-04-03
Multi-purpose Electrostatic Lens For An Ion Implanter System App 20080078951 - Renau; Anthony ; et al.	2008-04-03
Non-doping implantation process utilizing a plasma ion implantation system App 20080075880 - Renau; Anthony ; et al.	2008-03-27
Technique for providing a segmented electrostatic lens in an ion implanter Grant 7,339,179 - Radovanov , et al. March 4, 2	2008-03-04
Methods and apparatus for adjusting beam parallelism in ion implanters Grant RE40,009 - Olson , et al. January 22, 2	2008-01-22
Ion beam contamination determination App 20070241276 - Low; Russell ; et al.	2007-10-18
Cathode assembly for indirectly heated cathode ion source Grant 7,276,847 - Olson , et al. October 2, 2	2007-10-02
Technique for isocentric ion beam scanning App 20070221870 - Olson; Joseph C. ; et al.	2007-09-27
Method of Plasma Processing with In-Situ Monitoring and Process Parameter Tuning App 20070224840 - Renau; Anthony ; et al.	2007-09-27
Methods of implanting ions and ion sources used for same App 20070178679 - Hatem; Christopher ; et al.	2007-08-02
Methods of implanting ions and ion sources used for same App 20070178678 - Hatem; Christopher ; et al.	2007-08-02
Ion beam neutral detection Grant 7,250,617 - Renau , et al. July 31, 2	2007-07-31
Technique for providing a segmented electrostatic lens in an ion implanter App 20070164229 - Radovanov; Svetlana B. ; et al.	2007-07-19
Technique for Shaping a Ribbon-Shaped Ion Beam App 20070108390 - Radovanov; Svetlana B. ; et al.	2007-05-17
Technique For Atomic Layer Deposition App 20070087581 - SINGH; Vikram ; et al.	2007-04-19
Technique for atomic layer deposition App 20070065576 - Singh; Vikram ; et al.	2007-03-22
Ion beam measurement apparatus and method Grant 7,170,067 - Renau , et al. January 30, 2	2007-01-30
Uniformity control multiple tilt axes, rotating wafer and variable scan velocity Grant 7,166,854 - Renau , et al. January 23, 2	2007-01-23
Uniformity control using multiple fixed wafer orientations and variable scan velocity Grant 7,161,161 - Renau , et al. January 9, 2	2007-01-09
Methods and apparatus for enabling multiple process steps on a single substrate App 20060258128 - Nunan; Peter ; et al.	2006-11-16
Methods and apparatus for adjusting ion implant parameters for improved process control App 20060240651 - Renau; Anthony ; et al.	2006-10-26
Ion beam measurement apparatus and method App 20060192134 - Renau; Anthony ; et al.	2006-08-31
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms App 20060169915 - Olson; Joseph C. ; et al.	2006-08-03
Electron injection in ion implanter magnets App 20060169912 - Renau; Anthony ; et al.	2006-08-03
Electron confinement inside magent of ion implanter App 20060169911 - Renau; Anthony ; et al.	2006-08-03
Methods and apparatus for ion implantation with control of incidence angle by beam deflection App 20060145095 - Olson; Joseph C. ; et al.	2006-07-06
Uniformity control using multiple tilt axes, rotating wafer and variable scan velocity App 20050263721 - Renau, Anthony ; et al.	2005-12-01
Uniformity control using multiple fixed wafer orientations and variable scan velocity App 20050258379 - Renau, Anthony ; et al.	2005-11-24
Ion beam neutral detection App 20050178981 - Renau, Anthony ; et al.	2005-08-18
Method and system for compensating for anneal non-uniformities Grant 6,828,204 - Renau December 7, 2	2004-12-07
Adjustable conductance limiting aperture for ion implanters Grant 6,791,097 - Scheuer , et al. September 14, 2	2004-09-14
Control system for indirectly heated cathode ion source Grant 6,777,686 - Olson , et al. August 17, 2	2004-08-17
Method And System For Compensating For Anneal Non-uniformities App 20040077149 - Renau, Anthony	2004-04-22
High transmission, low energy beamline architecture for ion implanter Grant 6,635,880 - Renau October 21, 2	2003-10-21
Bi mode ion implantation with non-parallel ion beams Grant 6,573,518 - Renau , et al. June 3, 2	2003-06-03
Adjustable conductance limiting aperture for ion implanters App 20020121613 - Scheuer, Jay T. ; et al.	2002-09-05
Methods and apparatus for adjusting beam parallelism in ion implanters Grant 6,437,350 - Olson , et al. August 20, 2	2002-08-20
Control system for indirectly heated cathode ion source App 20010042836 - Olson, Joseph C. ; et al.	2001-11-22
Cathode assembly for indirectly heated cathode ion source App 20010043040 - Olson, Joseph C. ; et al.	2001-11-22
Acceleration and analysis architecture for ion implanter Grant 6,313,475 - Renau , et al. November 6, 2	2001-11-06
Acceleration and analysis architecture for ion implanter Grant 6,130,436 - Renau , et al. October 10, 2	2000-10-10
Compact high current broad beam ion implanter Grant 5,350,926 - White , et al. September 27, 1	1994-09-27
System and methods for wafer charge reduction for ion implantation Grant 4,825,087 - Renau , et al. April 25, 1	1989-04-25

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