Patent | Date |
---|
System, apparatus and method for bunched ribbon ion beam Grant 11,217,427 - Renau January 4, 2 | 2022-01-04 |
System And Methods Using An Inline Surface Engineering Source App 20210313154 - Hatem; Christopher ;   et al. | 2021-10-07 |
System and methods using an inline surface engineering source Grant 11,069,511 - Hatem , et al. July 20, 2 | 2021-07-20 |
Apparatus And Techniques For Substrate Processing Using Independent Ion Source And Radical Source App 20210166946 - Renau; Anthony ;   et al. | 2021-06-03 |
Performance improvement of EUV photoresist by ion implantation Grant 10,990,014 - Ma , et al. April 27, 2 | 2021-04-27 |
Gate all around device and method of formation using angled ions Grant 10,930,735 - Sung , et al. February 23, 2 | 2021-02-23 |
Gate Devices And Methods Of Formation Using Angled Ions App 20210050349 - RENAU; ANTHONY ;   et al. | 2021-02-18 |
Gate devices and methods of formation using angled ions Grant 10,903,211 - Renau , et al. January 26, 2 | 2021-01-26 |
Device structure for forming semiconductor device having angled contacts Grant 10,886,279 - Varghese , et al. January 5, 2 | 2021-01-05 |
Device Structure For Forming Semiconductor Device Having Angled Contacts App 20200279852 - Varghese; Sony ;   et al. | 2020-09-03 |
Extreme Edge Uniformity Control App 20200243308 - Likhanskii; Alexandre ;   et al. | 2020-07-30 |
Device structure for forming semiconductor device having angled contacts Grant 10,692,872 - Varghese , et al. | 2020-06-23 |
Gate All Around Device And Method Of Formation Using Angled Ions App 20200185228 - Sung; Min Gyu ;   et al. | 2020-06-11 |
Extreme edge uniformity control Grant 10,665,433 - Likhanskii , et al. | 2020-05-26 |
Gate all around device and method of formation using angled ions Grant 10,607,847 - Sung , et al. | 2020-03-31 |
Performance Improvement Of Euv Photoresist By Ion Implantation App 20200096870 - Ma; Tristan Y. ;   et al. | 2020-03-26 |
Performance improvement of EUV photoresist by ion implantation Grant 10,545,408 - Ma , et al. Ja | 2020-01-28 |
Device Structure And Techniques For Forming Semiconductor Device Having Angled Conductors App 20200027832 - Varghese; Sony ;   et al. | 2020-01-23 |
System And Methods Using An Inline Surface Engineering Source App 20190393019 - Hatem; Christopher ;   et al. | 2019-12-26 |
Device Structure For Forming Semiconductor Device Having Angled Contacts App 20190181144 - Varghese; Sony ;   et al. | 2019-06-13 |
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 10,290,462 - Koo , et al. | 2019-05-14 |
Performance Improvement Of Euv Photoresist By Ion Implantation App 20190056914 - Ma; Tristan Y. ;   et al. | 2019-02-21 |
High Brightness Ion Beam Extraction App 20180166250 - Koo; Bon-Woong ;   et al. | 2018-06-14 |
Extreme Edge Uniformity Control App 20180082824 - Likhanskii; Alexandre ;   et al. | 2018-03-22 |
High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Grant 9,922,795 - Koo , et al. March 20, 2 | 2018-03-20 |
Method for selectively depositing a layer on a three dimensional structure Grant 9,847,228 - Ruffell , et al. December 19, 2 | 2017-12-19 |
Apparatus and method for generating high current negative hydrogen ion beam Grant 9,773,636 - Lee , et al. September 26, 2 | 2017-09-26 |
In situ control of ion angular distribution in a processing apparatus Grant 9,620,335 - Biloiu , et al. April 11, 2 | 2017-04-11 |
Apparatus And Method For Generating High Current Negative Hydrogen Ion Beam App 20170053776 - Lee; W. Davis ;   et al. | 2017-02-23 |
High Brightness Ion Beam Extraction App 20170032927 - Koo; Bon-Woong ;   et al. | 2017-02-02 |
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160379827 - Ruffell; Simon ;   et al. | 2016-12-29 |
Angled ion beam processing of heterogeneous structure Grant 9,520,360 - Renau , et al. December 13, 2 | 2016-12-13 |
Methods Of Affecting Material Properties And Applications Therefor App 20160326636 - Godet; Ludovic ;   et al. | 2016-11-10 |
Techniques for ion implantation of non-planar field effect transistors Grant 9,455,335 - Renau , et al. September 27, 2 | 2016-09-27 |
Method for selectively depositing a layer on a three dimensional structure Grant 9,453,279 - Ruffell , et al. September 27, 2 | 2016-09-27 |
Methods of affecting material properties and applications therefor Grant 9,425,027 - Godet , et al. August 23, 2 | 2016-08-23 |
Angled Ion Beam Processing Of Heterogeneous Structure App 20160233162 - Renau; Anthony ;   et al. | 2016-08-11 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20160189935 - Biloiu; Costel ;   et al. | 2016-06-30 |
Angled ion beam processing of heterogeneous structure Grant 9,337,040 - Renau , et al. May 10, 2 | 2016-05-10 |
In situ control of ion angular distribution in a processing apparatus Grant 9,293,301 - Biloiu , et al. March 22, 2 | 2016-03-22 |
Techniques to mitigate straggle damage to sensitive structures Grant 9,236,257 - Hatem , et al. January 12, 2 | 2016-01-12 |
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160005607 - Russell; Simon ;   et al. | 2016-01-07 |
Indirectly heated cathode cartridge design Grant 9,076,625 - Chaney , et al. July 7, 2 | 2015-07-07 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus App 20150179409 - Biloiu; Costel ;   et al. | 2015-06-25 |
Techniques For Diamond Nucleation Control For Thin Film Processing App 20150176116 - GODET; Ludovic ;   et al. | 2015-06-25 |
Techniques For Ion Implantation Of Non-planar Field Effect Transistors App 20150132907 - Renau; Anthony ;   et al. | 2015-05-14 |
Techniques and apparatus for high rate hydrogen implantation and co-implantion Grant 9,024,282 - Radovanov , et al. May 5, 2 | 2015-05-05 |
Apparatus and method for controllably implanting workpieces Grant 8,937,004 - Renau , et al. January 20, 2 | 2015-01-20 |
Techniques To Mitigate Straggle Damage To Sensitive Structures App 20140273502 - Hatem; Christopher R. ;   et al. | 2014-09-18 |
Techniques And Apparatus For High Rate Hydrogen Implantation And Co-implantion App 20140256121 - Radovanov; Svetlana B. ;   et al. | 2014-09-11 |
Apparatus and method for multiple slot ion implantation Grant 8,716,682 - Renau , et al. May 6, 2 | 2014-05-06 |
Technique and apparatus for monitoring ion mass, energy, and angle in processing systems Grant 8,698,107 - Godet , et al. April 15, 2 | 2014-04-15 |
Inductively Coupled Plasma ION Source Chamber with Dopant Material Shield App 20140097752 - Biloui; Costel ;   et al. | 2014-04-10 |
Mask system and method of patterning magnetic media Grant 8,679,356 - Kontos , et al. March 25, 2 | 2014-03-25 |
Plasma processing apparatus Grant 8,664,098 - Godet , et al. March 4, 2 | 2014-03-04 |
Apparatus And Method For Controllably Implanting Workpieces App 20130234034 - Renau; Anthony ;   et al. | 2013-09-12 |
Apparatus and method for controllably implanting workpieces Grant 8,461,030 - Renau , et al. June 11, 2 | 2013-06-11 |
Interfacing two insulation parts in high voltage environment Grant 8,455,760 - Low , et al. June 4, 2 | 2013-06-04 |
Techniques For Diamond Nucleation Control For Thin Film Processing App 20130045339 - Godet; Ludovic ;   et al. | 2013-02-21 |
Mask System And Method Of Patterning Magnetic Media App 20120292285 - Kontos; Alexander C. ;   et al. | 2012-11-22 |
Methods Of Affecting Material Properties And Applications Therefor App 20120288637 - Godet; Ludovic ;   et al. | 2012-11-15 |
N-type doping of zinc telluride Grant 8,288,255 - Lu , et al. October 16, 2 | 2012-10-16 |
Indirectly Heated Cathode Cartridge Design App 20120256097 - Chaney; Craig R. ;   et al. | 2012-10-11 |
Apparatus And Method For Multiple Slot Ion Implantation App 20120248328 - Renau; Anthony ;   et al. | 2012-10-04 |
N-type Doping Of Zinc Telluride App 20120202341 - LU; Xiangfeng ;   et al. | 2012-08-09 |
N-type Doping Of Zinc Telluride App 20120202340 - LU; Xianfeng ;   et al. | 2012-08-09 |
Technique And Apparatus For Monitoring Ion Mass, Energy, And Angle In Processing Systems App 20120175518 - Godet; Ludovic ;   et al. | 2012-07-12 |
Plasma Processing Apparatus App 20120111834 - Godet; Ludovic ;   et al. | 2012-05-10 |
Plasma processing apparatus Grant 8,101,510 - Godet , et al. January 24, 2 | 2012-01-24 |
Apparatus And Method For Controllably Implanting Workpieces App 20110124186 - Renau; Anthony ;   et al. | 2011-05-26 |
Interfacing Two Insulation Parts In High Voltage Environment App 20110094798 - Low; Russell J. ;   et al. | 2011-04-28 |
Interfacing two insulation parts in high voltage environment Grant 7,863,520 - Low , et al. January 4, 2 | 2011-01-04 |
Techniques for controlling a charged particle beam Grant 7,820,986 - Lubicki , et al. October 26, 2 | 2010-10-26 |
Implanting with improved uniformity and angle control on tilted wafers Grant 7,812,325 - Buonodono , et al. October 12, 2 | 2010-10-12 |
Plasma Processing Apparatus App 20100255665 - Godet; Ludovic ;   et al. | 2010-10-07 |
Bi mode ion implantation with non-parallel ion beams Grant RE41,214 - Renau , et al. April 13, 2 | 2010-04-13 |
Technique for improving ion implantation throughput and dose uniformity Grant 7,683,347 - Gupta , et al. March 23, 2 | 2010-03-23 |
Technique for shaping a ribbon-shaped ion beam Grant 7,675,047 - Radovanov , et al. March 9, 2 | 2010-03-09 |
Techniques for forming shallow junctions Grant 7,642,150 - Arevalo , et al. January 5, 2 | 2010-01-05 |
Maskless Doping Technique for Solar Cells App 20090317937 - Gupta; Atul ;   et al. | 2009-12-24 |
Multi-purpose electrostatic lens for an ion implanter system Grant 7,579,605 - Renau , et al. August 25, 2 | 2009-08-25 |
Techniques For Cold Implantation Of Carbon-containing Species App 20090200494 - Hatem; Christopher R. ;   et al. | 2009-08-13 |
Techniques for providing a ribbon-shaped gas cluster ion beam Grant 7,547,900 - Renau , et al. June 16, 2 | 2009-06-16 |
Techniques For Controlling A Charged Particle Beam App 20090072163 - Lubicki; Piotr R. ;   et al. | 2009-03-19 |
Interfacing Two Insulation Parts In High Voltage Environment App 20090047801 - Low; Russell J. ;   et al. | 2009-02-19 |
Electron confinement inside magnet of ion implanter Grant 7,459,692 - Renau , et al. December 2, 2 | 2008-12-02 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms Grant 7,459,704 - Olson , et al. December 2, 2 | 2008-12-02 |
Electron injection in ion implanter magnets Grant 7,402,816 - Renau , et al. July 22, 2 | 2008-07-22 |
Ion beam contamination determination Grant 7,402,820 - Low , et al. July 22, 2 | 2008-07-22 |
Techniques For Providing A Ribbon-shaped Gas Cluster Ion Beam App 20080149826 - RENAU; Anthony ;   et al. | 2008-06-26 |
Technique for isocentric ion beam scanning Grant 7,391,038 - Olson , et al. June 24, 2 | 2008-06-24 |
Techniques For Forming Shallow Junctions App 20080108208 - Arevalo; Edwin A. ;   et al. | 2008-05-08 |
Technique for Improved Damage Control in a Plasma Doping (PLAD) Ion Implantation App 20080090392 - Singh; Vikram ;   et al. | 2008-04-17 |
Multi-purpose Electrostatic Lens For An Ion Implanter System App 20080078951 - Renau; Anthony ;   et al. | 2008-04-03 |
Technique For Improving Ion Implantation Throughput And Dose Uniformity App 20080078953 - GUPTA; Atul ;   et al. | 2008-04-03 |
Implanting With Improved Uniformity And Angle Control On Tilted Wafers App 20080078950 - Buonodono; James ;   et al. | 2008-04-03 |
Non-doping implantation process utilizing a plasma ion implantation system App 20080075880 - Renau; Anthony ;   et al. | 2008-03-27 |
Technique for providing a segmented electrostatic lens in an ion implanter Grant 7,339,179 - Radovanov , et al. March 4, 2 | 2008-03-04 |
Methods and apparatus for adjusting beam parallelism in ion implanters Grant RE40,009 - Olson , et al. January 22, 2 | 2008-01-22 |
Ion beam contamination determination App 20070241276 - Low; Russell ;   et al. | 2007-10-18 |
Cathode assembly for indirectly heated cathode ion source Grant 7,276,847 - Olson , et al. October 2, 2 | 2007-10-02 |
Technique for isocentric ion beam scanning App 20070221870 - Olson; Joseph C. ;   et al. | 2007-09-27 |
Method of Plasma Processing with In-Situ Monitoring and Process Parameter Tuning App 20070224840 - Renau; Anthony ;   et al. | 2007-09-27 |
Methods of implanting ions and ion sources used for same App 20070178678 - Hatem; Christopher ;   et al. | 2007-08-02 |
Methods of implanting ions and ion sources used for same App 20070178679 - Hatem; Christopher ;   et al. | 2007-08-02 |
Ion beam neutral detection Grant 7,250,617 - Renau , et al. July 31, 2 | 2007-07-31 |
Technique for providing a segmented electrostatic lens in an ion implanter App 20070164229 - Radovanov; Svetlana B. ;   et al. | 2007-07-19 |
Technique for Shaping a Ribbon-Shaped Ion Beam App 20070108390 - Radovanov; Svetlana B. ;   et al. | 2007-05-17 |
Technique For Atomic Layer Deposition App 20070087581 - SINGH; Vikram ;   et al. | 2007-04-19 |
Technique for atomic layer deposition App 20070065576 - Singh; Vikram ;   et al. | 2007-03-22 |
Ion beam measurement apparatus and method Grant 7,170,067 - Renau , et al. January 30, 2 | 2007-01-30 |
Uniformity control multiple tilt axes, rotating wafer and variable scan velocity Grant 7,166,854 - Renau , et al. January 23, 2 | 2007-01-23 |
Uniformity control using multiple fixed wafer orientations and variable scan velocity Grant 7,161,161 - Renau , et al. January 9, 2 | 2007-01-09 |
Methods and apparatus for enabling multiple process steps on a single substrate App 20060258128 - Nunan; Peter ;   et al. | 2006-11-16 |
Methods and apparatus for adjusting ion implant parameters for improved process control App 20060240651 - Renau; Anthony ;   et al. | 2006-10-26 |
Ion beam measurement apparatus and method App 20060192134 - Renau; Anthony ;   et al. | 2006-08-31 |
Electron confinement inside magent of ion implanter App 20060169911 - Renau; Anthony ;   et al. | 2006-08-03 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms App 20060169915 - Olson; Joseph C. ;   et al. | 2006-08-03 |
Electron injection in ion implanter magnets App 20060169912 - Renau; Anthony ;   et al. | 2006-08-03 |
Methods and apparatus for ion implantation with control of incidence angle by beam deflection App 20060145095 - Olson; Joseph C. ;   et al. | 2006-07-06 |
Uniformity control using multiple tilt axes, rotating wafer and variable scan velocity App 20050263721 - Renau, Anthony ;   et al. | 2005-12-01 |
Uniformity control using multiple fixed wafer orientations and variable scan velocity App 20050258379 - Renau, Anthony ;   et al. | 2005-11-24 |
Ion beam neutral detection App 20050178981 - Renau, Anthony ;   et al. | 2005-08-18 |
Method and system for compensating for anneal non-uniformities Grant 6,828,204 - Renau December 7, 2 | 2004-12-07 |
Adjustable conductance limiting aperture for ion implanters Grant 6,791,097 - Scheuer , et al. September 14, 2 | 2004-09-14 |
Control system for indirectly heated cathode ion source Grant 6,777,686 - Olson , et al. August 17, 2 | 2004-08-17 |
Method And System For Compensating For Anneal Non-uniformities App 20040077149 - Renau, Anthony | 2004-04-22 |
High transmission, low energy beamline architecture for ion implanter Grant 6,635,880 - Renau October 21, 2 | 2003-10-21 |
Bi mode ion implantation with non-parallel ion beams Grant 6,573,518 - Renau , et al. June 3, 2 | 2003-06-03 |
Adjustable conductance limiting aperture for ion implanters App 20020121613 - Scheuer, Jay T. ;   et al. | 2002-09-05 |
Methods and apparatus for adjusting beam parallelism in ion implanters Grant 6,437,350 - Olson , et al. August 20, 2 | 2002-08-20 |
Control system for indirectly heated cathode ion source App 20010042836 - Olson, Joseph C. ;   et al. | 2001-11-22 |
Cathode assembly for indirectly heated cathode ion source App 20010043040 - Olson, Joseph C. ;   et al. | 2001-11-22 |
Acceleration and analysis architecture for ion implanter Grant 6,313,475 - Renau , et al. November 6, 2 | 2001-11-06 |
Acceleration and analysis architecture for ion implanter Grant 6,130,436 - Renau , et al. October 10, 2 | 2000-10-10 |
Compact high current broad beam ion implanter Grant 5,350,926 - White , et al. September 27, 1 | 1994-09-27 |
System and methods for wafer charge reduction for ion implantation Grant 4,825,087 - Renau , et al. April 25, 1 | 1989-04-25 |