loadpatents
Patent applications and USPTO patent grants for REN; Weiming.The latest application filed is for "systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus".
Patent | Date |
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Systems And Methods For Compensating Dispersion Of A Beam Separator In A Single-beam Or Multi-beam Apparatus App 20220262594 - REN; Weiming ;   et al. | 2022-08-18 |
Multiple Landing Energy Scanning Electron Microscopy Systems And Methods App 20220254599 - FANG; Wei ;   et al. | 2022-08-11 |
Apparatus For Multiple Charged-particle Beams App 20220246395 - REN; Weiming ;   et al. | 2022-08-04 |
Apparatus of plural charged-particle beams Grant 11,398,368 - Ren , et al. July 26, 2 | 2022-07-26 |
Apparatus Using Multiple Beams Of Charged Particles App 20220223366 - HU; Xuerang ;   et al. | 2022-07-14 |
Multi-beam Inspection Apparatus App 20220216029 - REN; Weiming ;   et al. | 2022-07-07 |
System And Method For Alignment Of Secondary Beams In Multi-beam Inspection Apparatus App 20220189726 - XI; Qingpo ;   et al. | 2022-06-16 |
Apparatus Of Plural Charged-particle Beams App 20220148851 - REN; Weiming ;   et al. | 2022-05-12 |
Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus Grant 11,328,894 - Ren , et al. May 10, 2 | 2022-05-10 |
Apparatus for multiple charged-particle beams Grant 11,302,514 - Ren , et al. April 12, 2 | 2022-04-12 |
Method and apparatus for charged particle detection Grant 11,295,930 - Wang , et al. April 5, 2 | 2022-04-05 |
Apparatus using multiple beams of charged particles Grant 11,289,304 - Hu , et al. March 29, 2 | 2022-03-29 |
Multi-beam inspection apparatus with improved detection performance of signal electrons Grant 11,282,675 - Ren , et al. March 22, 2 | 2022-03-22 |
Multi-beam inspection apparatus Grant 11,232,928 - Ren , et al. January 25, 2 | 2022-01-25 |
Apparatus Using Multiple Charged Particle Beams App 20220005665 - REN; Weiming ;   et al. | 2022-01-06 |
Apparatus of plural charged-particle beams Grant 11,217,423 - Ren , et al. January 4, 2 | 2022-01-04 |
Apparatus Of Plural Charged-particle Beams App 20210391138 - LIU; Xuedong ;   et al. | 2021-12-16 |
Apparatus Of Plural Charged-particle Beams App 20210384008 - LI; Shuai ;   et al. | 2021-12-09 |
Charged Particle Beam Apparatus With Multiple Detectors And Methods For Imaging App 20210319977 - LIU; Xuedong ;   et al. | 2021-10-14 |
Apparatus of plural charged-particle beams Grant 11,107,657 - Ren , et al. August 31, 2 | 2021-08-31 |
Apparatus Of Plural Charged-particle Beams App 20210233736 - REN; Weiming ;   et al. | 2021-07-29 |
Apparatus of plural charged-particle beams Grant 11,062,877 - Li , et al. July 13, 2 | 2021-07-13 |
Apparatus using multiple charged particle beams Grant 11,062,874 - Ren , et al. July 13, 2 | 2021-07-13 |
Apparatus Of Plural Charged-particle Beams App 20210193433 - REN; Weiming ;   et al. | 2021-06-24 |
Multiple Charged-particle Beam Apparatus With Low Crosstalk App 20210193437 - REN; Weiming ;   et al. | 2021-06-24 |
Apparatus of plural charged-particle beams Grant 11,043,354 - Liu , et al. June 22, 2 | 2021-06-22 |
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons App 20210151291 - REN; Weiming ;   et al. | 2021-05-20 |
Multi-beam Inspection Apparatus App 20210151280 - HU; Xuerang ;   et al. | 2021-05-20 |
Systems And Methods For Voltage Contrast Defect Detection App 20210116398 - REN; Weiming ;   et al. | 2021-04-22 |
Multi-beam inspection apparatus with improved detection performance of signal electrons Grant 10,892,138 - Ren , et al. January 12, 2 | 2021-01-12 |
Apparatus of plural charged-particle beams Grant 10,879,031 - Ren , et al. December 29, 2 | 2020-12-29 |
Multi-beam inspection apparatus Grant 10,879,032 - Hu , et al. December 29, 2 | 2020-12-29 |
Apparatus Of Plural Charged-particle Beams App 20200388464 - REN; Weiming ;   et al. | 2020-12-10 |
Multiple Charged-particle Beam Apparatus And Methods Of Operating The Same App 20200381212 - REN; Weiming ;   et al. | 2020-12-03 |
Multiple Charged-particle Beam Apparatus And Methods App 20200381211 - REN; Weiming ;   et al. | 2020-12-03 |
Multiple Charged-particle Beam Apparatus With Low Crosstalk App 20200381207 - REN; Weiming ;   et al. | 2020-12-03 |
Apparatus of plural charged-particle beams Grant 10,811,222 - Ren , et al. October 20, 2 | 2020-10-20 |
Multi-beam Inspection Apparatus With Single-beam Mode App 20200321191 - REN; Weiming ;   et al. | 2020-10-08 |
An Apparatus Using Charged Particle Beams App 20200303155 - HU; Xuerang ;   et al. | 2020-09-24 |
Charged Particle Beam Apparatus, And Systems And Methods For Operating The Apparatus App 20200286707 - MAASSEN; Martinus Gerardus, Maria, Johannes ;   et al. | 2020-09-10 |
Apparatus Of Plural Charged-particle Beams App 20200286705 - LIU; Xuedong ;   et al. | 2020-09-10 |
Sample Pre-charging Methods And Apparatuses For Charged Particle Beam Inspection App 20200266023 - LIU; Xuedong ;   et al. | 2020-08-20 |
Charged Particle Beam Apparatus App 20200251305 - Kind Code | 2020-08-06 |
Multi-beam Inspection Apparatus App 20200211811 - REN; Weiming ;   et al. | 2020-07-02 |
An Apparatus Using Multiple Beams Of Charged Particles App 20200203114 - HU; Xuerang ;   et al. | 2020-06-25 |
Apparatus Of Plural Charged Particle Beams App 20200161079 - REN; Weiming ;   et al. | 2020-05-21 |
Apparatus Of Plural Charged-particle Beams App 20200152412 - REN; Weiming ;   et al. | 2020-05-14 |
Apparatus Of Plural Charged-particle Beams App 20200152421 - Li; Shuai ;   et al. | 2020-05-14 |
Apparatus of plural charged-particle beams Grant 10,643,820 - Ren , et al. | 2020-05-05 |
System And Method For Aligning Electron Beams In Multi-beam Inspection Apparatus App 20200124546 - HU; Xuerang ;   et al. | 2020-04-23 |
Charged particle beam apparatus Grant 10,586,681 - Chen , et al. | 2020-03-10 |
Apparatus of plural charged-particle beams Grant 10,573,487 - Liu , et al. Feb | 2020-02-25 |
Apparatus For Multiple Charged-particle Beams App 20200051779 - REN; Weiming ;   et al. | 2020-02-13 |
Method And Apparatus For Charged Particle Detection App 20200027694 - WANG; Yongxin ;   et al. | 2020-01-23 |
Apparatus of plural charged-particle beams Grant 10,541,110 - Li , et al. Ja | 2020-01-21 |
Multi-beam Inspection Apparatus App 20190341222 - HU; Xuerang ;   et al. | 2019-11-07 |
An Apparatus Using Multiple Charged Particle Beams App 20190333732 - REN; Weiming ;   et al. | 2019-10-31 |
Multi-beam Inspection Apparatus With Improved Detection Performance Of Signal Electrons App 20190279844 - REN; Weiming ;   et al. | 2019-09-12 |
Apparatus Of Plural Charged-particle Beams App 20190279842 - REN; Weiming ;   et al. | 2019-09-12 |
Apparatus of plural charged-particle beams Grant 10,395,886 - Ren , et al. A | 2019-08-27 |
Apparatus Of Plural Charged-particle Beams App 20190259573 - REN; Weiming ;   et al. | 2019-08-22 |
Apparatus Of Plural Charged-particle Beams App 20190172677 - REN; Weiming ;   et al. | 2019-06-06 |
Apparatus of plural charged-particle beams Grant 10,276,347 - Ren , et al. | 2019-04-30 |
Apparatus of plural charged-particle beams Grant 10,236,156 - Ren , et al. | 2019-03-19 |
Apparatus Of Plural Charged-particle Beams App 20190074157 - LIU; Xuedong ;   et al. | 2019-03-07 |
Apparatus Of Plural Charged-particle Beams App 20190057837 - REN; Weiming ;   et al. | 2019-02-21 |
Systems And Methods For Compensating Dispersion Of A Beam Separator In A Single-beam Or Multi-beam Apparatus App 20190035595 - REN; Weiming ;   et al. | 2019-01-31 |
Apparatus Of Plural Charged-particle Beams App 20180350555 - LI; Shuai ;   et al. | 2018-12-06 |
Apparatus of plural charged-particle beams Grant 10,141,160 - Ren , et al. Nov | 2018-11-27 |
Apparatus of plural charged-particle beams Grant 10,115,559 - Liu , et al. October 30, 2 | 2018-10-30 |
Apparatus of plural charged-particle beams Grant 10,109,456 - Ren , et al. October 23, 2 | 2018-10-23 |
Apparatus of plural charged-particle beams Grant 10,062,541 - Ren , et al. August 28, 2 | 2018-08-28 |
Charged particle beam apparatus Grant 10,020,164 - Chen , et al. July 10, 2 | 2018-07-10 |
Apparatus of plural charged-particle beams Grant 9,922,799 - Li , et al. March 20, 2 | 2018-03-20 |
Apparatus Of Plural Charged-particle Beams App 20170309449 - REN; Weiming ;   et al. | 2017-10-26 |
Apparatus of Plural Charged-Particle Beams App 20170213688 - Ren; Weiming ;   et al. | 2017-07-27 |
Apparatus of plural charged-particle beams Grant 9,691,586 - Ren , et al. June 27, 2 | 2017-06-27 |
Apparatus of plural charged-particle beams Grant 9,691,588 - Ren , et al. June 27, 2 | 2017-06-27 |
Apparatus of Plural Charged-Particle Beams App 20170154756 - Ren; Weiming ;   et al. | 2017-06-01 |
Apparatus of Plural Charged-Particle Beams App 20170125206 - Ren; Weiming ;   et al. | 2017-05-04 |
Apparatus of Plural Charged-Particle Beams App 20170125205 - Liu; Xuedong ;   et al. | 2017-05-04 |
Apparatus of plural charged-particle beams Grant 9,607,805 - Liu , et al. March 28, 2 | 2017-03-28 |
Apparatus of Plural Charged-Particle Beams App 20170025243 - Ren; Weiming ;   et al. | 2017-01-26 |
Apparatus of Plural Charged-Particle Beams App 20170025241 - Li; Shuai ;   et al. | 2017-01-26 |
Apparatus of Plural Charged-Particle Beams App 20160336142 - Liu; Xuedong ;   et al. | 2016-11-17 |
Apparatus of Plural Charged-Particle Beams App 20160284505 - Ren; Weiming ;   et al. | 2016-09-29 |
Apparatus of Plural Charged-Particle Beams App 20160268096 - Ren; Weiming ;   et al. | 2016-09-15 |
Apparatus of plural charged particle beams with multi-axis magnetic lenses Grant 9,431,209 - Ren , et al. August 30, 2 | 2016-08-30 |
Energy filter for charged particle beam apparatus Grant 9,384,936 - Ren , et al. July 5, 2 | 2016-07-05 |
Charged particle beam apparatus Grant 9,362,087 - Chen , et al. June 7, 2 | 2016-06-07 |
Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic Lenses App 20160064180 - Ren; Weiming ;   et al. | 2016-03-03 |
Energy Filter for Charged Particle Beam Apparatus App 20160035533 - Ren; Weiming ;   et al. | 2016-02-04 |
Charged Particle Beam Apparatus App 20150371820 - Chen; Zhongwei ;   et al. | 2015-12-24 |
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 9,202,658 - Chen , et al. December 1, 2 | 2015-12-01 |
Charged particle beam apparatus Grant 9,190,241 - Chen , et al. November 17, 2 | 2015-11-17 |
Charged particle beam apparatus Grant 9,177,758 - Chen , et al. November 3, 2 | 2015-11-03 |
Energy-discrimination detection device App 20150248990 - Ren; Weiming ;   et al. | 2015-09-03 |
Energy-discrimination detection device Grant 9,117,626 - Ren , et al. August 25, 2 | 2015-08-25 |
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 9,105,440 - Chen , et al. August 11, 2 | 2015-08-11 |
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20150179384 - Chen; Zhongwei ;   et al. | 2015-06-25 |
Charged Particle Beam Apparatus App 20150155133 - Chen; Zhongwei ;   et al. | 2015-06-04 |
Method for improving performance of an energy filter Grant 9,048,062 - Ren , et al. June 2, 2 | 2015-06-02 |
Electron beam apparatus Grant 9,048,063 - Ren , et al. June 2, 2 | 2015-06-02 |
Charged Particle Beam Apparatus App 20150144788 - Chen; Zhongwei ;   et al. | 2015-05-28 |
System and method for controlling charge-up in an electron beam apparatus Grant 9,000,370 - Ren , et al. April 7, 2 | 2015-04-07 |
Energy filter for charged particle beam apparatus Grant 9,000,395 - Ren , et al. April 7, 2 | 2015-04-07 |
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 9,000,394 - Ren , et al. April 7, 2 | 2015-04-07 |
System and method for controlling charge-up in an electron beam apparatus Grant 9,000,369 - Ren , et al. April 7, 2 | 2015-04-07 |
Charged Particle Beam Apparatus App 20150083912 - Chen; Zhongwei ;   et al. | 2015-03-26 |
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20150060665 - Ren; Weiming ;   et al. | 2015-03-05 |
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20150060662 - Chen; Zhongwei ;   et al. | 2015-03-05 |
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20150060670 - Ren; Weiming ;   et al. | 2015-03-05 |
System and method for controlling charge-up in an electron beam apparatus Grant 8,907,281 - Ren , et al. December 9, 2 | 2014-12-09 |
Charged Particle Beam Apparatus App 20140291510 - Chen; Zhongwei ;   et al. | 2014-10-02 |
Energy Filter for Charged Particle Beam Apparatus App 20140284476 - Ren; Weiming ;   et al. | 2014-09-25 |
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 8,835,867 - Chen , et al. September 16, 2 | 2014-09-16 |
Multi-axis magnetic lens for focusing a plurality of charged particle beams Grant 8,791,425 - Ren , et al. July 29, 2 | 2014-07-29 |
System and Method for Controlling Charge-up in an Electron Beam Apparatus App 20140151554 - Ren; Weiming ;   et al. | 2014-06-05 |
Charged particle beam apparatus Grant 08618480 - | 2013-12-31 |
Charged particle beam apparatus Grant 8,618,480 - Ren , et al. December 31, 2 | 2013-12-31 |
Monochromator for charged particle beam apparatus Grant 8,592,761 - Ren , et al. November 26, 2 | 2013-11-26 |
Charged Particle Beam Apparatus App 20130277554 - Ren; Weiming ;   et al. | 2013-10-24 |
Particle detection system Grant 8,552,377 - Wang , et al. October 8, 2 | 2013-10-08 |
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130248730 - Ren; Weiming ;   et al. | 2013-09-26 |
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130181138 - Chen; Zhongwei ;   et al. | 2013-07-18 |
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams App 20130153782 - Ren; Weiming ;   et al. | 2013-06-20 |
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 8,445,862 - Chen , et al. May 21, 2 | 2013-05-21 |
Wien Filter App 20130112889 - Chen; Zhongwei ;   et al. | 2013-05-09 |
Wien filter Grant 8,436,317 - Chen , et al. May 7, 2 | 2013-05-07 |
Wien filter with reduced field leakage Grant 8,421,029 - Ren , et al. April 16, 2 | 2013-04-16 |
Monochromator for Charged Particle Beam Apparatus App 20120318978 - REN; WEIMING ;   et al. | 2012-12-20 |
Charged particle apparatus Grant 8,319,192 - Ren November 27, 2 | 2012-11-27 |
Apparatus of plural charged particle beams with multi-axis magnetic lens Grant 8,294,095 - Chen , et al. October 23, 2 | 2012-10-23 |
Monochromator for charged particle beam apparatus Grant 8,274,046 - Ren , et al. September 25, 2 | 2012-09-25 |
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20120145900 - CHEN; ZHONGWEI ;   et al. | 2012-06-14 |
Apparatus Of Plural Charged Particle Beams With Multi-axis Magnetic Lens App 20120145917 - CHEN; ZHONGWEI ;   et al. | 2012-06-14 |
Particle Detection System App 20120145898 - WANG; YI-XIANG ;   et al. | 2012-06-14 |
Charged Particle Apparatus App 20120049064 - REN; WEIMING | 2012-03-01 |
E-beam defect review system Grant 8,094,924 - Jau , et al. January 10, 2 | 2012-01-10 |
Multi-axis magnetic lens Grant 8,003,953 - Chen , et al. August 23, 2 | 2011-08-23 |
Multi-axis Magnetic Lens App 20110139996 - CHEN; ZHONGWEI ;   et al. | 2011-06-16 |
Electron beam apparatus Grant 7,960,697 - Chen , et al. June 14, 2 | 2011-06-14 |
Projection electronic microscope for reducing geometric aberration and space charge effect Grant 7,855,364 - Ren , et al. December 21, 2 | 2010-12-21 |
Electron beam apparatus Grant 7,759,653 - Chen , et al. July 20, 2 | 2010-07-20 |
E-beam Defect Review System App 20100150429 - JAU; Jack ;   et al. | 2010-06-17 |
Electron Beam Apparatus App 20100102227 - CHEN; ZHONGWEI ;   et al. | 2010-04-29 |
Electron Beam Apparatus App 20090294664 - Chen; Zhong-Wei ;   et al. | 2009-12-03 |
Projection imaging type electron microscope Grant 7,423,268 - Ren September 9, 2 | 2008-09-09 |
Projection Electronic Microscope For Reducing Geometric Aberration And Space Charge Effect App 20080121820 - REN; Weiming ;   et al. | 2008-05-29 |
Projection imaging type electron microscope App 20060011833 - Ren; Weiming | 2006-01-19 |
Charged particle beam control apparatus App 20030030007 - Karimata, Tsutomu ;   et al. | 2003-02-13 |
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