loadpatents
Patent applications and USPTO patent grants for REMIE; Marinus Jan.The latest application filed is for "lithographic apparatus and method".
Patent | Date |
---|---|
Lithographic Apparatus And Method App 20220206400 - TEN KATE; Nicolaas ;   et al. | 2022-06-30 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Lithographic apparatus and method Grant 11,281,115 - Ten Kate , et al. March 22, 2 | 2022-03-22 |
Patterning device cooling apparatus Grant 10,990,025 - Van Bokhoven , et al. April 27, 2 | 2021-04-27 |
Lithographic Apparatus And Method App 20200142325 - Ten Kate; Nicolaas ;   et al. | 2020-05-07 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Lithographic apparatus and method Grant 10,551,752 - Ten Kate , et al. Fe | 2020-02-04 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Patterning Device Cooling Apparatus App 20190196345 - VAN BOKHOVEN; Laurentius Johannes Adrianus ;   et al. | 2019-06-27 |
Patterning device cooling apparatus Grant 10,222,713 - Van Bokhoven , et al. | 2019-03-05 |
Patterning Device Cooling Apparatus App 20180356740 - VAN BOKHOVEN; Laurentius Johannes Adrianus ;   et al. | 2018-12-13 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2 | 2018-07-24 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
Lithographic apparatus and method Grant 9,632,435 - Ten Kate , et al. April 25, 2 | 2017-04-25 |
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ;   et al. | 2015-12-10 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Lithographic Apparatus And Method App 20110222032 - TEN KATE; Nicolaas ;   et al. | 2011-09-15 |
Lithographic Apparatus And Method App 20110222033 - Ten Kate; Nicolaas ;   et al. | 2011-09-15 |
Lithographic Apparatus App 20100302518 - VAN EIJK; Jan ;   et al. | 2010-12-02 |
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