Patent | Date |
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Micromirror devices with in-plane deformable hinge Grant 7,215,459 - Huibers , et al. May 8, 2 | 2007-05-08 |
Projection display Grant 7,172,296 - Huibers February 6, 2 | 2007-02-06 |
Micromirror array Grant 7,167,297 - Huibers January 23, 2 | 2007-01-23 |
Barrier layers for microelectromechanical systems Grant 7,138,693 - Patel , et al. November 21, 2 | 2006-11-21 |
Micromirror device and method for making the same Grant 7,119,944 - Patel , et al. October 10, 2 | 2006-10-10 |
Micromirror having offset addressing electrode Grant 7,113,322 - Patel September 26, 2 | 2006-09-26 |
Electrical contacts in microelectromechanical devices with multiple substrates Grant 7,110,160 - Patel , et al. September 19, 2 | 2006-09-19 |
Micromirrors with OFF-angle electrodes and stops Grant 7,099,065 - Patel , et al. August 29, 2 | 2006-08-29 |
Micromirror array device and a method for making the same Grant 7,092,143 - Heureux August 15, 2 | 2006-08-15 |
Display apparatus with improved contrast ratio Grant 7,085,035 - Huibers , et al. August 1, 2 | 2006-08-01 |
Micromirror and post arrangements on substrates Grant 7,075,702 - Huibers , et al. July 11, 2 | 2006-07-11 |
MEMS with flexible portions made of novel materials Grant 7,071,520 - Reid July 4, 2 | 2006-07-04 |
Transition metal dielectric alloy materials for MEMS Grant 7,057,246 - Reid June 6, 2 | 2006-06-06 |
MEMS device made of transition metal-dielectric oxide materials Grant 7,057,251 - Reid June 6, 2 | 2006-06-06 |
Light recapture projection system Grant 7,055,961 - Huibers June 6, 2 | 2006-06-06 |
Projection display with full color saturation and variable luminosity Grant 7,057,674 - Richards , et al. June 6, 2 | 2006-06-06 |
Micromirror and post arrangements on substrates Grant 7,042,622 - Huibers , et al. May 9, 2 | 2006-05-09 |
Method for vapor phase etching of silicon Grant 7,041,224 - Patel , et al. May 9, 2 | 2006-05-09 |
Light blocking layers in MEMS packages Grant 7,042,623 - Huibers , et al. May 9, 2 | 2006-05-09 |
Method of improving the performance of microstructures Grant 7,034,982 - Doan April 25, 2 | 2006-04-25 |
Asymmetric spatial light modulator in a package Grant 7,034,985 - Huibers , et al. April 25, 2 | 2006-04-25 |
Methods and apparatus for selectively updating memory cell arrays Grant 7,027,205 - Richards April 11, 2 | 2006-04-11 |
Etching method used in fabrications of microstructures Grant 7,027,200 - Shi , et al. April 11, 2 | 2006-04-11 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 7,027,207 - Huibers April 11, 2 | 2006-04-11 |
Micromirror array for projection TV Grant 7,023,606 - Huibers April 4, 2 | 2006-04-04 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 7,023,607 - Huibers April 4, 2 | 2006-04-04 |
Micromirror array device with a small pitch size Grant 7,019,376 - Patel , et al. March 28, 2 | 2006-03-28 |
Projection TV with improved micromirror array Grant 7,018,052 - Huibers March 28, 2 | 2006-03-28 |
Micromirrors and hinge structures for micromirror arrays in projection displays Grant 7,019,880 - Huibers , et al. March 28, 2 | 2006-03-28 |
Spatial light modulator with charge-pump pixel cell Grant 7,012,592 - Richards March 14, 2 | 2006-03-14 |
Packaged micromirror array for a projection display Grant 7,012,731 - Huibers March 14, 2 | 2006-03-14 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 7,012,733 - Huibers March 14, 2 | 2006-03-14 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 7,009,754 - Huibers March 7, 2 | 2006-03-07 |
Packaged micromirror array for a projection display Grant 7,006,275 - Huibers February 28, 2 | 2006-02-28 |
Optical materials in packaging micromirror devices Grant 7,002,727 - Huibers February 21, 2 | 2006-02-21 |
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 7,002,726 - Patel , et al. February 21, 2 | 2006-02-21 |
Micromirror modulation method and digital apparatus with improved grayscale Grant 6,999,224 - Huibers February 14, 2 | 2006-02-14 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,995,040 - Patel , et al. February 7, 2 | 2006-02-07 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,995,034 - Patel , et al. February 7, 2 | 2006-02-07 |
Micromirror array having reduced gap between adjacent micromirrors of the micromirror array Grant 6,985,277 - Huibers , et al. January 10, 2 | 2006-01-10 |
Micromirrors with novel mirror plates Grant 6,980,349 - Huibers , et al. December 27, 2 | 2005-12-27 |
Packaged microelectromechanical device with lubricant Grant 6,979,893 - Dunphy , et al. December 27, 2 | 2005-12-27 |
Integrated driver for use in display systems having micromirrors Grant 6,980,197 - Richards December 27, 2 | 2005-12-27 |
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 6,980,347 - Patel , et al. December 27, 2 | 2005-12-27 |
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields Grant 6,974,713 - Patel , et al. December 13, 2 | 2005-12-13 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,975,444 - Huibers December 13, 2 | 2005-12-13 |
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 6,972,891 - Patel , et al. December 6, 2 | 2005-12-06 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,969,635 - Patel , et al. November 29, 2 | 2005-11-29 |
High angle micro-mirrors and processes Grant 6,970,280 - Patel , et al. November 29, 2 | 2005-11-29 |
Micromirror array having reduced gap between adjacent micromirrors of the micromirror array Grant 6,970,281 - Huibers , et al. November 29, 2 | 2005-11-29 |
Micromirror array having reduced gap between adjacent micromirrors of the micromirror array Grant 6,965,468 - Huibers , et al. November 15, 2 | 2005-11-15 |
Micromirror elements, package for the micromirror elements, and projection system therefor Grant 6,962,419 - Huibers November 8, 2 | 2005-11-08 |
Methods for forming and releasing microelectromechanical structures Grant 6,960,305 - Doan , et al. November 1, 2 | 2005-11-01 |
Method for removing a sacrificial material with a compressed fluid Grant 6,958,123 - Reid , et al. October 25, 2 | 2005-10-25 |
Spatial light modulators with light absorbing areas Grant 6,958,846 - Huibers , et al. October 25, 2 | 2005-10-25 |
Hinge structures for micro-mirror arrays Grant 6,952,302 - Doan , et al. October 4, 2 | 2005-10-04 |
Spatial light modulators with light blocking and absorbing areas Grant 6,952,301 - Huibers October 4, 2 | 2005-10-04 |
Multiple hinge MEMS device Grant 6,950,223 - Huibers , et al. September 27, 2 | 2005-09-27 |
Spatial light modulators having photo-detectors for use in display systems Grant 6,950,217 - Richards September 27, 2 | 2005-09-27 |
Apparatus and method for flow of process gas in an ultra-clean environment Grant 6,949,202 - Patel , et al. September 27, 2 | 2005-09-27 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,947,200 - Huibers September 20, 2 | 2005-09-20 |
Method for achieving improved selectivity in an etching process Grant 6,942,811 - Patel , et al. September 13, 2 | 2005-09-13 |
Etching method in fabrications of microstructures Grant 6,939,472 - Schaadt , et al. September 6, 2 | 2005-09-06 |
Spatial light modulators with light blocking/absorbing areas Grant 6,906,847 - Huibers , et al. June 14, 2 | 2005-06-14 |
Method for making a micromechanical device by using a sacrificial substrate Grant 6,900,072 - Patel , et al. May 31, 2 | 2005-05-31 |
Integrated driver for use in display systems having micromirrors Grant 6,888,521 - Richards May 3, 2 | 2005-05-03 |
High angle micro-mirrors and processes Grant 6,885,494 - Patel , et al. April 26, 2 | 2005-04-26 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050074919 - Patel, Satayadev R. ;   et al. | 2005-04-07 |
Micromirrors with asymmetric stopping mechanisms Grant 6,876,485 - Dunphy April 5, 2 | 2005-04-05 |
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields Grant 6,873,450 - Patel , et al. March 29, 2 | 2005-03-29 |
Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays Grant 6,867,897 - Patel , et al. March 15, 2 | 2005-03-15 |
Methods and apparatus for selectively updating memory cell arrays Grant 6,856,447 - Richards , et al. February 15, 2 | 2005-02-15 |
Barrier layers for microelectromechanical systems Grant 6,849,471 - Patel , et al. February 1, 2 | 2005-02-01 |
Spatial light modulators with light absorbing areas Grant 6,844,959 - Huibers , et al. January 18, 2 | 2005-01-18 |
Method for adjusting a micro-mechanical device Grant 6,838,302 - Huibers January 4, 2 | 2005-01-04 |
Method for reading and writing memory cells of spatial light modulators used in display systems Grant 6,809,977 - Richards October 26, 2 | 2004-10-26 |
Multilayer hinge structures for micro-mirror arrays in projection displays Grant 6,804,039 - Doan , et al. October 12, 2 | 2004-10-12 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants Grant 6,800,210 - Patel , et al. October 5, 2 | 2004-10-05 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,798,561 - Huibers September 28, 2 | 2004-09-28 |
Monochrome and color digital display systems and methods for implementing the same Grant 6,756,976 - Richards June 29, 2 | 2004-06-29 |
Deflectable micromirrors with stopping mechanisms Grant 6,741,383 - Huibers , et al. May 25, 2 | 2004-05-25 |
Projection display with multiply filtered light Grant 6,726,333 - Huibers , et al. April 27, 2 | 2004-04-27 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,690,502 - Huibers February 10, 2 | 2004-02-10 |
Reflective spatial light modulator with deflectable elements formed on a light transmissive substrate Grant 6,538,800 - Huibers March 25, 2 | 2003-03-25 |
Deflectable spatial light modulator having superimposed hinge and deflectable element Grant 6,529,310 - Huibers , et al. March 4, 2 | 2003-03-04 |
Projection system and mirror elements for improved contrast ratio in spatial light modulators Grant 6,523,961 - Ilkov , et al. February 25, 2 | 2003-02-25 |
Method for vapor phase etching of silicon App 20020195423 - Patel, Satyadev R. ;   et al. | 2002-12-26 |
Deflectable micromirrors with stopping mechanisms App 20020196524 - Huibers, Andrew G. ;   et al. | 2002-12-26 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants App 20020197761 - Patel, Satyadev R. ;   et al. | 2002-12-26 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements App 20020176150 - Huibers, Andrew G. | 2002-11-28 |
Deflectable spatial light modulator having stopping mechanisms Grant 6,396,619 - Huibers , et al. May 28, 2 | 2002-05-28 |
Monochrome and color digital display systems and methods Grant 6,388,661 - Richards May 14, 2 | 2002-05-14 |
Double substrate reflective spatial light modulator Grant 6,356,378 - Huibers March 12, 2 | 2002-03-12 |
Encapsulated multi-directional light beam steering device Grant 6,337,760 - Huibers , et al. January 8, 2 | 2002-01-08 |
Fluoride gas etching of silicon with improved selectivity Grant 6,290,864 - Patel , et al. September 18, 2 | 2001-09-18 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,172,797 - Huibers January 9, 2 | 2001-01-09 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements Grant 6,046,840 - Huibers April 4, 2 | 2000-04-04 |
Reflective spatial light modulator with encapsulated micro-mechanical elements Grant 5,835,256 - Huibers November 10, 1 | 1998-11-10 |